{"id":"https://openalex.org/W2946582287","doi":"https://doi.org/10.1109/irps.2019.8720604","title":"Understanding EM-Degradation Mechanisms in Metal Heaters Used for Si Photonics Applications","display_name":"Understanding EM-Degradation Mechanisms in Metal Heaters Used for Si Photonics Applications","publication_year":2019,"publication_date":"2019-03-01","ids":{"openalex":"https://openalex.org/W2946582287","doi":"https://doi.org/10.1109/irps.2019.8720604","mag":"2946582287"},"language":"en","primary_location":{"id":"doi:10.1109/irps.2019.8720604","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2019.8720604","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5080591280","display_name":"Kristof Croes","orcid":"https://orcid.org/0000-0002-3955-0638"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"K. Croes","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060752963","display_name":"Veerle Simons","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"V. Simons","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084107315","display_name":"Sofie Beyne","orcid":"https://orcid.org/0000-0002-5138-0280"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"S. Beyne","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112564700","display_name":"Vladimir Cherman","orcid":"https://orcid.org/0000-0002-8068-9236"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"V. Cherman","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049476718","display_name":"Herman Oprins","orcid":"https://orcid.org/0000-0003-0680-4969"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"H. Oprins","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027473851","display_name":"Michele Stucchi","orcid":"https://orcid.org/0000-0002-7848-0492"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Stucchi","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049166949","display_name":"P. P. Absil","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Ph. Absil","raw_affiliation_strings":["Imec Kapeldreef 75, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Imec Kapeldreef 75, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028716260","display_name":"A. Glabman","orcid":null},"institutions":[{"id":"https://openalex.org/I4210129144","display_name":"FormFactor (United States)","ror":"https://ror.org/03n4yr938","country_code":"US","type":"company","lineage":["https://openalex.org/I4210129144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Glabman","raw_affiliation_strings":["FormFactor 2350, St. Paul, MN"],"affiliations":[{"raw_affiliation_string":"FormFactor 2350, St. Paul, MN","institution_ids":["https://openalex.org/I4210129144"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5089413131","display_name":"E. Wilcox","orcid":null},"institutions":[{"id":"https://openalex.org/I4210129144","display_name":"FormFactor (United States)","ror":"https://ror.org/03n4yr938","country_code":"US","type":"company","lineage":["https://openalex.org/I4210129144"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Wilcox","raw_affiliation_strings":["FormFactor 2350, St. Paul, MN"],"affiliations":[{"raw_affiliation_string":"FormFactor 2350, St. Paul, MN","institution_ids":["https://openalex.org/I4210129144"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5080591280"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.439,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.54650974,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electromigration","display_name":"Electromigration","score":0.9956055879592896},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6776040196418762},{"id":"https://openalex.org/keywords/void","display_name":"Void (composites)","score":0.6162148118019104},{"id":"https://openalex.org/keywords/degradation","display_name":"Degradation (telecommunications)","score":0.6091625094413757},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.594223141670227},{"id":"https://openalex.org/keywords/current","display_name":"Current (fluid)","score":0.5113629698753357},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5051496624946594},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.4835793375968933},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.4748542308807373},{"id":"https://openalex.org/keywords/back-end-of-line","display_name":"Back end of line","score":0.4625737965106964},{"id":"https://openalex.org/keywords/current-density","display_name":"Current density","score":0.42362940311431885},{"id":"https://openalex.org/keywords/nuclear-engineering","display_name":"Nuclear engineering","score":0.3866451680660248},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.33635830879211426},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.21644806861877441},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2146570086479187},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12063845992088318},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.10728183388710022},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08030050992965698}],"concepts":[{"id":"https://openalex.org/C138055206","wikidata":"https://www.wikidata.org/wiki/Q1319010","display_name":"Electromigration","level":2,"score":0.9956055879592896},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6776040196418762},{"id":"https://openalex.org/C2779772531","wikidata":"https://www.wikidata.org/wiki/Q19689164","display_name":"Void (composites)","level":2,"score":0.6162148118019104},{"id":"https://openalex.org/C2779679103","wikidata":"https://www.wikidata.org/wiki/Q5251805","display_name":"Degradation (telecommunications)","level":2,"score":0.6091625094413757},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.594223141670227},{"id":"https://openalex.org/C148043351","wikidata":"https://www.wikidata.org/wiki/Q4456944","display_name":"Current (fluid)","level":2,"score":0.5113629698753357},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5051496624946594},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.4835793375968933},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.4748542308807373},{"id":"https://openalex.org/C2776628375","wikidata":"https://www.wikidata.org/wiki/Q4839229","display_name":"Back end of line","level":3,"score":0.4625737965106964},{"id":"https://openalex.org/C207740977","wikidata":"https://www.wikidata.org/wiki/Q234072","display_name":"Current density","level":2,"score":0.42362940311431885},{"id":"https://openalex.org/C116915560","wikidata":"https://www.wikidata.org/wiki/Q83504","display_name":"Nuclear engineering","level":1,"score":0.3866451680660248},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.33635830879211426},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.21644806861877441},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2146570086479187},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12063845992088318},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.10728183388710022},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08030050992965698},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps.2019.8720604","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2019.8720604","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2067528876","https://openalex.org/W2785606652"],"related_works":["https://openalex.org/W2048644706","https://openalex.org/W2536001652","https://openalex.org/W2261565770","https://openalex.org/W2144151832","https://openalex.org/W1990187088","https://openalex.org/W2547818291","https://openalex.org/W2049675513","https://openalex.org/W1980919623","https://openalex.org/W2083496115","https://openalex.org/W2139972812"],"abstract_inverted_index":{"Electromigration":[0],"mechanisms":[1],"of":[2,49,94],"W-heaters":[3],"with":[4],"Cu":[5],"connections":[6],"at":[7],"each":[8],"line":[9],"end":[10],"to":[11,15,55],"supply":[12],"the":[13,16,47,50,56,61,92],"current":[14],"heater":[17],"were":[18],"studied.":[19],"For":[20,41],"making":[21],"reliable":[22],"lifetime":[23,62],"estimates,":[24],"a":[25,88],"temperature":[26,48,58],"profile":[27],"is":[28,53],"proposed":[29],"based":[30],"on":[31,91],"infra-red":[32],"(IR)":[33],"microscopy,":[34],"electromigration":[35,84],"activation":[36],"energies":[37],"and":[38,59],"failure":[39],"location.":[40],"our":[42,95],"structure,":[43],"we":[44,80],"show":[45,81],"that":[46,82],"void":[51],"location":[52],"close":[54],"ambient":[57],"hence":[60],"prediction":[63],"methodology":[64],"should":[65],"take":[66],"this":[67,75],"into":[68],"account.":[69],"Also,":[70],"different":[71],"test":[72],"methodologies":[73],"for":[74],"application":[76],"are":[77],"benchmarked,":[78],"where":[79],"iso-thermal":[83],"tests":[85],"have":[86],"only":[87],"limited":[89],"impact":[90],"lifetimes":[93],"structures.":[96]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":4},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}