{"id":"https://openalex.org/W1579249848","doi":"https://doi.org/10.1109/irps.2015.7112736","title":"Impact of oxide liner properties on TSV Cu pumping and TSV stress","display_name":"Impact of oxide liner properties on TSV Cu pumping and TSV stress","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W1579249848","doi":"https://doi.org/10.1109/irps.2015.7112736","mag":"1579249848"},"language":"en","primary_location":{"id":"doi:10.1109/irps.2015.7112736","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2015.7112736","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Reliability Physics Symposium","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017701896","display_name":"Joke De Messemaeker","orcid":"https://orcid.org/0000-0002-4872-0176"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. De Messemaeker","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033858378","display_name":"Olalla Varela Pedreira","orcid":"https://orcid.org/0000-0002-2987-1972"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"O. Varela Pedreira","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052932976","display_name":"Alain Moussa","orcid":"https://orcid.org/0000-0002-6377-4199"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Moussa","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087040395","display_name":"Nabi Nabiollahi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114297","display_name":"Material (Belgium)","ror":"https://ror.org/026p72y65","country_code":"BE","type":"company","lineage":["https://openalex.org/I4210114297"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Nabiollahi","raw_affiliation_strings":["Department of Metallurgy and Materials Engineering, Leuven, Belgium","Department of Metallurgy and Materials Engineering, KULeuven, Kasteelpark Arenberg 44, 3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Metallurgy and Materials Engineering, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114297","https://openalex.org/I99464096"]},{"raw_affiliation_string":"Department of Metallurgy and Materials Engineering, KULeuven, Kasteelpark Arenberg 44, 3001 Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033660264","display_name":"Kris Vanstreels","orcid":"https://orcid.org/0000-0002-4420-0966"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"K. Vanstreels","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017425497","display_name":"Stefaan Van Huylenbroeck","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"S. Van Huylenbroeck","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085322922","display_name":"Harold Philipsen","orcid":"https://orcid.org/0000-0002-5029-1104"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"H. Philipsen","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020108967","display_name":"Patrick Verdonck","orcid":"https://orcid.org/0000-0003-2454-0602"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"P. Verdonck","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026709733","display_name":"Bart Vandevelde","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"B. Vandevelde","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073310038","display_name":"Ingrid De Wolf","orcid":"https://orcid.org/0000-0003-3822-5953"},"institutions":[{"id":"https://openalex.org/I4210114297","display_name":"Material (Belgium)","ror":"https://ror.org/026p72y65","country_code":"BE","type":"company","lineage":["https://openalex.org/I4210114297"]},{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"I. De Wolf","raw_affiliation_strings":["Department of Metallurgy and Materials Engineering, Leuven, Belgium","Department of Metallurgy and Materials Engineering, KULeuven, Kasteelpark Arenberg 44, 3001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Metallurgy and Materials Engineering, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114297","https://openalex.org/I99464096"]},{"raw_affiliation_string":"Department of Metallurgy and Materials Engineering, KULeuven, Kasteelpark Arenberg 44, 3001 Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051712390","display_name":"Eric Beyne","orcid":"https://orcid.org/0000-0002-3096-050X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"E. Beyne","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080591280","display_name":"Kristof Croes","orcid":"https://orcid.org/0000-0002-3955-0638"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"K. Croes","raw_affiliation_strings":["IMEC, Leuven, Belgium","IMEC, Kapeldreef 75, 3001 Leuven Belgium,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"IMEC, Kapeldreef 75, 3001 Leuven Belgium,","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.8823,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.90895259,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"4C.5.1","last_page":"4C.5.10"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5384039878845215},{"id":"https://openalex.org/keywords/residual-stress","display_name":"Residual stress","score":0.5163030028343201},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.4484642446041107},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.36793673038482666},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.10475209355354309}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5384039878845215},{"id":"https://openalex.org/C37292000","wikidata":"https://www.wikidata.org/wiki/Q1257918","display_name":"Residual stress","level":2,"score":0.5163030028343201},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.4484642446041107},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.36793673038482666},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.10475209355354309}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/irps.2015.7112736","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2015.7112736","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Reliability Physics Symposium","raw_type":"proceedings-article"},{"id":"pmh:oai:lirias2repo.kuleuven.be:123456789/524959","is_oa":false,"landing_page_url":"https://lirias.kuleuven.be/bitstream/123456789/516514/1/pub07681.pdf","pdf_url":null,"source":{"id":"https://openalex.org/S7407055369","display_name":"Lirias","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE International Reliability Physics Symposium - IRPS, Monterey CA, USA, 19-23 April 2015","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1990324211","https://openalex.org/W1991924258","https://openalex.org/W2015122410","https://openalex.org/W2018021390","https://openalex.org/W2026219304","https://openalex.org/W2075497902","https://openalex.org/W2078492284","https://openalex.org/W2087270819","https://openalex.org/W2133543885","https://openalex.org/W2154133941","https://openalex.org/W2313263970","https://openalex.org/W2334627411","https://openalex.org/W3197812517"],"related_works":["https://openalex.org/W4402299999","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W2800070131","https://openalex.org/W4230250635","https://openalex.org/W3041790586"],"abstract_inverted_index":{"We":[0],"investigated":[1],"the":[2,62,73,105,123],"impact":[3],"of":[4,104,122,129,138],"oxide":[5],"liner":[6,22,88,98,128,137],"elastic":[7],"modulus":[8],"and":[9,17,30,132],"thickness":[10,65],"on":[11],"through-silicon":[12],"via":[13],"(TSV)":[14],"Cu":[15,28,46],"pumping":[16,29,47],"stress.":[18,109],"A":[19],"low-k":[20],"dielectric":[21],"showed":[23],"a":[24,42,101,127,136],"decrease":[25],"in":[26],"residual":[27,45],"TSV":[31,74,108],"stress":[32,75,93,125],"compared":[33],"to":[34,54,69,79,86,118],"O3-TEOS":[35,63,112],"SiO2and":[36],"ALD":[37],"SiO2liners.":[38],"For":[39,110],"TSVs":[40],"with":[41],"post-plating":[43],"anneal,":[44],"decreases":[48],"from":[49,67,77],"(102":[50],"\u00b1":[51,56],"7)":[52],"nm":[53,58],"(11":[55],"1)":[57],"(99.9th":[59],"percentile)":[60],"when":[61],"SiO2liner":[64,113],"increases":[66,76],"50":[68,120],"630":[70],"nm,":[71,131],"while":[72],"220":[78],"610":[80],"MPa.":[81],"The":[82],"latter":[83],"is":[84],"attributed":[85],"permanent":[87],"densification":[89,99],"under":[90],"compressive":[91],"thermal":[92],"at":[94],"high":[95],"temperature.":[96],"This":[97],"generates":[100],"significant":[102],"part":[103],"room":[106],"temperature":[107],"our":[111],"system,":[114],"this":[115],"was":[116],"estimated":[117],"be":[119],"%":[121,134],"total":[124],"for":[126,135],"100":[130],"90":[133],"200":[139],"nm.":[140]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}