{"id":"https://openalex.org/W4225317663","doi":"https://doi.org/10.1109/irps48227.2022.9764454","title":"First Experimental Study of Floating-Body Cell Transient Reliability Characteristics of Both N- and P-Channel Vertical Gate-All-Around Devices with Split-Gate Structures","display_name":"First Experimental Study of Floating-Body Cell Transient Reliability Characteristics of Both N- and P-Channel Vertical Gate-All-Around Devices with Split-Gate Structures","publication_year":2022,"publication_date":"2022-03-01","ids":{"openalex":"https://openalex.org/W4225317663","doi":"https://doi.org/10.1109/irps48227.2022.9764454"},"language":"en","primary_location":{"id":"doi:10.1109/irps48227.2022.9764454","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48227.2022.9764454","pdf_url":null,"source":{"id":"https://openalex.org/S4363605693","display_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113947610","display_name":"Cheng-Lin Sung","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Cheng-Lin Sung","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083790449","display_name":"Sheng-Ting Fan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sheng-Ting Fan","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089084441","display_name":"Hang-Ting Lue","orcid":"https://orcid.org/0000-0003-1078-1333"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hang-Ting Lue","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081562363","display_name":"Wei-Chen Chen","orcid":"https://orcid.org/0000-0002-3711-818X"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Chen Chen","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067604384","display_name":"Pei-Ying Du","orcid":"https://orcid.org/0000-0002-3554-1822"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Pei-Ying Du","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109450570","display_name":"Teng-Hao Yeh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Teng-Hao Yeh","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028102750","display_name":"Keh-Chung Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Keh-Chung Wang","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024808324","display_name":"Chih-Yuan Lu","orcid":"https://orcid.org/0000-0002-8951-2509"},"institutions":[{"id":"https://openalex.org/I4210092191","display_name":"Macronix International (Taiwan)","ror":"https://ror.org/01bggjn73","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210092191"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chih-Yuan Lu","raw_affiliation_strings":["Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Macronix International Co., Ltd,Emerging Central Lab,Hsinchu,Taiwan","institution_ids":["https://openalex.org/I4210092191"]},{"raw_affiliation_string":"Emerging Central Lab, Macronix International Co., Ltd, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210092191"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210092191"],"apc_list":null,"apc_paid":null,"fwci":0.6378,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.52972285,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dram","display_name":"Dram","score":0.7557796239852905},{"id":"https://openalex.org/keywords/transient","display_name":"Transient (computer programming)","score":0.6681086421012878},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6152068376541138},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5848374366760254},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.4854617714881897},{"id":"https://openalex.org/keywords/channel","display_name":"Channel (broadcasting)","score":0.4740982949733734},{"id":"https://openalex.org/keywords/capacitive-coupling","display_name":"Capacitive coupling","score":0.44063496589660645},{"id":"https://openalex.org/keywords/flash-memory","display_name":"Flash memory","score":0.43247389793395996},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3789736330509186},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.25358185172080994},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.2188149392604828},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16462990641593933},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.11727297306060791}],"concepts":[{"id":"https://openalex.org/C7366592","wikidata":"https://www.wikidata.org/wiki/Q1255620","display_name":"Dram","level":2,"score":0.7557796239852905},{"id":"https://openalex.org/C2780799671","wikidata":"https://www.wikidata.org/wiki/Q17087362","display_name":"Transient (computer