{"id":"https://openalex.org/W3040413857","doi":"https://doi.org/10.1109/irps45951.2020.9129087","title":"Metal reliability mechanisms in Ruthenium interconnects","display_name":"Metal reliability mechanisms in Ruthenium interconnects","publication_year":2020,"publication_date":"2020-04-01","ids":{"openalex":"https://openalex.org/W3040413857","doi":"https://doi.org/10.1109/irps45951.2020.9129087","mag":"3040413857"},"language":"en","primary_location":{"id":"doi:10.1109/irps45951.2020.9129087","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps45951.2020.9129087","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5033858378","display_name":"Olalla Varela Pedreira","orcid":"https://orcid.org/0000-0002-2987-1972"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"O. Varela Pedreira","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027473851","display_name":"Michele Stucchi","orcid":"https://orcid.org/0000-0002-7848-0492"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Stucchi","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018168075","display_name":"Anshul Gupta","orcid":"https://orcid.org/0000-0003-4276-5397"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Gupta","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111361300","display_name":"V. Vega Gonzalez","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"V. Vega Gonzalez","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114133805","display_name":"M. van der Veen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. van der Veen","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063580021","display_name":"St\u00e9phane Larivi\u00e8re","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"S. Lariviere","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018170428","display_name":"Christopher Wilson","orcid":"https://orcid.org/0000-0002-0218-6895"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"C.J. Wilson","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110507565","display_name":"Zs. T\u00f4kei","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Zs Tokei","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5009388264","display_name":"K. Croes imec","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"K. Croes imec","raw_affiliation_strings":["imec, Leuven, Belgium","Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9418,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":{"value":0.70775529,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"7"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9907000064849854,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electromigration","display_name":"Electromigration","score":0.9029308557510376},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.7804450392723083},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.6920203566551208},{"id":"https://openalex.org/keywords/ruthenium","display_name":"Ruthenium","score":0.6599414944648743},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6022011637687683},{"id":"https://openalex.org/keywords/activation-energy","display_name":"Activation energy","score":0.5739524364471436},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.4949881434440613},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.46873173117637634},{"id":"https://openalex.org/keywords/grain-boundary","display_name":"Grain boundary","score":0.44065332412719727},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4174792766571045},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.41179168224334717},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.38016706705093384},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3203338086605072},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.20414286851882935},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.19196400046348572},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13641738891601562},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13289836049079895},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.1296989917755127},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.10965186357498169}],"concepts":[{"id":"https://openalex.org/C138055206","wikidata":"https://www.wikidata.org/wiki/Q1319010","display_name":"Electromigration","level":2,"score":0.9029308557510376},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.7804450392723083},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.6920203566551208},{"id":"https://openalex.org/C555196967","wikidata":"https://www.wikidata.org/wiki/Q1086","display_name":"Ruthenium","level":3,"score":0.6599414944648743},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6022011637687683},{"id":"https://openalex.org/C95121573","wikidata":"https://www.wikidata.org/wiki/Q190474","display_name":"Activation energy","level":2,"score":0.5739524364471436},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.4949881434440613},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.46873173117637634},{"id":"https://openalex.org/C47908070","wikidata":"https://www.wikidata.org/wiki/Q900515","display_name":"Grain boundary","level":3,"score":0.44065332412719727},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4174792766571045},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.41179168224334717},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.38016706705093384},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3203338086605072},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20414286851882935},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.19196400046348572},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13641738891601562},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13289836049079895},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.1296989917755127},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10965186357498169},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.0},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps45951.2020.9129087","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps45951.2020.9129087","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7599999904632568}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W2073753376","https://openalex.org/W2605777874","https://openalex.org/W2620886405","https://openalex.org/W2787310733","https://openalex.org/W2800334986","https://openalex.org/W2800716838","https://openalex.org/W2802127740","https://openalex.org/W2887591654","https://openalex.org/W2914446819","https://openalex.org/W2946582287","https://openalex.org/W6753923727","https://openalex.org/W6948774280","https://openalex.org/W7018795933"],"related_works":["https://openalex.org/W2004615523","https://openalex.org/W2055638565","https://openalex.org/W2138118262","https://openalex.org/W2542708587","https://openalex.org/W4229007131","https://openalex.org/W2364197307","https://openalex.org/W4381800218","https://openalex.org/W2136403807","https://openalex.org/W796810817","https://openalex.org/W2004712986"],"abstract_inverted_index":{"We":[0,12,65],"perform":[1],"a":[2,56],"detailed":[3],"assessment":[4],"of":[5,21,34],"different":[6],"reliability":[7],"mechanisms":[8],"in":[9],"Ru":[10,16,68],"interconnects.":[11],"show":[13],"that":[14,67],"full":[15],"vias":[17],"have":[18],"no":[19],"risk":[20],"voiding":[22],"after":[23],"long":[24],"thermal":[25],"storage":[26],"(>1200":[27],"h)":[28],"at":[29,78],"high":[30,57,60],"temperature.":[31],"Our":[32],"estimate":[33],"the":[35,74,84],"electromigration":[36],"activation":[37],"energy":[38],"is":[39],"~1.8":[40],"eV":[41],"and,":[42],"through":[43],"FA,":[44],"we":[45],"associate":[46],"it":[47],"to":[48],"grain":[49],"boundary":[50],"diffusion.":[51],"Conservative":[52],"lifetime":[53],"predictions":[54],"confirm":[55],"JMAX":[58,69],"but":[59],"self-heating":[61],"(>100":[62],"\u00b0C)":[63],"@JMAX.":[64],"venture":[66],"will":[70],"be":[71],"limited":[72],"by":[73],"maximum":[75],"heating":[76],"allowed":[77],"each":[79],"interconnect":[80],"level":[81],"without":[82],"degrading":[83],"chip":[85],"performance.":[86]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":3}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}