{"id":"https://openalex.org/W1576261457","doi":"https://doi.org/10.1109/irps.2015.7112670","title":"Intrinsic reliability of local interconnects for N7 and beyond","display_name":"Intrinsic reliability of local interconnects for N7 and beyond","publication_year":2015,"publication_date":"2015-04-01","ids":{"openalex":"https://openalex.org/W1576261457","doi":"https://doi.org/10.1109/irps.2015.7112670","mag":"1576261457"},"language":"en","primary_location":{"id":"doi:10.1109/irps.2015.7112670","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2015.7112670","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Reliability Physics Symposium","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5080591280","display_name":"Kristof Croes","orcid":"https://orcid.org/0000-0002-3955-0638"},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"K. Croes","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071981609","display_name":"A. Le\u015bniewska","orcid":"https://orcid.org/0000-0003-3863-065X"},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"A. Lesniewska","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101496873","display_name":"Chen Wu","orcid":"https://orcid.org/0000-0002-4636-8842"},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"C. Wu","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008296538","display_name":"Ivan Ciofi","orcid":"https://orcid.org/0000-0003-1374-4116"},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"I. Ciofi","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070981027","display_name":"A. Banczerowska","orcid":null},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"A. Banczerowska","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000569144","display_name":"Benjamin D. Briggs","orcid":null},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"B. Briggs","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089497603","display_name":"S. Demuynck","orcid":null},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"S. Demuynck","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110507565","display_name":"Zs. T\u00f4kei","orcid":null},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Zs. Tokei","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109370405","display_name":"J. B\u00f6mmels","orcid":null},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"J. Bommels","raw_affiliation_strings":["imec","imec, Kapeldreef 75, B-3001"],"affiliations":[{"raw_affiliation_string":"imec","institution_ids":[]},{"raw_affiliation_string":"imec, Kapeldreef 75, B-3001","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112269734","display_name":"Yves Saad","orcid":null},"institutions":[{"id":"https://openalex.org/I1335490905","display_name":"Synopsys (Switzerland)","ror":"https://ror.org/03mb54f81","country_code":"CH","type":"company","lineage":["https://openalex.org/I1335490905","https://openalex.org/I4210088951"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Y. Saad","raw_affiliation_strings":["Synopsys Inc","Synopsys. Inc.#TAB#"],"affiliations":[{"raw_affiliation_string":"Synopsys Inc","institution_ids":["https://openalex.org/I1335490905"]},{"raw_affiliation_string":"Synopsys. Inc.#TAB#","institution_ids":["https://openalex.org/I1335490905"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016861744","display_name":"Weimin Gao","orcid":"https://orcid.org/0000-0002-6758-9775"},"institutions":[{"id":"https://openalex.org/I1335490905","display_name":"Synopsys (Switzerland)","ror":"https://ror.org/03mb54f81","country_code":"CH","type":"company","lineage":["https://openalex.org/I1335490905","https://openalex.org/I4210088951"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"W. Gao","raw_affiliation_strings":["Synopsys Inc","Synopsys. Inc.#TAB#"],"affiliations":[{"raw_affiliation_string":"Synopsys Inc","institution_ids":["https://openalex.org/I1335490905"]},{"raw_affiliation_string":"Synopsys. Inc.