{"id":"https://openalex.org/W2088157401","doi":"https://doi.org/10.1109/iscas.2012.6272026","title":"Accurate modeling of low actuation voltage RFMEMS switches using artificial neural networks","display_name":"Accurate modeling of low actuation voltage RFMEMS switches using artificial neural networks","publication_year":2012,"publication_date":"2012-05-01","ids":{"openalex":"https://openalex.org/W2088157401","doi":"https://doi.org/10.1109/iscas.2012.6272026","mag":"2088157401"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2012.6272026","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2012.6272026","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Symposium on Circuits and Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026534056","display_name":"Amin Pak","orcid":"https://orcid.org/0000-0002-0449-4007"},"institutions":[{"id":"https://openalex.org/I3132928613","display_name":"Sadjad University of Technology","ror":"https://ror.org/04b9hej41","country_code":"IR","type":"education","lineage":["https://openalex.org/I3132928613"]}],"countries":["IR"],"is_corresponding":false,"raw_author_name":"Amin Pak","raw_affiliation_strings":["Sadjad Institute of Higher Educations, Mashhad, Iran","Sadjad Institute for Higher Education, Mashhad, Iran"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sadjad Institute of Higher Educations, Mashhad, Iran","institution_ids":["https://openalex.org/I3132928613"]},{"raw_affiliation_string":"Sadjad Institute for Higher Education, Mashhad, Iran","institution_ids":["https://openalex.org/I3132928613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055091240","display_name":"Yasser Mafinejad","orcid":null},"institutions":[{"id":"https://openalex.org/I149704539","display_name":"Deakin University","ror":"https://ror.org/02czsnj07","country_code":"AU","type":"education","lineage":["https://openalex.org/I149704539"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Yasser Mafinejad","raw_affiliation_strings":["School of Engineering, Deakin University, Waurn Ponds, VIC, Australia","School of Engineering, Deakin University, Waurn Ponds, Victoria 3216, Australia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Engineering, Deakin University, Waurn Ponds, VIC, Australia","institution_ids":["https://openalex.org/I149704539"]},{"raw_affiliation_string":"School of Engineering, Deakin University, Waurn Ponds, Victoria 3216, Australia","institution_ids":["https://openalex.org/I149704539"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088007702","display_name":"Abbas Z. Kouzani","orcid":"https://orcid.org/0000-0002-6292-1214"},"institutions":[{"id":"https://openalex.org/I149704539","display_name":"Deakin University","ror":"https://ror.org/02czsnj07","country_code":"AU","type":"education","lineage":["https://openalex.org/I149704539"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Abbas Kouzani","raw_affiliation_strings":["School of Engineering, Deakin University, Waurn Ponds, VIC, Australia","School of Engineering, Deakin University, Waurn Ponds, Victoria 3216, Australia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Engineering, Deakin University, Waurn Ponds, VIC, Australia","institution_ids":["https://openalex.org/I149704539"]},{"raw_affiliation_string":"School of Engineering, Deakin University, Waurn Ponds, Victoria 3216, Australia","institution_ids":["https://openalex.org/I149704539"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017531099","display_name":"Hooman Nabovati","orcid":null},"institutions":[{"id":"https://openalex.org/I3132928613","display_name":"Sadjad University of Technology","ror":"https://ror.org/04b9hej41","country_code":"IR","type":"education","lineage":["https://openalex.org/I3132928613"]}],"countries":["IR"],"is_corresponding":false,"raw_author_name":"Hooman Nabovati","raw_affiliation_strings":["Sadjad Institute of Higher Educations, Mashhad, Iran","Sadjad Institute for Higher Education, Mashhad, Iran"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sadjad Institute of Higher Educations, Mashhad, Iran","institution_ids":["https://openalex.org/I3132928613"]},{"raw_affiliation_string":"Sadjad Institute for Higher Education, Mashhad, Iran","institution_ids":["https://openalex.org/I3132928613"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5005288344","display_name":"Khalil Mafinezhad","orcid":"https://orcid.org/0000-0001-5690-1498"},"institutions":[{"id":"https://openalex.org/I3132928613","display_name":"Sadjad University of Technology","ror":"https://ror.org/04b9hej41","country_code":"IR","type":"education","lineage":["https://openalex.org/I3132928613"]},{"id":"https://openalex.org/I86958956","display_name":"Ferdowsi University of Mashhad","ror":"https://ror.org/00g6ka752","country_code":"IR","type":"education","lineage":["https://openalex.org/I86958956"]}],"countries":["IR"],"is_corresponding":false,"raw_author_name":"Khalil Mafinezhad","raw_affiliation_strings":["Department of Electrical Engineering, Ferdowsi University of Mashhad, Iran","Sadjad Institute for Higher Education, Mashhad, Iran"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Ferdowsi University of Mashhad, Iran","institution_ids":["https://openalex.org/I86958956"]},{"raw_affiliation_string":"Sadjad Institute for Higher Education, Mashhad, Iran","institution_ids":["https://openalex.org/I3132928613"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.14155928,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"2","issue":null,"first_page":"3282","last_page":"3284"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.7960798740386963},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6818951964378357},{"id":"https://openalex.org/keywords/parametric-statistics","display_name":"Parametric