{"id":"https://openalex.org/W4396980756","doi":"https://doi.org/10.1109/irps48228.2024.10529365","title":"A Systematic Study of HCI Improvement in FinFET with Source/Drain Implant and Geometry Modulation","display_name":"A Systematic Study of HCI Improvement in FinFET with Source/Drain Implant and Geometry Modulation","publication_year":2024,"publication_date":"2024-04-14","ids":{"openalex":"https://openalex.org/W4396980756","doi":"https://doi.org/10.1109/irps48228.2024.10529365"},"language":"en","primary_location":{"id":"doi:10.1109/irps48228.2024.10529365","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/irps48228.2024.10529365","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051916326","display_name":"Rakesh Ranjan","orcid":"https://orcid.org/0000-0003-0022-0516"},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Rakesh Ranjan","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047872215","display_name":"Pavitra Ramadevi Perepa","orcid":null},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Pavitra R. Perepa","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089451409","display_name":"Ki\u2010Don Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ki-Don Lee","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074348289","display_name":"Ashish Kumar Jha","orcid":"https://orcid.org/0000-0002-5450-9983"},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ashish K. Jha","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034922820","display_name":"Kartika Chandra Sahoo","orcid":null},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kartika C. Sahoo","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109717175","display_name":"Kayla N. Sanders","orcid":null},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kayla N. Sanders","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111562469","display_name":"Robert E. Moeller","orcid":null},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Robert Moeller","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100718225","display_name":"Prateek Sharma","orcid":"https://orcid.org/0000-0003-1172-0487"},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Prateek Sharma","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110696515","display_name":"Minhyo Kang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Minhyo Kang","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100672880","display_name":"Peter Kim","orcid":"https://orcid.org/0000-0002-3968-2024"},"institutions":[{"id":"https://openalex.org/I4210101778","display_name":"Samsung (United States)","ror":"https://ror.org/01bfbvm65","country_code":"US","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4210101778"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Peter Kim","raw_affiliation_strings":["Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754"],"affiliations":[{"raw_affiliation_string":"Samsung Austin Semiconductor, LLC,Austin,TX,USA,78754","institution_ids":["https://openalex.org/I4210101778"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113210285","display_name":"Kwan-Jae Song","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Kwanjae Song","raw_affiliation_strings":["Samsung Electronics,Innovation Center,Hwaseong-si,Gyeonggi-do,Republic of Korea,18448"],"affiliations":[{"raw_affiliation_string":"Samsung Electronics,Innovation Center,Hwaseong-si,Gyeonggi-do,Republic of Korea,18448","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108468240","display_name":"Yongwoo Jeon","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yongwoo Jeon","raw_affiliation_strings":["Samsung Electronics,Innovation Center,Hwaseong-si,Gyeonggi-do,Republic of Korea,18448"],"affiliations":[{"raw_affiliation_string":"Samsung Electronics,Innovation Center,Hwaseong-si,Gyeonggi-do,Republic of Korea,18448","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078026315","display_name":"Seung\u2010Ho Kim","orcid":"https://orcid.org/0000-0001-9164-444X"},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seungho Kim","raw_affiliation_strings":["Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113"],"affiliations":[{"raw_affiliation_string":"Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043564438","display_name":"Hyewon Shim","orcid":"https://orcid.org/0000-0003-2132-4701"},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyewon Shim","raw_affiliation_strings":["Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113"],"affiliations":[{"raw_affiliation_string":"Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5104301515","display_name":"Shinyoung Chung","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Shinyoung Chung","raw_affiliation_strings":["Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113"],"affiliations":[{"raw_affiliation_string":"Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5005459170","display_name":"J K Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Ju Kwang Kim","raw_affiliation_strings":["Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113"],"affiliations":[{"raw_affiliation_string":"Samsung Electronics,Foundry Business,Yongin-si,Gyeonggi-do,Republic of Korea,17113","institution_ids":["https://openalex.org/I2250650973"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":16,"corresponding_author_ids":["https://openalex.org/A5051916326"],"corresponding_institution_ids":["https://openalex.org/I4210101778"],"apc_list":null,"apc_paid":null,"fwci":0.4449,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.60591364,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"5A.1","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/modulation","display_name":"Modulation (music)","score":0.6480187773704529},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5206769704818726},{"id":"https://openalex.org/keywords/implant","display_name":"Implant","score":0.5048597455024719},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4370427131652832},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.3308418393135071},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.32278236746788025},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26568132638931274},{"id":"https://openalex.org/keywords/medicine","display_name":"Medicine","score":0.17849072813987732},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.13332578539848328},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.1051989495754242}],"concepts":[{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.6480187773704529},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5206769704818726},{"id":"https://openalex.org/C2781411149","wikidata":"https://www.wikidata.org/wiki/Q486975","display_name":"Implant","level":2,"score":0.5048597455024719},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4370427131652832},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.3308418393135071},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.32278236746788025},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26568132638931274},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.17849072813987732},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.13332578539848328},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.1051989495754242},{"id":"https://openalex.org/C141071460","wikidata":"https://www.wikidata.org/wiki/Q40821","display_name":"Surgery","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48228.2024.10529365","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/irps48228.2024.10529365","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1965229716","https://openalex.org/W2292956491","https://openalex.org/W2648040954","https://openalex.org/W2799332691","https://openalex.org/W2945256243","https://openalex.org/W3159713871"],"related_works":["https://openalex.org/W2324615561","https://openalex.org/W2086120259","https://openalex.org/W2245170124","https://openalex.org/W2076393078","https://openalex.org/W3186982001","https://openalex.org/W1984402782","https://openalex.org/W2137941439","https://openalex.org/W2004200960","https://openalex.org/W1999891779","https://openalex.org/W2029513011"],"abstract_inverted_index":{"We":[0,40],"performed":[1],"a":[2],"systematic":[3],"study":[4],"on":[5,27],"hot":[6],"carrier":[7],"injection":[8],"(HCI)":[9],"in":[10,77],"I/O":[11],"FinFETs":[12],"using":[13],"various":[14,92],"source/drain":[15],"(S/D)":[16],"extension":[17],"implantation":[18],"and":[19,57,62,106,110],"geometry":[20],"modulation":[21],"schemes.":[22],"While":[23],"previous":[24],"publications":[25],"focused":[26],"nMOS,":[28],"we":[29,90],"extended":[30],"our":[31],"investigation":[32],"to":[33,71,81,98],"pMOS":[34,111],"with":[35],"more":[36],"process":[37,101],"optimization":[38],"techniques.":[39],"observed":[41],"that":[42,94],"HCI":[43,67,104],"can":[44,95],"be":[45,96],"improved":[46],"by":[47],"higher":[48],"S/D":[49,55],"ext.":[50],"implant":[51],"dose/energy/tilt":[52],"angle,":[53],"smaller":[54],"CD,":[56],"larger":[58,83],"proximity.":[59],"Electrical":[60],"characterization":[61],"3D":[63],"TCAD":[64],"simulation":[65],"confirmed":[66],"improvement":[68],"is":[69],"attributed":[70],"the":[72,78,82,100],"reduced":[73],"lateral":[74],"electric":[75],"field":[76],"drain":[79],"due":[80],"velocity":[84],"saturation":[85],"region.":[86],"In":[87],"this":[88],"paper,":[89],"summarized":[91],"strategies":[93],"used":[97],"optimize":[99],"for":[102],"both":[103],"reliability":[105],"performance":[107],"of":[108],"nMOS":[109],"FinFETs.":[112]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2025-12-21T01:58:51.020947","created_date":"2025-10-10T00:00:00"}