{"id":"https://openalex.org/W4410394220","doi":"https://doi.org/10.1109/irps48204.2025.10982743","title":"Gate Stack Development for Next Gen High Voltage Periphery DRAM Devices","display_name":"Gate Stack Development for Next Gen High Voltage Periphery DRAM Devices","publication_year":2025,"publication_date":"2025-03-30","ids":{"openalex":"https://openalex.org/W4410394220","doi":"https://doi.org/10.1109/irps48204.2025.10982743"},"language":"en","primary_location":{"id":"doi:10.1109/irps48204.2025.10982743","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48204.2025.10982743","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016436621","display_name":"Jo\u00e3o P. A. Bastos","orcid":"https://orcid.org/0000-0002-8877-9850"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. P. Bastos","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068577719","display_name":"J. Franco","orcid":"https://orcid.org/0000-0002-7382-8605"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Franco","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082855147","display_name":"Barry O\u2019Sullivan","orcid":"https://orcid.org/0000-0002-9036-8241"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"B. J. O'Sullivan","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062618698","display_name":"Y. Higashi","orcid":"https://orcid.org/0000-0001-6121-0069"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Y. Higashi","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066567414","display_name":"A. Chasin","orcid":"https://orcid.org/0000-0003-4497-9866"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Chasin","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000520516","display_name":"Jhuma Ganguly","orcid":"https://orcid.org/0000-0001-5119-6144"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Ganguly","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052618332","display_name":"H. Arimura","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"H. Arimura","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019510660","display_name":"A. Spessot","orcid":"https://orcid.org/0000-0003-2381-0121"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Spessot","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024697011","display_name":"M.-S. Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M.-S. Kim","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065113949","display_name":"Naoto Horiguchi","orcid":"https://orcid.org/0000-0001-5490-0416"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Horiguchi","raw_affiliation_strings":["imec,Leuven,Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec,Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.07362004,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dram","display_name":"Dram","score":0.9165297150611877},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.7737300395965576},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5013108253479004},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.47253182530403137},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4579673111438751},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4476920962333679},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4360077381134033},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.39279893040657043},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.25632739067077637},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.1158774197101593}],"concepts":[{"id":"https://openalex.org/C7366592","wikidata":"https://www.wikidata.org/wiki/Q1255620","display_name":"Dram","level":2,"score":0.9165297150611877},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.7737300395965576},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5013108253479004},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.47253182530403137},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4579673111438751},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4476920962333679},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4360077381134033},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.39279893040657043},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.25632739067077637},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.1158774197101593}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48204.2025.10982743","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48204.2025.10982743","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1985261292","https://openalex.org/W2064147269","https://openalex.org/W2071915747","https://openalex.org/W2086126257","https://openalex.org/W2131034210","https://openalex.org/W2144766991","https://openalex.org/W2151860561","https://openalex.org/W2156691787","https://openalex.org/W2162231877","https://openalex.org/W2289750143","https://openalex.org/W2802502993","https://openalex.org/W2808918009","https://openalex.org/W2939424161","https://openalex.org/W3013320480","https://openalex.org/W3015086970","https://openalex.org/W4225993920","https://openalex.org/W4236070441","https://openalex.org/W4317794554","https://openalex.org/W6800993894"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W3120961607","https://openalex.org/W4401568740","https://openalex.org/W3148568549","https://openalex.org/W2098207691","https://openalex.org/W1648516568","https://openalex.org/W361036515","https://openalex.org/W2161286015","https://openalex.org/W2269474412","https://openalex.org/W2050507285"],"abstract_inverted_index":{"Performance":[0],"enhancement":[1],"of":[2,10,30,67,70],"DRAM":[3,31],"memory":[4],"will":[5],"eventually":[6],"require":[7],"a":[8],"switch":[9],"periphery":[11,32],"transistors":[12,29],"from":[13],"planar":[14],"to":[15],"finFET":[16,35],"configuration.":[17],"In":[18],"this":[19],"work":[20],"we":[21],"explore":[22],"gate-stack":[23],"options":[24],"for":[25],"thick":[26,40],"oxide":[27,41],"(high-voltage)":[28],"compatible":[33],"with":[34],"architecture.":[36],"We":[37],"investigate":[38],"different":[39],"interface":[42],"layer":[43],"processes,":[44],"gate":[45],"stacks":[46],"and":[47,50,58],"processing":[48],"steps":[49],"their":[51],"impact":[52],"on":[53],"NBTI,":[54],"V<inf":[55],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[56],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">FB</inf>":[57],"EOT.":[59],"A":[60],"defect-centered":[61],"analysis":[62],"enables":[63],"the":[64,68],"correlated":[65],"interpretation":[66],"trends":[69],"these":[71],"electrical":[72],"metrics.":[73]},"counts_by_year":[],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}