{"id":"https://openalex.org/W2945752169","doi":"https://doi.org/10.1109/irps.2019.8720425","title":"Comprehensive Methodology for Multiple Spots Competing Progressive Breakdown for BEOL/FEOL Applications","display_name":"Comprehensive Methodology for Multiple Spots Competing Progressive Breakdown for BEOL/FEOL Applications","publication_year":2019,"publication_date":"2019-03-01","ids":{"openalex":"https://openalex.org/W2945752169","doi":"https://doi.org/10.1109/irps.2019.8720425","mag":"2945752169"},"language":"en","primary_location":{"id":"doi:10.1109/irps.2019.8720425","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2019.8720425","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012609593","display_name":"Ernest Y. Wu","orcid":"https://orcid.org/0000-0003-4979-1029"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ernest Y. Wu","raw_affiliation_strings":["VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101406297","display_name":"Baozhen Li","orcid":"https://orcid.org/0000-0002-9563-9821"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Baozhen Li","raw_affiliation_strings":["VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036267166","display_name":"J. H. Stathis","orcid":"https://orcid.org/0000-0001-8340-2475"},"institutions":[{"id":"https://openalex.org/I4210106712","display_name":"Alliance for Safe Kids","ror":"https://ror.org/01922pt58","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I4210106712"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"James H. Stathis","raw_affiliation_strings":["Yorktown Heights, NY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Yorktown Heights, NY","institution_ids":["https://openalex.org/I4210106712"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018134764","display_name":"Andrew Kim","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Andrew Kim","raw_affiliation_strings":["NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"NY, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3981,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.45207314,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"51","issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/weibull-distribution","display_name":"Weibull distribution","score":0.4440493583679199},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4020759165287018},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.40106111764907837},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.36192816495895386},{"id":"https://openalex.org/keywords/statistical-physics","display_name":"Statistical physics","score":0.3467404544353485},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.25506269931793213},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.23891106247901917}],"concepts":[{"id":"https://openalex.org/C173291955","wikidata":"https://www.wikidata.org/wiki/Q732332","display_name":"Weibull distribution","level":2,"score":0.4440493583679199},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4020759165287018},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.40106111764907837},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.36192816495895386},{"id":"https://openalex.org/C121864883","wikidata":"https://www.wikidata.org/wiki/Q677916","display_name":"Statistical physics","level":1,"score":0.3467404544353485},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.25506269931793213},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.23891106247901917}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps.2019.8720425","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2019.8720425","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Reliability Physics Symposium (IRPS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1592828091","https://openalex.org/W1992045511","https://openalex.org/W2048253856","https://openalex.org/W2098550459","https://openalex.org/W2099474450","https://openalex.org/W2113343033","https://openalex.org/W2114840932","https://openalex.org/W2119319062","https://openalex.org/W2133009271","https://openalex.org/W2144478407","https://openalex.org/W2152223161","https://openalex.org/W2154032027","https://openalex.org/W2749322890","https://openalex.org/W2898229019","https://openalex.org/W4210943775"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036"],"abstract_inverted_index":{"We":[0,77,139],"present":[1],"the":[2,20,84,100,107,113],"general":[3],"framework":[4],"of":[5,22,109,171],"dielectric":[6],"breakdown":[7,14,74,116],"(BD)":[8],"showing":[9],"multiple":[10,67,149],"spot":[11,150],"competing":[12,111],"progressive":[13,73],"(PBD)":[15],"in":[16,19,39,45,106,162],"BEOL/FEOL":[17],"applications":[18],"presence":[21],"thickness":[23,37,123,153],"variability.":[24],"A":[25],"Monte-Carlo":[26],"simulation":[27,159],"procedure":[28],"is":[29,90,102,155],"used":[30],"to":[31,65,93],"investigate":[32],"post-BD":[33],"phenomena":[34],"from":[35,132,173],"small":[36],"variation":[38,124],"FEOL":[40,174],"SiO2to":[41],"very":[42],"large":[43],"variations":[44],"BEOL":[46,176],"low-K":[47],"dielectrics.":[48],"Rather":[49],"than":[50],"directly":[51],"modelling":[52],"current":[53],"transients":[54],"as":[55],"done":[56],"recently":[57],"[1],":[58],"we":[59],"apply":[60],"successive":[61],"BD":[62,68,86],"statistics":[63],"methodology":[64],"generate":[66],"spots":[69],"and":[70,130,175],"their":[71],"associated":[72],"time":[75,87,96],"(TPBD).":[76],"show":[78],"that":[79,126],"for":[80,168],"single-spot":[81],"PBD":[82,151],"mode":[83],"first":[85],"(TBDor":[88],"TBD1)":[89],"intrinsically":[91],"uncorrelated":[92],"its":[94],"residual":[95],"(TRES)":[97],"even":[98],"if":[99,152],"variability":[101,154],"present.":[103,156],"In":[104],"contrast,":[105],"case":[108],"multiple-spot":[110],"PBD,":[112],"final":[114],"hard":[115],"(HBD)":[117],"distributions":[118],"are":[119,161],"fundamentally":[120],"affected":[121],"by":[122],"so":[125],"they":[127],"become":[128],"non-Weibull":[129],"deviate":[131],"Poisson":[133],"area":[134],"scaling":[135],"at":[136],"high":[137],"percentiles.":[138],"report":[140],"an":[141],"important":[142],"intrinsic":[143],"correlation":[144],"between":[145],"TBDand":[146],"TRESresults":[147],"involving":[148],"Our":[157],"MC":[158],"results":[160],"excellent":[163],"agreement":[164],"with":[165],"experimental":[166],"data":[167],"three":[169],"sets":[170],"hardware":[172],"applications.":[177]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-07-31T08:31:51.225901","created_date":"2025-10-10T00:00:00"}