{"id":"https://openalex.org/W1591342734","doi":"https://doi.org/10.1109/irps.2015.7112695","title":"NBTI in Si<inf>0.5</inf>Ge<inf>0.5</inf> RMG gate stacks \u2014 Effect of high-k nitridation","display_name":"NBTI in Si<inf>0.5</inf>Ge<inf>0.5</inf> RMG gate stacks \u2014 Effect of high-k nitridation","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W1591342734","doi":"https://doi.org/10.1109/irps.2015.7112695","mag":"1591342734"},"language":"en","primary_location":{"id":"doi:10.1109/irps.2015.7112695","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2015.7112695","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Reliability Physics Symposium","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037178870","display_name":"P. Srinivasan","orcid":"https://orcid.org/0000-0002-9973-5212"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"P. Srinivasan","raw_affiliation_strings":["IBM SRDC, Albany, NY, USA","GLOBALFOUNDRIES, Malta, NY, 12020 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM SRDC, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, 12020 USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078181291","display_name":"Jody Fronheiser","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Fronheiser","raw_affiliation_strings":["GLOBALFOUNDRIES, Malta, NY, USA","GLOBALFOUNDRIES, Malta, NY, 12020 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, 12020 USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111732220","display_name":"S. Siddiqui","orcid":null},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Siddiqui","raw_affiliation_strings":["GLOBALFOUNDRIES, Malta, NY, USA","GLOBALFOUNDRIES, Malta, NY, 12020 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, 12020 USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091344436","display_name":"A. Kerber","orcid":"https://orcid.org/0000-0002-8753-873X"},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Kerber","raw_affiliation_strings":["GLOBALFOUNDRIES, Malta, NY, USA","GLOBALFOUNDRIES, Malta, NY, 12020 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, 12020 USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061640067","display_name":"L. F. Edge","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. F. Edge","raw_affiliation_strings":["GLOBALFOUNDRIES, Malta, NY, USA","IBM SRDC Kitchawan Road, Yorktown Heights, NY 10598 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"IBM SRDC Kitchawan Road, Yorktown Heights, NY 10598 USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078561472","display_name":"Richard G. Southwick","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. G. Southwick","raw_affiliation_strings":["GLOBALFOUNDRIES, Malta, NY, USA","IBM SRDC Kitchawan Road, Yorktown Heights, NY 10598 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"IBM SRDC Kitchawan Road, Yorktown Heights, NY 10598 USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5068935887","display_name":"E. Cartier","orcid":"https://orcid.org/0000-0002-0226-4996"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Cartier","raw_affiliation_strings":["GLOBALFOUNDRIES, Malta, NY, USA","IBM SRDC Kitchawan Road, Yorktown Heights, NY 10598 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES, Malta, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"IBM SRDC Kitchawan Road, Yorktown Heights, NY 10598 USA","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4017,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.66000969,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"2F.5.1","last_page":"2F.5.6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.34506434202194214}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.34506434202194214}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps.2015.7112695","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2015.7112695","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Reliability Physics Symposium","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/14","score":0.6600000262260437,"display_name":"Life below water"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2009063167","https://openalex.org/W2009144272","https://openalex.org/W2061839621","https://openalex.org/W2078482863","https://openalex.org/W2082336868","https://openalex.org/W2150635881","https://openalex.org/W2166019732","https://openalex.org/W2167021379","https://openalex.org/W2168148543"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W2271181815"],"abstract_inverted_index":{"Negative":[0],"Bias":[1],"Temperature":[2],"Instability":[3],"(NBTI)":[4],"is":[5],"assessed":[6],"in":[7,72,89],"(100)Si":[8],"planar":[9],"cSi":[10,73],"0.5":[13,17,76,80],"Ge":[14,77],"Replacement":[18],"Metal":[19],"Gate":[20],"(RMG)":[21],"gate":[22],"stacks,":[23],"with":[24],"and":[25,91],"without":[26],"high-k":[27],"nitridation":[28,32],"for":[29,87],"various":[30],"post":[31],"anneal":[33],"(PNA)":[34],"conditions.":[35],"Observed":[36,60],"initial":[37],"N":[38],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">it":[41],"was":[42],"8~9\u00d710":[43],"11":[46],"cm":[47],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-2":[50],".":[51],"Nitrided":[52],"devices":[53],"show":[54],"higher":[55],"NBTI":[56,71],"than":[57],"non-nitrided":[58],"devices.":[59],"time":[61],"slopes":[62],"become":[63],"shallower":[64],"from":[65],"~0.25":[66],"to":[67],"~0.20.":[68],"Overall,":[69],"observed":[70],"stacks":[81],"are":[82],"promising":[83],"making":[84],"it":[85],"viable":[86],"use":[88],"7nm":[90],"below":[92],"nodes.":[93]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2016-06-24T00:00:00"}