{"id":"https://openalex.org/W4376606650","doi":"https://doi.org/10.1109/irps48203.2023.10117878","title":"Semantic Autoencoder for Modeling BEOL and MOL Dielectric Lifetime Distributions","display_name":"Semantic Autoencoder for Modeling BEOL and MOL Dielectric Lifetime Distributions","publication_year":2023,"publication_date":"2023-03-01","ids":{"openalex":"https://openalex.org/W4376606650","doi":"https://doi.org/10.1109/irps48203.2023.10117878"},"language":"en","primary_location":{"id":"doi:10.1109/irps48203.2023.10117878","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48203.2023.10117878","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007130687","display_name":"Weiman Yan","orcid":null},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Weiman Yan","raw_affiliation_strings":["University of Illinois Urbana-Champaign,Dept. of Electrical and Computer Engineering,Urbana,Illinois,USA","Dept. of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois Urbana-Champaign,Dept. of Electrical and Computer Engineering,Urbana,Illinois,USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Dept. of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012609593","display_name":"Ernest Y. Wu","orcid":"https://orcid.org/0000-0003-4979-1029"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ernest Wu","raw_affiliation_strings":["IBM Research Division,Vermont,USA","IBM Research Division, Vermont, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research Division,Vermont,USA","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM Research Division, Vermont, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049638480","display_name":"Alexander G. Schwing","orcid":null},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Alexander G. Schwing","raw_affiliation_strings":["University of Illinois Urbana-Champaign,Dept. of Electrical and Computer Engineering,Urbana,Illinois,USA","Dept. of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois Urbana-Champaign,Dept. of Electrical and Computer Engineering,Urbana,Illinois,USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Dept. of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5019748322","display_name":"Elyse Rosenbaum","orcid":"https://orcid.org/0000-0002-3919-9833"},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Elyse Rosenbaum","raw_affiliation_strings":["University of Illinois Urbana-Champaign,Dept. of Electrical and Computer Engineering,Urbana,Illinois,USA","Dept. of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Illinois Urbana-Champaign,Dept. of Electrical and Computer Engineering,Urbana,Illinois,USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Dept. of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois, USA","institution_ids":["https://openalex.org/I157725225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9900000095367432,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10511","display_name":"High voltage insulation and dielectric phenomena","score":0.9718000292778015,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/autoencoder","display_name":"Autoencoder","score":0.8747885227203369},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.6951442360877991},{"id":"https://openalex.org/keywords/percolation","display_name":"Percolation (cognitive psychology)","score":0.5783307552337646},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5451719760894775},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5090858340263367},{"id":"https://openalex.org/keywords/percolation-theory","display_name":"Percolation theory","score":0.4607129991054535},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.4373888373374939},{"id":"https://openalex.org/keywords/statistical-physics","display_name":"Statistical physics","score":0.4022969603538513},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3720400929450989},{"id":"https://openalex.org/keywords/deep-learning","display_name":"Deep learning","score":0.33778905868530273},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2716434597969055},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.19031810760498047},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1902782917022705},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.16168156266212463},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1306103765964508}],"concepts":[{"id":"https://openalex.org/C101738243","wikidata":"https://www.wikidata.org/wiki/Q786435","display_name":"Autoencoder","level":3,"score":0.8747885227203369},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.6951442360877991},{"id":"https://openalex.org/C2780457167","wikidata":"https://www.wikidata.org/wiki/Q17156484","display_name":"Percolation (cognitive psychology)","level":2,"score":0.5783307552337646},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5451719760894775},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5090858340263367},{"id":"https://openalex.org/C11557063","wikidata":"https://www.wikidata.org/wiki/Q900918","display_name":"Percolation theory","level":3,"score":0.4607129991054535},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.4373888373374939},{"id":"https://openalex.org/C121864883","wikidata":"https://www.wikidata.org/wiki/Q677916","display_name":"Statistical physics","level":1,"score":0.4022969603538513},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3720400929450989},{"id":"https://openalex.org/C108583219","wikidata":"https://www.wikidata.org/wiki/Q197536","display_name":"Deep learning","level":2,"score":0.33778905868530273},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2716434597969055},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.19031810760498047},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1902782917022705},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.16168156266212463},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1306103765964508},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C169760540","wikidata":"https://www.wikidata.org/wiki/Q207011","display_name":"Neuroscience","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps48203.2023.10117878","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps48203.2023.10117878","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1965612527","https://openalex.org/W1985028368","https://openalex.org/W2039181475","https://openalex.org/W2098550459","https://openalex.org/W2117106078","https://openalex.org/W2117749367","https://openalex.org/W2145950090","https://openalex.org/W2158030211","https://openalex.org/W2540587124","https://openalex.org/W2799333888","https://openalex.org/W2958742333","https://openalex.org/W3136302458","https://openalex.org/W4225313389","https://openalex.org/W4242783383","https://openalex.org/W6640963894"],"related_works":["https://openalex.org/W2669956259","https://openalex.org/W4249005693","https://openalex.org/W4392946183","https://openalex.org/W3088732000","https://openalex.org/W45257362","https://openalex.org/W3042760486","https://openalex.org/W2023077343","https://openalex.org/W2074855102","https://openalex.org/W2170329557","https://openalex.org/W2031110665"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,10,23],"physics-based":[4],"machine":[5],"learning":[6],"framework":[7],"for":[8],"modeling":[9],"dielectric":[11,31,52],"lifetime":[12],"distribution":[13,33],"in":[14],"the":[15,30,37,44,64],"presence":[16],"of":[17,36,51],"manufacturing":[18],"process":[19],"variations.":[20],"It":[21],"uses":[22],"semantic":[24],"autoencoder":[25,68],"that":[26,43,55],"provides":[27],"insight":[28],"into":[29],"thickness":[32],"and":[34,54,87],"parameters":[35],"underlying":[38],"percolation":[39],"model.":[40],"Experiments":[41],"show":[42],"model":[45,65,73,78],"is":[46],"applicable":[47],"to":[48,72,77],"various":[49],"types":[50],"films":[53],"including":[56],"time-zero":[57],"leakage":[58],"current":[59],"as":[60],"an":[61],"input":[62],"improves":[63],"performance.":[66],"The":[67],"may":[69],"be":[70],"configured":[71],"intrinsic":[74,86],"break-down":[75],"or":[76],"breakdown":[79],"resulting":[80],"from":[81],"competing":[82],"failure":[83],"mechanisms,":[84],"e.g.":[85],"extrinsic.":[88]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}