{"id":"https://openalex.org/W2012930475","doi":"https://doi.org/10.1109/iscas.2014.6865367","title":"Sigma - Delta inspired control technique for the improvement of MEMS reliability","display_name":"Sigma - Delta inspired control technique for the improvement of MEMS reliability","publication_year":2014,"publication_date":"2014-06-01","ids":{"openalex":"https://openalex.org/W2012930475","doi":"https://doi.org/10.1109/iscas.2014.6865367","mag":"2012930475"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2014.6865367","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2014.6865367","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045044695","display_name":"Panagiotis Giounanlis","orcid":"https://orcid.org/0000-0002-6109-5598"},"institutions":[{"id":"https://openalex.org/I100930933","display_name":"University College Dublin","ror":"https://ror.org/05m7pjf47","country_code":"IE","type":"education","lineage":["https://openalex.org/I100930933"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Panagiotis Giounanlis","raw_affiliation_strings":["University College Dublin, School of Electrical, Electronic and Communications Engineering, Dublin, Ireland","Sch. of Electr. Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University College Dublin, School of Electrical, Electronic and Communications Engineering, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]},{"raw_affiliation_string":"Sch. of Electr. Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001003834","display_name":"Elena Blokhina","orcid":"https://orcid.org/0000-0002-4164-4350"},"institutions":[{"id":"https://openalex.org/I100930933","display_name":"University College Dublin","ror":"https://ror.org/05m7pjf47","country_code":"IE","type":"education","lineage":["https://openalex.org/I100930933"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Elena Blokhina","raw_affiliation_strings":["University College Dublin, School of Electrical, Electronic and Communications Engineering, Dublin, Ireland","Sch. of Electr. Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University College Dublin, School of Electrical, Electronic and Communications Engineering, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]},{"raw_affiliation_string":"Sch. of Electr. Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074660128","display_name":"Orla Feely","orcid":"https://orcid.org/0000-0003-3426-6854"},"institutions":[{"id":"https://openalex.org/I100930933","display_name":"University College Dublin","ror":"https://ror.org/05m7pjf47","country_code":"IE","type":"education","lineage":["https://openalex.org/I100930933"]}],"countries":["IE"],"is_corresponding":false,"raw_author_name":"Orla Feely","raw_affiliation_strings":["University College Dublin, School of Electrical, Electronic and Communications Engineering, Dublin, Ireland","Sch. of Electr. Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University College Dublin, School of Electrical, Electronic and Communications Engineering, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]},{"raw_affiliation_string":"Sch. of Electr. Electron. & Commun. Eng., Univ. Coll. Dublin, Dublin, Ireland","institution_ids":["https://openalex.org/I100930933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068947543","display_name":"Sergi Gorreta","orcid":null},"institutions":[{"id":"https://openalex.org/I9617848","display_name":"Universitat Polit\u00e8cnica de Catalunya","ror":"https://ror.org/03mb6wj31","country_code":"ES","type":"education","lineage":["https://openalex.org/I9617848"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Sergi Gorreta","raw_affiliation_strings":["Micro and Nano Technologies group, Universitat Polit\u00e8cnica de Catalunya, Barcelona, Spain","Micro & Nano Technol. Group, Univ. Politec. de Catalunya, Barcelona, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Technologies group, Universitat Polit\u00e8cnica de Catalunya, Barcelona, Spain","institution_ids":["https://openalex.org/I9617848"]},{"raw_affiliation_string":"Micro & Nano Technol. Group, Univ. Politec. de Catalunya, Barcelona, Spain","institution_ids":["https://openalex.org/I9617848"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Joan Pons Nin","orcid":null},"institutions":[{"id":"https://openalex.org/I9617848","display_name":"Universitat Polit\u00e8cnica de Catalunya","ror":"https://ror.org/03mb6wj31","country_code":"ES","type":"education","lineage":["https://openalex.org/I9617848"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Joan Pons Nin","raw_affiliation_strings":["Micro and Nano Technologies group, Universitat Polit\u00e8cnica de Catalunya, Barcelona, Spain","Micro & Nano Technol. Group, Univ. Politec. de Catalunya, Barcelona, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Technologies group, Universitat Polit\u00e8cnica de Catalunya, Barcelona, Spain","institution_ids":["https://openalex.org/I9617848"]},{"raw_affiliation_string":"Micro & Nano Technol. Group, Univ. Politec. de Catalunya, Barcelona, Spain","institution_ids":["https://openalex.org/I9617848"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077719342","display_name":"Manuel Dom\u00ednguez-Pumar","orcid":"https://orcid.org/0000-0001-5439-7953"},"institutions":[{"id":"https://openalex.org/I9617848","display_name":"Universitat Polit\u00e8cnica de Catalunya","ror":"https://ror.org/03mb6wj31","country_code":"ES","type":"education","lineage":["https://openalex.org/I9617848"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Manuel Dominguez","raw_affiliation_strings":["Micro and Nano Technologies group, Universitat Polit\u00e8cnica de Catalunya, Barcelona, Spain","Micro & Nano