{"id":"https://openalex.org/W2065365074","doi":"https://doi.org/10.1109/iscas.2014.6865154","title":"Scaling and operation characteristics of HfO&lt;inf&gt;x&lt;/inf&gt; based vertical RRAM for 3D cross-point architecture","display_name":"Scaling and operation characteristics of HfO&lt;inf&gt;x&lt;/inf&gt; based vertical RRAM for 3D cross-point architecture","publication_year":2014,"publication_date":"2014-06-01","ids":{"openalex":"https://openalex.org/W2065365074","doi":"https://doi.org/10.1109/iscas.2014.6865154","mag":"2065365074"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2014.6865154","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2014.6865154","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010857702","display_name":"Jinfeng Kang","orcid":"https://orcid.org/0000-0002-6286-0423"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"J.F. Kang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008633924","display_name":"Bin Gao","orcid":"https://orcid.org/0000-0002-2417-983X"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"B. Gao","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026574260","display_name":"Baojun Chen","orcid":"https://orcid.org/0000-0002-2840-7617"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"B. Chen","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089747900","display_name":"Peng Huang","orcid":"https://orcid.org/0000-0003-3280-0099"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"P. Huang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004196013","display_name":"F. F. Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"F.F. Zhang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077770778","display_name":"X.Y. Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"X.Y. Liu","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057005799","display_name":"Hsien\u2010Yi Chen","orcid":"https://orcid.org/0000-0001-9353-026X"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H-Y. Chen","raw_affiliation_strings":["Department of Electrical Engineering, Stanford University, Stanford, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101723758","display_name":"Zizhen Jiang","orcid":"https://orcid.org/0000-0003-2595-9456"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Z. Jiang","raw_affiliation_strings":["Department of Electrical Engineering, Stanford University, Stanford, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059975258","display_name":"H.\u2010S. Philip Wong","orcid":"https://orcid.org/0000-0002-0096-1472"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H.-S. Philip Wong","raw_affiliation_strings":["Stanford University, Stanford, CA, US"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Stanford University, Stanford, CA, US","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054894631","display_name":"Shimeng Yu","orcid":"https://orcid.org/0000-0002-0068-3652"},"institutions":[{"id":"https://openalex.org/I55732556","display_name":"Arizona State University","ror":"https://ror.org/03efmqc40","country_code":"US","type":"education","lineage":["https://openalex.org/I55732556"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shimeng Yu","raw_affiliation_strings":["School of Computing, Informatics, and Decision Systems Engineering, Arizona State University, AZ, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Computing, Informatics, and Decision Systems Engineering, Arizona State University, AZ, USA","institution_ids":["https://openalex.org/I55732556"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"417","last_page":"420"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resistive-random-access-memory","display_name":"Resistive random-access memory","score":0.927875280380249},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.5532327890396118},{"id":"https://openalex.org/keywords/scaling","display_name":"Scaling","score":0.5365851521492004},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5328498482704163},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4764581024646759},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.4559685289859772},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.4248756766319275},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4189617931842804},{"id":"https://openalex.org/keywords/reset","display_name":"Reset (finance)","score":0.41561439633369446},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35190549492836},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2327163815498352},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1311226487159729}],"concepts":[{"id":"https://openalex.org/C182019814","wikidata":"https://www.wikidata.org/wiki/Q1143830","display_name":"Resistive random-access memory","level":3,"score":0.927875280380249},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.5532327890396118},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.5365851521492004},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5328498482704163},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4764581024646759},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.4559685289859772},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.4248756766319275},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4189617931842804},{"id":"https://openalex.org/C2779795794","wikidata":"https://www.wikidata.org/wiki/Q7315343","display_name":"Reset (finance)","level":2,"score":0.41561439633369446},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35190549492836},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2327163815498352},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1311226487159729},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C106159729","wikidata":"https://www.wikidata.org/wiki/Q2294553","display_name":"Financial economics","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2014.6865154","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2014.6865154","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Symposium on Circuits and Systems (ISCAS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1596998040","https://openalex.org/W1976903415","https://openalex.org/W1979044707","https://openalex.org/W2004823737","https://openalex.org/W2036875932","https://openalex.org/W2040578542","https://openalex.org/W2049639700","https://openalex.org/W2153666741","https://openalex.org/W2319475254","https://openalex.org/W6635836132","https://openalex.org/W6660362698","https://openalex.org/W6682516171"],"related_works":["https://openalex.org/W4312903428","https://openalex.org/W2621306919","https://openalex.org/W1966944787","https://openalex.org/W2032785938","https://openalex.org/W2909760123","https://openalex.org/W3185106882","https://openalex.org/W1980275992","https://openalex.org/W2761437135","https://openalex.org/W1980301972","https://openalex.org/W2025338515"],"abstract_inverted_index":{"Stacked":[0],"HfO":[1,48],"<sub":[2,49],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[3,50],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">x</sub>":[4,51],"based":[5,52],"vertical":[6,53,71,90],"RRAM":[7,54,72,91],"with":[8,63],"interface":[9],"engineering":[10],"for":[11],"3D":[12],"cross-point":[13],"architecture":[14],"is":[15],"fabricated":[16,47],"using":[17],"a":[18,64],"cost-effective":[19],"fabrication":[20],"process.":[21],"The":[22,56,75],"excellent":[23],"performances":[24],"such":[25],"as":[26],"low":[27],"reset":[28],"current,":[29],"fast":[30],"switching":[31,34],"speed,":[32],"high":[33],"endurance":[35],"and":[36,41,59,83,98],"disturbance":[37],"immunity,":[38],"good":[39],"retention":[40],"self-selectivity":[42],"are":[43,73],"demonstrated":[44],"in":[45],"the":[46,60,69,79,84,89],"devices.":[55],"scaling":[57],"limit":[58],"functionality":[61],"along":[62],"viable":[65],"write/read":[66],"scheme":[67],"of":[68,88],"presented":[70],"investigated.":[74],"experiments":[76],"show":[77],"that":[78],"pillar":[80],"electrode":[81,86],"thickness":[82,87],"plane":[85],"can":[92],"be":[93],"scaled":[94],"down":[95],"to":[96],"3nm":[97],"5nm":[99],"without":[100],"significant":[101],"performance":[102],"degradation,":[103],"respectively.":[104]},"counts_by_year":[{"year":2017,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}