programming)","level":2,"score":0.6681086421012878},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6152068376541138},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5848374366760254},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.4854617714881897},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.4740982949733734},{"id":"https://openalex.org/C68278764","wikidata":"https://www.wikidata.org/wiki/Q444167","display_name":"Capacitive coupling","level":3,"score":0.44063496589660645},{"id":"https://openalex.org/C2776531357","wikidata":"https://www.wikidata.org/wiki/Q174077","display_name":"Flash memory","level":2,"score":0.43247389793395996},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3789736330509186},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25358185172080994},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.2188149392604828},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16462990641593933},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.11727297306060791},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48227.2022.9764454","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48227.2022.9764454","pdf_url":null,"source":{"id":"https://openalex.org/S4363605693","display_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2047970512","https://openalex.org/W2093697544","https://openalex.org/W2117045833","https://openalex.org/W2141449756","https://openalex.org/W3001322753","https://openalex.org/W3006330903","https://openalex.org/W3109818742","https://openalex.org/W3167115291","https://openalex.org/W3172360019"],"related_works":["https://openalex.org/W3120961607","https://openalex.org/W3148568549","https://openalex.org/W2161286015","https://openalex.org/W1648516568","https://openalex.org/W52283896","https://openalex.org/W361036515","https://openalex.org/W4211178602","https://openalex.org/W2269474412","https://openalex.org/W3086699926","https://openalex.org/W2045333541"],"abstract_inverted_index":{"We":[0,32],"present":[1],"results":[2],"of":[3,8,169],"the":[4,21,57,72,76,91,106,132,166,170,179,188,229],"first":[5],"experimental":[6],"study":[7,38],"floating-body":[9,197],"cell":[10],"(FBC)":[11],"transient":[12,50,92,181,244],"characteristics":[13,168],"for":[14,119,131,141,215,219],"both":[15],"n-":[16,120],"and":[17,47,103,117,121,148,175,210,234],"p-channel":[18,122,142],"devices":[19],"using":[20,226],"vertical":[22,171],"split-gate":[23,43,61,172],"gate-all-around":[24],"(GAA)":[25],"structure":[26,62,68],"with":[27],"channel":[28],"diameter":[29,190,233],"around":[30,115],"60nm.":[31],"applied":[33],"pulse":[34],"IV":[35],"measurements":[36],"to":[37,55,69,84,89,138,155,164,203],"our":[39],"previously":[40],"developed":[41],"vertical-channel":[42],"Flash":[44,221],"memory":[45,222],"devices,":[46,124,228],"observed":[48],"clear":[49],"behaviors":[51,74],"which":[52,194],"are":[53,113,213],"verified":[54],"be":[56],"FBC":[58,73,123,145,167,180,205,245],"mechanism.":[59],"The":[60,126,144],"provides":[63],"superior":[64],"merits":[65],"than":[66],"1T":[67],"help":[70],"measuring":[71],"because":[75],"select":[77],"gate":[78],"(SG)":[79],"can":[80,111],"keep":[81],"stationary":[82],"bias":[83,104],"avoid":[85],"capacitive":[86],"coupling":[87],"effect":[88],"deteriorate":[90],"charge":[93],"storage":[94],"beneath":[95],"SG.":[96],"After":[97],"studying":[98],"various":[99],"well":[100,162],"doping":[101],"splits":[102],"dependence,":[105],"maximal":[107],"Vt":[108,146,182],"shifts":[109,147],"we":[110],"obtain":[112],"only":[114,129],"~0.38V":[116],"0.32V":[118],"respectively.":[125],"retention":[127,149],"is":[128,136],"~80\u03bcsec":[130],"n-channel":[133],"device,":[134],"but":[135],"extended":[137],"nearly":[139],"10msec":[140],"devices.":[143],"degrades":[150],"significantly":[151],"at":[152],"high-temperature":[153],"(up":[154],"125\u02daC)":[156],"measurements.":[157],"3D":[158],"TCAD":[159],"model":[160],"was":[161],"established":[163],"explain":[165],"GAA":[173,189,227,232],"structure,":[174],"it":[176],"predicted":[177],"that":[178],"shift":[183],"window":[184],"would":[185,238],"vanish":[186],"when":[187],"reduced":[191],"below":[192],"40nm,":[193],"became":[195],"fully-depleted":[196],"device.":[198],"This":[199],"work":[200],"suggests":[201],"challenges":[202],"pursue":[204],"as":[206],"a":[207],"DRAM":[208],"replacer,":[209],"new":[211],"innovations":[212],"needed":[214],"this":[216],"path.":[217],"Meanwhile,":[218],"ordinary":[220],"or":[223],"LOGIC":[224],"operations":[225,237],"aggressive":[230],"scaled":[231],"suitable":[235],"low-voltage":[236],"not":[239],"suffer":[240],"trouble":[241],"in":[242],"such":[243],"effects.":[246]},"counts_by_year":[{"year":2022,"cited_by_count":2}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}