statistics","score":0.6333544254302979},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.593525767326355},{"id":"https://openalex.org/keywords/component","display_name":"Component (thermodynamics)","score":0.5289340615272522},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5054042339324951},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5039145350456238},{"id":"https://openalex.org/keywords/scattering-parameters","display_name":"Scattering parameters","score":0.5000731945037842},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.49196192622184753},{"id":"https://openalex.org/keywords/isolation","display_name":"Isolation (microbiology)","score":0.4850877821445465},{"id":"https://openalex.org/keywords/parametric-model","display_name":"Parametric model","score":0.45736274123191833},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3256995975971222},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26087427139282227},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17960867285728455},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.157742440700531},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11508569121360779},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.10302209854125977},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.07323658466339111},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.06592953205108643}],"concepts":[{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.7960798740386963},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6818951964378357},{"id":"https://openalex.org/C117251300","wikidata":"https://www.wikidata.org/wiki/Q1849855","display_name":"Parametric statistics","level":2,"score":0.6333544254302979},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.593525767326355},{"id":"https://openalex.org/C168167062","wikidata":"https://www.wikidata.org/wiki/Q1117970","display_name":"Component (thermodynamics)","level":2,"score":0.5289340615272522},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5054042339324951},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5039145350456238},{"id":"https://openalex.org/C195266298","wikidata":"https://www.wikidata.org/wiki/Q2165620","display_name":"Scattering parameters","level":2,"score":0.5000731945037842},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.49196192622184753},{"id":"https://openalex.org/C2775941552","wikidata":"https://www.wikidata.org/wiki/Q25212305","display_name":"Isolation (microbiology)","level":2,"score":0.4850877821445465},{"id":"https://openalex.org/C24574437","wikidata":"https://www.wikidata.org/wiki/Q7135228","display_name":"Parametric model","level":3,"score":0.45736274123191833},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3256995975971222},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26087427139282227},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17960867285728455},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.157742440700531},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11508569121360779},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10302209854125977},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07323658466339111},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.06592953205108643},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C89423630","wikidata":"https://www.wikidata.org/wiki/Q7193","display_name":"Microbiology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iscas.2012.6272026","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2012.6272026","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE International Symposium on Circuits and Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:dro.deakin.edu.au:DU:30049584","is_oa":false,"landing_page_url":null,"pdf_url":null,"source":{"id":"https://openalex.org/S4306402457","display_name":"Deakin Research Online (Deakin University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I149704539","host_organization_name":"Deakin University","host_organization_lineage":["https://openalex.org/I149704539"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.6000000238418579,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1988105939","https://openalex.org/W2010750150","https://openalex.org/W2079988655","https://openalex.org/W2082598623","https://openalex.org/W2089041298","https://openalex.org/W2096246282","https://openalex.org/W2097162545","https://openalex.org/W2131624315","https://openalex.org/W2144188877","https://openalex.org/W2163570319","https://openalex.org/W3215748244","https://openalex.org/W4230282064","https://openalex.org/W6674509643","https://openalex.org/W6674787887"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W3147236441","https://openalex.org/W2768516885","https://openalex.org/W2124185854","https://openalex.org/W1488731879","https://openalex.org/W2054400618"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,14],"fast":[4],"and":[5,48,86],"accurate":[6],"method":[7],"for":[8,28],"extracting":[9],"the":[10,32,38,61,70,82],"scattering":[11],"parameters":[12,36],"of":[13,31,37,44,52,73],"RF":[15,71],"MEMS":[16],"switch":[17,39],"by":[18],"using":[19],"its":[20,45,53],"essential":[21,35],"parameters.":[22],"A":[23],"neural":[24,83],"network":[25,84],"is":[26],"developed":[27],"parametric":[29],"modeling":[30],"switch.":[33],"The":[34,76],"are":[40],"analyzed":[41],"in":[42],"terms":[43],"return":[46],"loss":[47],"isolation":[49],"with":[50],"variation":[51],"geometrical":[54],"component":[55],"values.":[56],"Simulation":[57],"results":[58,77],"show":[59,78],"that":[60],"proposed":[62],"approach":[63],"can":[64],"be":[65],"used":[66],"to":[67],"accurately":[68],"model":[69],"characteristics":[72],"RF-MEMS":[74],"switches.":[75],"good":[79],"agreement":[80],"between":[81],"prediction":[85],"electromagnetic":[87],"simulations.":[88]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}
