{"id":"https://openalex.org/W4396949338","doi":"https://doi.org/10.1109/irps48228.2024.10529470","title":"Charge Loss Improvement in 3D Flash Memory by Molecular Oxidation of Tunneling Oxide","display_name":"Charge Loss Improvement in 3D Flash Memory by Molecular Oxidation of Tunneling Oxide","publication_year":2024,"publication_date":"2024-04-14","ids":{"openalex":"https://openalex.org/W4396949338","doi":"https://doi.org/10.1109/irps48228.2024.10529470"},"language":"en","primary_location":{"id":"doi:10.1109/irps48228.2024.10529470","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/irps48228.2024.10529470","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044028850","display_name":"Pei\u2010Ci Jhang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Pei-Ci Jhang","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016827513","display_name":"Chi-Pin Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chi-Pin Lu","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113209392","display_name":"Jung-Yu Shieh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jung-Yu Shieh","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111729663","display_name":"Ling-Wu Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ling-Wu Yang","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053411887","display_name":"Tahone Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Tahone Yang","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082109806","display_name":"Kuang\u2010Chao Chen","orcid":"https://orcid.org/0000-0002-7715-808X"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuang-Chao Chen","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024808324","display_name":"Chih-Yuan Lu","orcid":"https://orcid.org/0000-0002-8951-2509"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chih-Yuan Lu","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089084441","display_name":"Hang-Ting Lue","orcid":"https://orcid.org/0000-0003-1078-1333"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hang-Ting Lue","raw_affiliation_strings":["Macronix International Co., Ltd.,Macronix Emerging Central Lab.,Hsinchu,Taiwan","Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd.,Macronix Emerging Central Lab.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067604384","display_name":"Pei-Ying Du","orcid":"https://orcid.org/0000-0002-3554-1822"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Pei-Ying Du","raw_affiliation_strings":["Macronix International Co., Ltd.,Macronix Emerging Central Lab.,Hsinchu,Taiwan","Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd.,Macronix Emerging Central Lab.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024808324","display_name":"Chih-Yuan Lu","orcid":"https://orcid.org/0000-0002-8951-2509"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chih-Yuan Lu","raw_affiliation_strings":["Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan","Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd.,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Macronix Emerging Central Lab., Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Technology Development Center, Macronix International Co., Ltd., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5044028850"],"corresponding_institution_ids":["https://openalex.org/I4210092191"],"apc_list":null,"apc_paid":null,"fwci":0.4419,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.60569442,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"P24.MR","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10030","display_name":"Electrocatalysts for Energy Conversion","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/2105","display_name":"Renewable Energy, Sustainability and the Environment"},"field":{"id":"https://openalex.org/fields/21","display_name":"Energy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6246705651283264},{"id":"https://openalex.org/keywords/flash-memory","display_name":"Flash memory","score":0.6092401742935181},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.5301322340965271},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5150272846221924},{"id":"https://openalex.org/keywords/quantum-tunnelling","display_name":"Quantum tunnelling","score":0.47317245602607727},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.35707980394363403},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.30396339297294617},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.09646406769752502}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6246705651283264},{"id":"https://openalex.org/C2776531357","wikidata":"https://www.wikidata.org/wiki/Q174077","display_name":"Flash memory","level":2,"score":0.6092401742935181},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5301322340965271},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5150272846221924},{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.47317245602607727},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.35707980394363403},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.30396339297294617},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.09646406769752502},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48228.2024.10529470","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/irps48228.2024.10529470","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.5600000023841858}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1983354461","https://openalex.org/W2044357261","https://openalex.org/W2109856880","https://openalex.org/W2951568057","https://openalex.org/W3136678171","https://openalex.org/W4226453160","https://openalex.org/W6810171911"],"related_works":["https://openalex.org/W2012959172","https://openalex.org/W1995707634","https://openalex.org/W2740243652","https://openalex.org/W2025480516","https://openalex.org/W3182877397","https://openalex.org/W2068525508","https://openalex.org/W3089234692","https://openalex.org/W1987656551","https://openalex.org/W2142294076","https://openalex.org/W2060114328"],"abstract_inverted_index":{"Bandgap":[0],"Engineered":[1],"(BE)":[2],"tunnel":[3],"barriers":[4],"utilizing":[5],"oxynitride":[6],"(SiON)":[7],"play":[8],"a":[9,89],"crucial":[10],"role":[11],"in":[12,20,60,88,122,159,163,169,175],"the":[13,43,46,82,97,111,141],"development":[14],"of":[15],"charge":[16],"trapping":[17],"devices":[18],"used":[19],"commercial":[21],"3D":[22,127],"flash":[23],"memories.":[24],"Theoretical":[25],"analysis":[26],"indicates":[27],"that":[28],"SiON":[29,56,112],"provides":[30],"an":[31,106],"adequate":[32],"valence":[33],"band":[34,48],"offset":[35,49],"(VBO)":[36],"to":[37,52,66,80,93,115,140,153],"offer":[38],"efficient":[39],"hole":[40],"tunneling":[41],"for":[42,144],"erasing,":[44],"while":[45],"conduction":[47],"keep":[50],"sufficient":[51],"maintain":[53],"electron":[54],"retention.":[55],"is":[57],"quite":[58],"flexible":[59],"adjusting":[61],"its":[62,116],"nitrogen":[63],"content,":[64],"contributing":[65],"various":[67],"endurance":[68],"and":[69,134,150,157],"retention":[70,177],"properties.":[71],"In":[72,100],"this":[73],"work,":[74],"we":[75],"explore":[76],"two":[77],"oxidation":[78,86,95,136,152],"methods":[79],"optimize":[81],"BE":[83],"SiON.":[84,99],"Molecular-mode":[85],"operates":[87],"diffusion-based":[90],"manner,":[91],"leading":[92],"deeper":[94],"throughout":[96],"entire":[98],"contrast,":[101],"radical-mode":[102],"oxidation,":[103],"classified":[104],"as":[105],"exchange-mode":[107],"process,":[108],"primarily":[109],"targets":[110],"surface":[113],"due":[114],"exceptionally":[117],"low":[118],"activation":[119],"energy,":[120],"resulting":[121],"rapid":[123],"oxidation.":[124],"Using":[125],"our":[126],"AND-type":[128],"NOR":[129],"Flash":[130],"memory,":[131],"both":[132],"molecular":[133,149],"radical":[135,151],"techniques":[137],"were":[138],"applied":[139],"BE-MANOS":[142],"device":[143],"chip-level":[145],"reliability":[146],"study.":[147],"Both":[148],"change":[154],"hydrogen":[155],"distribution":[156],"content":[158],"SiON,":[160,170],"which":[161],"results":[162],"reduced":[164],"interface":[165],"state":[166],"trap":[167],"generations":[168],"shows":[171],"obvious":[172],"improvements":[173],"(15-25%)":[174],"post-cycled":[176],"performances.":[178]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-03-05T09:29:38.588285","created_date":"2025-10-10T00:00:00"}