Technol. Group, Univ. Politec. de Catalunya, Barcelona, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Technologies group, Universitat Polit\u00e8cnica de Catalunya, Barcelona, Spain","institution_ids":["https://openalex.org/I9617848"]},{"raw_affiliation_string":"Micro & Nano Technol. Group, Univ. Politec. de Catalunya, Barcelona, Spain","institution_ids":["https://openalex.org/I9617848"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4259,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.67504663,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1243","last_page":"1246"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7781659960746765},{"id":"https://openalex.org/keywords/delta-sigma-modulation","display_name":"Delta-sigma modulation","score":0.742950975894928},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.7290258407592773},{"id":"https://openalex.org/keywords/sigma","display_name":"Sigma","score":0.5757503509521484},{"id":"https://openalex.org/keywords/modulation","display_name":"Modulation (music)","score":0.5454360842704773},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.5441168546676636},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5281738638877869},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.48651570081710815},{"id":"https://openalex.org/keywords/charge-control","display_name":"Charge control","score":0.4145893454551697},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.4122197926044464},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.40577203035354614},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3748168647289276},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3725830316543579},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3043830394744873},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.24029359221458435},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.17186176776885986},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1629384160041809},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.08411675691604614}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7781659960746765},{"id":"https://openalex.org/C68754193","wikidata":"https://www.wikidata.org/wiki/Q1184820","display_name":"Delta-sigma modulation","level":3,"score":0.742950975894928},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.7290258407592773},{"id":"https://openalex.org/C2778049214","wikidata":"https://www.wikidata.org/wiki/Q7512234","display_name":"Sigma","level":2,"score":0.5757503509521484},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.5454360842704773},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.5441168546676636},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5281738638877869},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.48651570081710815},{"id":"https://openalex.org/C2777681924","wikidata":"https://www.wikidata.org/wiki/Q5074262","display_name":"Charge control","level":4,"score":0.4145893454551697},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.4122197926044464},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.40577203035354614},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3748168647289276},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3725830316543579},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3043830394744873},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.24029359221458435},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.17186176776885986},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1629384160041809},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.08411675691604614},{"id":"https://openalex.org/C555008776","wikidata":"https://www.wikidata.org/wiki/Q267298","display_name":"Battery (electricity)","level":3,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2014.6865367","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2014.6865367","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7200000286102295}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1981897901","https://openalex.org/W2024357708","https://openalex.org/W2030323433","https://openalex.org/W2041131960","https://openalex.org/W2059274331","https://openalex.org/W2061860728","https://openalex.org/W2067900275","https://openalex.org/W2069018624","https://openalex.org/W2073559581","https://openalex.org/W2097157908","https://openalex.org/W2105642489","https://openalex.org/W2168847333","https://openalex.org/W2466217033"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W4233608695","https://openalex.org/W2059274331","https://openalex.org/W2362777903"],"abstract_inverted_index":{"Dielectric":[0],"charging":[1],"of":[2,16,28,66,71,90,96],"insulating":[3],"films":[4],"in":[5,93],"micro-electromechanical":[6],"systems":[7],"(MEMS)":[8],"has":[9],"a":[10,29,44,52],"crucial":[11],"effect":[12],"on":[13,51,63],"the":[14,26,40,57,64,67,77,80,88,91,94],"operation":[15,89],"those":[17],"devices.":[18],"In":[19],"our":[20],"previous":[21],"work":[22],"we":[23],"have":[24],"shown":[25],"feasibility":[27],"new":[30],"sigma-delta":[31,83],"based":[32,50,62],"control":[33],"method":[34,48,81,92],"which":[35],"is":[36,49,60,74],"able":[37],"to":[38,75,86],"maintain":[39],"dielectric":[41],"charge":[42],"at":[43],"desired":[45],"level.":[46],"The":[47,69],"smart":[53],"actuation":[54],"technique":[55],"where":[56],"applied":[58],"voltage":[59],"selected":[61],"state":[65],"device.":[68],"purpose":[70],"this":[72],"paper":[73],"show":[76],"link":[78],"between":[79],"and":[82,85],"modulation":[84],"investigate":[87],"space":[95],"device":[97],"parameters.":[98]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}