{"id":"https://openalex.org/W1570278190","doi":"https://doi.org/10.1109/iscas.2006.1693077","title":"Implementation and analysis of microwave switch in CMOS-MEMS technology","display_name":"Implementation and analysis of microwave switch in CMOS-MEMS technology","publication_year":2006,"publication_date":"2006-09-22","ids":{"openalex":"https://openalex.org/W1570278190","doi":"https://doi.org/10.1109/iscas.2006.1693077","mag":"1570278190"},"language":"en","primary_location":{"id":"doi:10.1109/iscas.2006.1693077","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2006.1693077","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 IEEE International Symposium on Circuits and Systems","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103421342","display_name":"Heng-Ming Hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Heng-Ming Hsu","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan","[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103541662","display_name":"Ming-Ming Hsieh","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Ming Hsieh","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007136538","display_name":"Ming\u2010Chang Tsai","orcid":"https://orcid.org/0000-0002-3338-3306"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Chang Tsai","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046280897","display_name":"Hsuan-Jung Peng","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hsuan-Jung Peng","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan","[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"[Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung]","institution_ids":["https://openalex.org/I162838928"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5103421342"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.042874,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"4","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microwave","display_name":"Microwave","score":0.747448742389679},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7467572093009949},{"id":"https://openalex.org/keywords/coplanar-waveguide","display_name":"Coplanar waveguide","score":0.6674328446388245},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"Insertion loss","score":0.6623188257217407},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.626052737236023},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6099514961242676},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5823463201522827},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5685566663742065},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.5495575070381165},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5011448860168457},{"id":"https://openalex.org/keywords/monolithic-microwave-integrated-circuit","display_name":"Monolithic microwave integrated circuit","score":0.4825979471206665},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4810669422149658},{"id":"https://openalex.org/keywords/electric-power-transmission","display_name":"Electric power transmission","score":0.4741251468658447},{"id":"https://openalex.org/keywords/microwave-transmission","display_name":"Microwave transmission","score":0.4294501841068268},{"id":"https://openalex.org/keywords/crossover-switch","display_name":"Crossover switch","score":0.4162899851799011},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.39753201603889465},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2853478491306305},{"id":"https://openalex.org/keywords/optical-switch","display_name":"Optical switch","score":0.27100956439971924},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.14996060729026794},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.11129873991012573},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.10693615674972534}],"concepts":[{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.747448742389679},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7467572093009949},{"id":"https://openalex.org/C3736036","wikidata":"https://www.wikidata.org/wiki/Q15525941","display_name":"Coplanar waveguide","level":3,"score":0.6674328446388245},{"id":"https://openalex.org/C90327742","wikidata":"https://www.wikidata.org/wiki/Q947396","display_name":"Insertion loss","level":2,"score":0.6623188257217407},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.626052737236023},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6099514961242676},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5823463201522827},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5685566663742065},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5495575070381165},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5011448860168457},{"id":"https://openalex.org/C128450285","wikidata":"https://www.wikidata.org/wiki/Q1945036","display_name":"Monolithic microwave integrated circuit","level":4,"score":0.4825979471206665},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4810669422149658},{"id":"https://openalex.org/C140311924","wikidata":"https://www.wikidata.org/wiki/Q200928","display_name":"Electric power transmission","level":2,"score":0.4741251468658447},{"id":"https://openalex.org/C1705053","wikidata":"https://www.wikidata.org/wiki/Q747066","display_name":"Microwave transmission","level":3,"score":0.4294501841068268},{"id":"https://openalex.org/C12334850","wikidata":"https://www.wikidata.org/wiki/Q1535092","display_name":"Crossover switch","level":3,"score":0.4162899851799011},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.39753201603889465},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2853478491306305},{"id":"https://openalex.org/C101336846","wikidata":"https://www.wikidata.org/wiki/Q17105111","display_name":"Optical switch","level":2,"score":0.27100956439971924},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.14996060729026794},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.11129873991012573},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.10693615674972534},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iscas.2006.1693077","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iscas.2006.1693077","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2006 IEEE International Symposium on Circuits and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.800000011920929}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2015648930","https://openalex.org/W2035762497","https://openalex.org/W2088622390","https://openalex.org/W2094485065","https://openalex.org/W2161131827"],"related_works":["https://openalex.org/W2162952317","https://openalex.org/W2155843453","https://openalex.org/W2982018365","https://openalex.org/W1974857373","https://openalex.org/W1978780366","https://openalex.org/W2364558811","https://openalex.org/W588769617","https://openalex.org/W2188082136","https://openalex.org/W1488549205","https://openalex.org/W2128159194"],"abstract_inverted_index":{"The":[0,28,60],"fabrication":[1],"of":[2,30,53,66,74,96],"a":[3,40],"micro-machined":[4],"microwave":[5,32],"switch":[6,33,55,61],"using":[7],"the":[8,15,31,50,54,94],"standard":[9],"0.35/spl":[10],"mu/m":[11],"CMOS":[12],"process":[13],"and":[14,43,71],"post-process":[16],"by":[17],"wet":[18],"etching":[19],"without":[20],"extra":[21],"mask":[22],"is":[23,90],"implemented":[24],"in":[25],"this":[26,97],"work.":[27],"components":[29],"are":[34],"coplanar":[35],"waveguide":[36],"(CPW)":[37],"transmission":[38],"lines,":[39],"suspended":[41],"membrane":[42],"supported":[44],"springs.":[45],"Experimental":[46],"results":[47],"show":[48],"that":[49],"driving":[51],"voltage":[52],"approximates":[56],"to":[57,92],"17":[58],"V.":[59],"has":[62],"an":[63,72,87],"insertion":[64],"loss":[65],"-1.5":[67],"/spl":[68,76,82],"sim/":[69,77,83],"-2.5dB":[70],"isolation":[73],"-5":[75],"-15":[78],"dB":[79],"between":[80],"30":[81],"50":[84],"GHz.":[85],"Moreover,":[86],"equivalent":[88],"circuit":[89],"proposed":[91],"analyse":[93],"performance":[95],"switch.":[98]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}