{"id":"https://openalex.org/W4225322522","doi":"https://doi.org/10.1109/irps48227.2022.9764470","title":"Simulation Comparison of Hot-Carrier Degradation in Nanowire, Nanosheet and Forksheet FETs","display_name":"Simulation Comparison of Hot-Carrier Degradation in Nanowire, Nanosheet and Forksheet FETs","publication_year":2022,"publication_date":"2022-03-01","ids":{"openalex":"https://openalex.org/W4225322522","doi":"https://doi.org/10.1109/irps48227.2022.9764470"},"language":"en","primary_location":{"id":"doi:10.1109/irps48227.2022.9764470","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48227.2022.9764470","pdf_url":null,"source":{"id":"https://openalex.org/S4363605693","display_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://lirias.kuleuven.be/handle/20.500.12942/717984","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025571890","display_name":"Michiel Vandemaele","orcid":"https://orcid.org/0000-0003-0740-4115"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Michiel Vandemaele","raw_affiliation_strings":["KU Leuven,ESAT,Leuven,Belgium","Imec, Leuven, Belgium","ESAT, KU Leuven, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven,ESAT,Leuven,Belgium","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"ESAT, KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058263075","display_name":"B. Kaczer","orcid":"https://orcid.org/0000-0002-1484-4007"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Ben Kaczer","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028115879","display_name":"Stanislav Tyaginov","orcid":"https://orcid.org/0000-0002-5348-2096"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I95568926","display_name":"Ioffe Institute","ror":"https://ror.org/05dkdaa55","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I95568926"]}],"countries":["BE","RU"],"is_corresponding":false,"raw_author_name":"Stanislav Tyaginov","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium","A.F. Ioffe Physical-Technical Institute, Russian Academy of Sciences, Saint-Petersburg, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"A.F. Ioffe Physical-Technical Institute, Russian Academy of Sciences, Saint-Petersburg, Russia","institution_ids":["https://openalex.org/I95568926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020854030","display_name":"E. Bury","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Erik Bury","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069528357","display_name":"Adrian Chasin","orcid":"https://orcid.org/0000-0002-9940-0260"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Adrian Chasin","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068577719","display_name":"J. Franco","orcid":"https://orcid.org/0000-0002-7382-8605"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Jacopo Franco","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102991736","display_name":"Alexander Makarov","orcid":"https://orcid.org/0000-0002-9927-6511"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Alexander Makarov","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028915592","display_name":"Hans Mertens","orcid":"https://orcid.org/0000-0002-3392-6892"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Hans Mertens","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064166800","display_name":"Geert Hellings","orcid":"https://orcid.org/0000-0002-5376-2119"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Geert Hellings","raw_affiliation_strings":["Imec,Leuven,Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020367935","display_name":"G. Groeseneken","orcid":"https://orcid.org/0000-0003-3763-2098"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Guido Groeseneken","raw_affiliation_strings":["KU Leuven,ESAT,Leuven,Belgium","ESAT, KU Leuven, Leuven, Belgium","Imec, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven,ESAT,Leuven,Belgium","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"ESAT, KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]},{"raw_affiliation_string":"Imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":10,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":6.06,"has_fulltext":false,"cited_by_count":21,"citation_normalized_percentile":{"value":0.98025006,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"6A.2","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanosheet","display_name":"Nanosheet","score":0.8303947448730469},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8160538673400879},{"id":"https://openalex.org/keywords/nanowire","display_name":"Nanowire","score":0.8106812834739685},{"id":"https://openalex.org/keywords/degradation","display_name":"Degradation (telecommunications)","score":0.6776571273803711},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.564053475856781},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.55962073802948},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.5362832546234131},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.5048719048500061},{"id":"https://openalex.org/keywords/field-effect-transistor","display_name":"Field-effect transistor","score":0.4426718056201935},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.36135971546173096},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32644379138946533},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2806258201599121},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.180355042219162},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09231513738632202}],"concepts":[{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.8303947448730469},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8160538673400879},{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.8106812834739685},{"id":"https://openalex.org/C2779679103","wikidata":"https://www.wikidata.org/wiki/Q5251805","display_name":"Degradation (telecommunications)","level":2,"score":0.6776571273803711},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.564053475856781},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.55962073802948},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.5362832546234131},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.5048719048500061},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.4426718056201935},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.36135971546173096},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32644379138946533},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2806258201599121},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.180355042219162},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09231513738632202}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/irps48227.2022.9764470","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48227.2022.9764470","pdf_url":null,"source":{"id":"https://openalex.org/S4363605693","display_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},{"id":"pmh:oai:lirias2repo.kuleuven.be:20.500.12942/717984","is_oa":true,"landing_page_url":"https://lirias.kuleuven.be/handle/20.500.12942/717984","pdf_url":null,"source":{"id":"https://openalex.org/S4306401954","display_name":"Lirias (KU Leuven)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I99464096","host_organization_name":"KU Leuven","host_organization_lineage":["https://openalex.org/I99464096"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"IEEE International Reliability Physics Symposium (IRPS), TX, Dallas, 27-31 March 2022","raw_type":"info:eu-repo/semantics/publishedVersion"},{"id":"pmh:oai:lirias2repo.kuleuven.be:20.500.12942/717831","is_oa":true,"landing_page_url":"https://lirias.kuleuven.be/handle/20.500.12942/717831","pdf_url":null,"source":{"id":"https://openalex.org/S4306401954","display_name":"Lirias (KU Leuven)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I99464096","host_organization_name":"KU Leuven","host_organization_lineage":["https://openalex.org/I99464096"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE International Reliability Physics Symposium (IRPS), TX, Dallas, 27-31 March 2022","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":{"id":"pmh:oai:lirias2repo.kuleuven.be:20.500.12942/717984","is_oa":true,"landing_page_url":"https://lirias.kuleuven.be/handle/20.500.12942/717984","pdf_url":null,"source":{"id":"https://openalex.org/S4306401954","display_name":"Lirias (KU Leuven)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I99464096","host_organization_name":"KU Leuven","host_organization_lineage":["https://openalex.org/I99464096"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"IEEE International Reliability Physics Symposium (IRPS), TX, Dallas, 27-31 March 2022","raw_type":"info:eu-repo/semantics/publishedVersion"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320327336","display_name":"Vlaamse regering","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":46,"referenced_works":["https://openalex.org/W1533965610","https://openalex.org/W1546462001","https://openalex.org/W1646002192","https://openalex.org/W1968565334","https://openalex.org/W1974384738","https://openalex.org/W1993299361","https://openalex.org/W1993317329","https://openalex.org/W1998465818","https://openalex.org/W1999169264","https://openalex.org/W2031517912","https://openalex.org/W2036858306","https://openalex.org/W2059157314","https://openalex.org/W2094364583","https://openalex.org/W2096995644","https://openalex.org/W2102352834","https://openalex.org/W2106480230","https://openalex.org/W2216662081","https://openalex.org/W2502683487","https://openalex.org/W2525736734","https://openalex.org/W2526221796","https://openalex.org/W2527326504","https://openalex.org/W2533736080","https://openalex.org/W2597644798","https://openalex.org/W2620788918","https://openalex.org/W2785337062","https://openalex.org/W2785613960","https://openalex.org/W2786998211","https://openalex.org/W2799677856","https://openalex.org/W2801765305","https://openalex.org/W2801985926","https://openalex.org/W2894824026","https://openalex.org/W2947575343","https://openalex.org/W3005541871","https://openalex.org/W3005893159","https://openalex.org/W3032174739","https://openalex.org/W3040682238","https://openalex.org/W3133673851","https://openalex.org/W3169175448","https://openalex.org/W3175294142","https://openalex.org/W3195485212","https://openalex.org/W4225307843","https://openalex.org/W4226086170","https://openalex.org/W6727532389","https://openalex.org/W6735028141","https://openalex.org/W6763430013","https://openalex.org/W6800419449"],"related_works":["https://openalex.org/W3119082211","https://openalex.org/W3091852196","https://openalex.org/W2084951691","https://openalex.org/W4388294765","https://openalex.org/W2142353285","https://openalex.org/W2072424359","https://openalex.org/W2061674058","https://openalex.org/W2750055590","https://openalex.org/W1990516236","https://openalex.org/W2588941787"],"abstract_inverted_index":{"Forksheet":[0],"(FS)":[1],"FETs":[2,54,80],"are":[3],"a":[4,20,90],"novel":[5],"transistor":[6],"architecture":[7,58],"consisting":[8],"of":[9,19,52,102,121,124,136,150],"vertically":[10],"stacked":[11],"nFET":[12,30],"and":[13,55,62,78,144],"pFET":[14],"sheets":[15],"at":[16,157],"opposite":[17],"sides":[18],"dielectric":[21],"wall.":[22,131],"The":[23],"wall":[24,138,151],"allows":[25],"reducing":[26],"the":[27,103,110,122,129,147],"p-":[28],"to":[29,59,69],"separation":[31],"(p-to-n":[32],"separation),":[33],"thus":[34],"enabling":[35],"further":[36],"logic":[37],"cell":[38],"area":[39],"scaling":[40],"without":[41],"requiring":[42],"gate":[43],"length":[44],"scaling.":[45],"We":[46,132],"report":[47],"hot-carrier":[48],"degradation":[49],"(HCD)":[50],"simulations":[51],"FS":[53,79,91,111,130],"compare":[56],"this":[57],"nanowire":[60],"(NW)":[61],"nanosheet":[63],"(NS)":[64],"FETs.":[65],"HCD":[66,108],"is":[67,113],"shown":[68],"decrease":[70],"with":[71],"increasing":[72,141],"sheet":[73,142],"width":[74],"in":[75,128],"both":[76],"NS":[77,99],"when":[81],"taking":[82],"interface":[83],"state":[84],"generation":[85],"into":[86],"account.":[87],"Considering":[88],"that":[89,146],"FET":[92,100,112],"can":[93],"be":[94],"made":[95],"wider":[96],"than":[97],"an":[98,118],"because":[101],"reduced":[104],"p-to-n":[105],"separation,":[106],"lower":[107],"for":[109,140],"observed.":[114],"Finally,":[115],"we":[116],"make":[117],"initial":[119],"assessment":[120],"impact":[123,149],"oxide":[125],"defect":[126],"charging":[127,152],"confirm":[133],"decreasing":[134],"influence":[135],"fixed":[137],"charge":[139],"widths":[143],"estimate":[145],"overall":[148],"will":[153],"stay":[154],"under":[155],"control":[156],"operating":[158],"conditions.":[159]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":4}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}