#TAB#","institution_ids":["https://openalex.org/I1335490905"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":11,"corresponding_author_ids":["https://openalex.org/A5080591280"],"corresponding_institution_ids":["https://openalex.org/I196972281"],"apc_list":null,"apc_paid":null,"fwci":0.1973,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.5613956,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"2A.3.1","last_page":"2A.3.5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.5200364589691162},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3902096450328827},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3118603825569153},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.15399444103240967}],"concepts":[{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5200364589691162},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3902096450328827},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3118603825569153},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.15399444103240967},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/irps.2015.7112670","is_oa":false,"landing_page_url":"https://doi.org/10.1109/irps.2015.7112670","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Reliability Physics Symposium","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W202995102","https://openalex.org/W1544793596","https://openalex.org/W1996587626","https://openalex.org/W2003765188","https://openalex.org/W2039181475","https://openalex.org/W2069612244","https://openalex.org/W2078427776","https://openalex.org/W2097193732","https://openalex.org/W2112902759","https://openalex.org/W2130126544"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036"],"abstract_inverted_index":{"The":[0,28],"intrinsic":[1,29,275],"Time":[2],"Dependent":[3],"Dielectric":[4],"Breakdown":[5],"properties":[6,31],"of":[7,36,92,112,249,273],"the":[8,89,93,102,119,146,159,184,222,227,231,241,260,267,274],"spacer":[9,283],"between":[10],"gate":[11,232],"and":[12,21,26,48,73,176,209],"first":[13],"level":[14],"local":[15,251],"interconnects":[16],"are":[17,97,224],"assessed":[18],"for":[19,139,158,183],"dielectrics":[20,141],"spacings":[22],"compatible":[23],"with":[24],"N7":[25],"beyond.":[27],"reliability":[30,108,210],"down":[32,280],"to":[33,101,126,246,266,281],"3nm":[34,127,282],"thickness":[35,155,284],"standard":[37,104],"LPCVD":[38],"Si":[39,50,161],"<sub":[40,44,51,55,65,69,114,130,162,166,173,178,269],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[41,45,52,56,66,70,115,131,163,167,174,179,270],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[42,53,71,164],"N":[43,54,165],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">4</sub>":[46,57,168],"-":[47,72],"PECVD":[49,160],"-films":[58],"as":[59,61],"well":[60],"more":[62,94,103],"advanced":[63,95],"Al":[64],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[67],"O":[68],"low-k":[74],"CVD":[75],"SiN-layers":[76],"have":[77],"been":[78],"studied":[79,242],"using":[80],"imec's":[81],"pcap":[82],"test":[83],"vehicle.":[84],"It":[85],"turned":[86],"out":[87],"that":[88,188,256,278],"leakage":[90,208],"current":[91],"films":[96,200],"not":[98],"worse":[99],"compared":[100,265],"layers.":[105],"Besides,":[106],"their":[107],"performance,":[109],"in":[110,145,207,240],"terms":[111],"E":[113,129,172,268],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">max</sub>":[116,132,175,271],",":[117],"is":[118,149,191,285],"same":[120],"or":[121,229],"even":[122],"slightly":[123],"better.":[124],"Down":[125],"thickness,":[128],"-values":[133,272],"higher":[134,171,250],"than":[135],"3.5MV/cm":[136],"were":[137,181,244,262],"obtained":[138,150],"all":[140],"studied.":[142],"Fundamental":[143],"insight":[144],"breakdown":[147],"processes":[148],"by":[151,193],"testing":[152],"a":[153,219],"wide":[154],"range":[156],"(3-20nm)":[157],"-layer,":[169],"where":[170],"Q":[177],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">BD</sub>":[180],"found":[182,255],"thinner":[185,199],"layers,":[186],"suggesting":[187,277],"less":[189],"damage":[190],"created":[192],"electrons":[194,223],"when":[195,211,221],"injecting":[196],"them":[197],"into":[198],"(fluence":[201],"driven":[202],"failure":[203],"mechanism).":[204],"A":[205],"difference":[206],"applying":[212],"different":[213,216],"polarities":[214],"suggests":[215],"mechanisms":[217],"playing":[218],"role":[220],"injected":[225],"from":[226,230],"interconnect":[228],"metal.":[233],"Finally,":[234],"field":[235,252],"simulations":[236],"at":[237,257],"critical":[238],"locations":[239],"structure":[243],"used":[245],"assess":[247],"places":[248],"enhancement.":[253],"We":[254],"these":[258],"places,":[259],"fields":[261],"still":[263],"lower":[264],"films,":[276],"scalability":[279],"intrinsically":[286],"reliable.":[287]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}