{"id":"https://openalex.org/W2561067186","doi":"https://doi.org/10.1109/iros.2016.7759763","title":"A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM","display_name":"A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2561067186","doi":"https://doi.org/10.1109/iros.2016.7759763","mag":"2561067186"},"language":"en","primary_location":{"id":"doi:10.1109/iros.2016.7759763","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2016.7759763","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5035482887","display_name":"Jialin Shi","orcid":"https://orcid.org/0000-0002-6853-619X"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jialin Shi","raw_affiliation_strings":["State Key Laboratory of Robotics, University of the Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics, University of the Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040326170","display_name":"Lianqing Liu","orcid":"https://orcid.org/0000-0002-2271-5870"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lianqing Liu","raw_affiliation_strings":["State Key Laboratory of Robotics, Chinese Academy of Sciences (CAS), Shenyang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics, Chinese Academy of Sciences (CAS), Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045778926","display_name":"Yu Peng","orcid":"https://orcid.org/0000-0003-4620-5522"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Yu","raw_affiliation_strings":["State Key Laboratory of Robotics, Chinese Academy of Sciences (CAS), Shenyang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics, Chinese Academy of Sciences (CAS), Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061118924","display_name":"Yang Cong","orcid":"https://orcid.org/0000-0002-8888-3746"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yang Cong","raw_affiliation_strings":["State Key Laboratory of Robotics, Chinese Academy of Sciences (CAS), Shenyang, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics, Chinese Academy of Sciences (CAS), Shenyang, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5035482887"],"corresponding_institution_ids":["https://openalex.org/I4210165038"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.13832442,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"5193","last_page":"5198"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/machining","display_name":"Machining","score":0.8876973390579224},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.8138877153396606},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.6800846457481384},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6453849077224731},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5462864637374878},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.4984724521636963},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.4965217709541321},{"id":"https://openalex.org/keywords/ultrasonic-machining","display_name":"Ultrasonic machining","score":0.448330283164978},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.4481455981731415},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.44369786977767944},{"id":"https://openalex.org/keywords/vibration-control","display_name":"Vibration control","score":0.421461820602417},{"id":"https://openalex.org/keywords/numerical-control","display_name":"Numerical control","score":0.41408994793891907},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.30778050422668457},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1768028438091278},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.114585280418396},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09234613180160522}],"concepts":[{"id":"https://openalex.org/C523214423","wikidata":"https://www.wikidata.org/wiki/Q192047","display_name":"Machining","level":2,"score":0.8876973390579224},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.8138877153396606},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.6800846457481384},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6453849077224731},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5462864637374878},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.4984724521636963},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.4965217709541321},{"id":"https://openalex.org/C2780330172","wikidata":"https://www.wikidata.org/wiki/Q2477827","display_name":"Ultrasonic machining","level":3,"score":0.448330283164978},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4481455981731415},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.44369786977767944},{"id":"https://openalex.org/C49240428","wikidata":"https://www.wikidata.org/wiki/Q3305953","display_name":"Vibration control","level":3,"score":0.421461820602417},{"id":"https://openalex.org/C175457265","wikidata":"https://www.wikidata.org/wiki/Q190247","display_name":"Numerical control","level":3,"score":0.41408994793891907},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.30778050422668457},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1768028438091278},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.114585280418396},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09234613180160522},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iros.2016.7759763","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2016.7759763","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1171904348","https://openalex.org/W1538975674","https://openalex.org/W1972089075","https://openalex.org/W1979365211","https://openalex.org/W2000753031","https://openalex.org/W2016636234","https://openalex.org/W2017649493","https://openalex.org/W2038845950","https://openalex.org/W2040504431","https://openalex.org/W2049673588","https://openalex.org/W2065943959","https://openalex.org/W2068865576","https://openalex.org/W2071702983","https://openalex.org/W2077357197","https://openalex.org/W2092909525","https://openalex.org/W2094857745","https://openalex.org/W2168793632","https://openalex.org/W2243501462","https://openalex.org/W2346633164","https://openalex.org/W6690326890"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2760996480","https://openalex.org/W2303727101","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2286084298","https://openalex.org/W1966104931","https://openalex.org/W3007587789","https://openalex.org/W2124593019","https://openalex.org/W2037397109"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposed":[2,45,106],"a":[3,37,53],"phase-closed-loop":[4,92],"nanomachining":[5],"control":[6,12,26,93],"method":[7,94,110],"to":[8,25,35],"realize":[9],"the":[10,27,44,47,60,80,89,101,105,113,116],"directly":[11],"of":[13,50,74,91,104,118],"machining":[14,28,32,36,57],"depth":[15,64],"based":[16],"on":[17,115],"ultrasonic":[18],"vibration-assisted":[19],"AFM.":[20],"By":[21],"using":[22,69],"applied":[23],"force":[24],"depth,":[29],"conventional":[30],"AFM":[31],"approaches":[33],"unable":[34],"nanostructure":[38],"with":[39,56,62],"specified":[40],"machined":[41,67],"depth.":[42,58],"With":[43],"method,":[46],"vibration":[48],"phase":[49,70],"micro-cantilever":[51],"has":[52],"specific":[54],"relationship":[55],"Therefore,":[59],"nano-grooves":[61],"desired":[63],"can":[65],"be":[66],"by":[68],"value":[71],"as":[72],"feedback":[73],"PID":[75],"control.":[76],"In":[77],"this":[78],"paper,":[79],"theoretical":[81],"analysis":[82],"and":[83,88,121],"simulation":[84],"are":[85,95],"carried":[86],"out,":[87],"experiments":[90],"conducted.":[96],"The":[97,108],"experimental":[98],"results":[99],"verify":[100],"primary":[102],"feasibility":[103],"method.":[107],"present":[109],"also":[111],"demonstrates":[112],"potential":[114],"fabrication":[117],"three-dimension":[119],"nanostructures":[120],"nanoelectronic":[122],"device.":[123]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}