{"id":"https://openalex.org/W4410394209","doi":"https://doi.org/10.1109/irps48204.2025.10983765","title":"Fast CV MSM Technique for Comprehensive Analysis of Bulk Trapping in Low-K Carbon-Doped Dielectrics","display_name":"Fast CV MSM Technique for Comprehensive Analysis of Bulk Trapping in Low-K Carbon-Doped Dielectrics","publication_year":2025,"publication_date":"2025-03-30","ids":{"openalex":"https://openalex.org/W4410394209","doi":"https://doi.org/10.1109/irps48204.2025.10983765"},"language":"en","primary_location":{"id":"doi:10.1109/irps48204.2025.10983765","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48204.2025.10983765","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056055953","display_name":"T. Mota Frutuoso","orcid":"https://orcid.org/0000-0001-7067-4893"},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"T. Mota Frutuoso","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075656637","display_name":"W. Vandendaele","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"W. Vandendaele","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066751558","display_name":"Alan M. Bond","orcid":"https://orcid.org/0000-0002-1113-5205"},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Bond","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107586848","display_name":"Fabien Bringuier","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Bringuier","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017288533","display_name":"V. Lapras","orcid":"https://orcid.org/0009-0000-1746-8716"},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"V. Lapras","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049710071","display_name":"M.-C. Cyrille","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. C. Cyrille","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112344520","display_name":"C. Fenouillet-B\u00e9ranger","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Fenouillet-Beranger","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031703709","display_name":"B. Garros","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"B. Duriez. X. Garros","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5056055953"],"corresponding_institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049","https://openalex.org/I899635006"],"apc_list":null,"apc_paid":null,"fwci":1.2339,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.79778814,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":98,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"7"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.992900013923645,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/trapping","display_name":"Trapping","score":0.7365877032279968},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.7108845710754395},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.63239586353302},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6312180757522583},{"id":"https://openalex.org/keywords/carbon-fibers","display_name":"Carbon fibers","score":0.5602803826332092},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5015213489532471},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1375965178012848}],"concepts":[{"id":"https://openalex.org/C2777924906","wikidata":"https://www.wikidata.org/wiki/Q34168","display_name":"Trapping","level":2,"score":0.7365877032279968},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.7108845710754395},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.63239586353302},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6312180757522583},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.5602803826332092},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5015213489532471},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1375965178012848},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.0},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48204.2025.10983765","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48204.2025.10983765","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1566102715","https://openalex.org/W2513752685","https://openalex.org/W2707699712","https://openalex.org/W2745019717","https://openalex.org/W3008189758","https://openalex.org/W3163831078","https://openalex.org/W4225298035","https://openalex.org/W4225329848","https://openalex.org/W4376606703","https://openalex.org/W4391622520","https://openalex.org/W4392295979"],"related_works":["https://openalex.org/W2007742350","https://openalex.org/W2394289659","https://openalex.org/W4296916267","https://openalex.org/W2051069894","https://openalex.org/W2007559369","https://openalex.org/W4252213749","https://openalex.org/W769734323","https://openalex.org/W2354192024","https://openalex.org/W2018070723","https://openalex.org/W2007529921"],"abstract_inverted_index":{"This":[0],"study":[1],"employs":[2],"a":[3,71],"fast":[4,34],"and":[5,62,77],"accurate":[6,40],"capacitance-voltage":[7],"(CV)":[8],"measurement":[9],"technique":[10,55],"to":[11],"characterize":[12],"the":[13,57,78,84],"trapping":[14,48,64],"behavior":[15,59],"of":[16,42,60,74,81],"low-k":[17],"dielectrics,":[18],"using":[19],"large":[20],"MOS":[21],"capacitors":[22],"with":[23],"carbon-doped":[24],"silicon":[25],"oxide":[26],"insulators":[27],"processed":[28],"through":[29],"various":[30],"thermal":[31],"treatments.":[32],"The":[33],"CV":[35],"single":[36],"ramp":[37],"method":[38],"enables":[39],"extraction":[41],"capacitance":[43],"characteristics":[44],"while":[45],"minimizing":[46],"bulk":[47],"effects":[49],"during":[50],"measurement.":[51],"Measurement":[52,54],"Stress":[53],"reveals":[56],"time-dependent":[58],"electron":[61],"hole":[63],"in":[65],"different":[66],"process":[67],"splits":[68],"allowing":[69],"for":[70],"deeper":[72],"understanding":[73],"trap":[75],"dynamics":[76],"energy":[79],"distribution":[80],"traps":[82],"within":[83],"dielectric.":[85]},"counts_by_year":[{"year":2026,"cited_by_count":2}],"updated_date":"2026-05-08T15:41:06.802602","created_date":"2025-10-10T00:00:00"}