{"id":"https://openalex.org/W4396949761","doi":"https://doi.org/10.1109/irps48228.2024.10529347","title":"SILC and TDDB reliability of novel low thermal budget RMG gate stacks","display_name":"SILC and TDDB reliability of novel low thermal budget RMG gate stacks","publication_year":2024,"publication_date":"2024-04-14","ids":{"openalex":"https://openalex.org/W4396949761","doi":"https://doi.org/10.1109/irps48228.2024.10529347"},"language":"en","primary_location":{"id":"doi:10.1109/irps48228.2024.10529347","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48228.2024.10529347","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009544942","display_name":"Andrea Vici","orcid":"https://orcid.org/0000-0002-3614-9590"},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"Andrea Vici","raw_affiliation_strings":["KU Leuven,Leuven,Belgium,3001","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"KU Leuven,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061087611","display_name":"R. Degraeve","orcid":"https://orcid.org/0000-0002-4609-5573"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Robin Degraeve","raw_affiliation_strings":["imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065113949","display_name":"Naoto Horiguchi","orcid":"https://orcid.org/0000-0001-5490-0416"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Naoto Horiguchi","raw_affiliation_strings":["imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073310038","display_name":"Ingrid De Wolf","orcid":"https://orcid.org/0000-0003-3822-5953"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Ingrid De Wolf","raw_affiliation_strings":["KU Leuven,Leuven,Belgium,3001","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"KU Leuven,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5068577719","display_name":"J. Franco","orcid":"https://orcid.org/0000-0002-7382-8605"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Jacopo Franco","raw_affiliation_strings":["imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5009544942"],"corresponding_institution_ids":["https://openalex.org/I4210114974","https://openalex.org/I99464096"],"apc_list":null,"apc_paid":null,"fwci":0.8898,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.73040939,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.9965000152587891,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/time-dependent-gate-oxide-breakdown","display_name":"Time-dependent gate oxide breakdown","score":0.9246038198471069},{"id":"https://openalex.org/keywords/pmos-logic","display_name":"PMOS logic","score":0.854844868183136},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.67423415184021},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6629852652549744},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.6257948279380798},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5358964204788208},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.499614953994751},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.49166589975357056},{"id":"https://openalex.org/keywords/metal-gate","display_name":"Metal gate","score":0.4894322454929352},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.44438180327415466},{"id":"https://openalex.org/keywords/mosfet","display_name":"MOSFET","score":0.4272615909576416},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.4140390455722809},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.36578649282455444},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.36342447996139526},{"id":"https://openalex.org/keywords/gate-oxide","display_name":"Gate oxide","score":0.22460591793060303},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.21941083669662476},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2164822220802307},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.19450941681861877},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.09754058718681335}],"concepts":[{"id":"https://openalex.org/C152909973","wikidata":"https://www.wikidata.org/wiki/Q7804816","display_name":"Time-dependent gate oxide breakdown","level":5,"score":0.9246038198471069},{"id":"https://openalex.org/C27050352","wikidata":"https://www.wikidata.org/wiki/Q173605","display_name":"PMOS logic","level":4,"score":0.854844868183136},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.67423415184021},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6629852652549744},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.6257948279380798},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5358964204788208},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.499614953994751},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.49166589975357056},{"id":"https://openalex.org/C51140833","wikidata":"https://www.wikidata.org/wiki/Q6822740","display_name":"Metal gate","level":5,"score":0.4894322454929352},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.44438180327415466},{"id":"https://openalex.org/C2778413303","wikidata":"https://www.wikidata.org/wiki/Q210793","display_name":"MOSFET","level":4,"score":0.4272615909576416},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.4140390455722809},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.36578649282455444},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.36342447996139526},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.22460591793060303},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.21941083669662476},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2164822220802307},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.19450941681861877},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.09754058718681335},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48228.2024.10529347","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48228.2024.10529347","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W1604552185","https://openalex.org/W1965229716","https://openalex.org/W1993097938","https://openalex.org/W2034060240","https://openalex.org/W2040728495","https://openalex.org/W2070588354","https://openalex.org/W2100358209","https://openalex.org/W2113488650","https://openalex.org/W2121381650","https://openalex.org/W2146704626","https://openalex.org/W2153468435","https://openalex.org/W2801156076","https://openalex.org/W2802502993","https://openalex.org/W3157701678","https://openalex.org/W3169681048","https://openalex.org/W3174196084","https://openalex.org/W4210361678","https://openalex.org/W4226354697","https://openalex.org/W4376606575","https://openalex.org/W4385192424","https://openalex.org/W4387011135","https://openalex.org/W6800993894"],"related_works":["https://openalex.org/W2621684361","https://openalex.org/W1593219341","https://openalex.org/W1742453416","https://openalex.org/W1502432612","https://openalex.org/W2172826417","https://openalex.org/W2338714185","https://openalex.org/W1970052784","https://openalex.org/W2112344289","https://openalex.org/W2146589912","https://openalex.org/W2259690014"],"abstract_inverted_index":{"The":[0],"fabrication":[1],"of":[2,31,41,101],"gate":[3,34,49,78],"stacks":[4,50],"with":[5,51,64],"a":[6,65,72,108],"low-thermal":[7,33],"budget":[8,48,76,114],"is":[9],"crucial":[10],"for":[11,111],"enabling":[12],"upcoming":[13],"CMOS":[14,115],"technology":[15],"innovations":[16],"such":[17],"as":[18],"sequential":[19],"3D":[20],"integration":[21],"and":[22,39,105],"CFETs.":[23],"In":[24],"this":[25],"study,":[26],"we":[27],"explore":[28],"the":[29,59,84,94,98,102],"impact":[30],"different":[32],"stack":[35],"treatments":[36],"on":[37],"SILC":[38],"TDDB":[40,92,99,109],"HKMG":[42],"stacks.":[43],"We":[44,80],"compare":[45],"low":[46,112],"thermal":[47,75,113],"hydrogen":[52],"radical":[53],"treatments,":[54],"recently":[55],"introduced":[56],"to":[57],"improve":[58],"pMOS":[60],"NBTI":[61],"reliability,":[62],"or":[63],"post-deposition":[66],"anneal":[67],"at":[68,117],"reduced":[69],"temperature":[70],"against":[71],"standard":[73],"high":[74],"reference":[77],"stack.":[79],"show":[81],"that,":[82],"while":[83],"former":[85],"ones":[86],"yield":[87],"only":[88],"minor":[89],"improvement":[90],"in":[91],"lifetime,":[93],"latter":[95],"treatment":[96],"matches":[97],"reliability":[100],"high-temperature":[103],"reference,":[104],"thus":[106],"provides":[107],"solution":[110],"RMG":[116],"competitive":[118],"EOTs.":[119]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}