{"id":"https://openalex.org/W2006054498","doi":"https://doi.org/10.1109/iros.2013.6696734","title":"Visual servoing-based approach for efficient autofocusing in scanning electron microscope","display_name":"Visual servoing-based approach for efficient autofocusing in scanning electron microscope","publication_year":2013,"publication_date":"2013-11-01","ids":{"openalex":"https://openalex.org/W2006054498","doi":"https://doi.org/10.1109/iros.2013.6696734","mag":"2006054498"},"language":"en","primary_location":{"id":"doi:10.1109/iros.2013.6696734","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2013.6696734","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011562571","display_name":"Naresh Marturi","orcid":"https://orcid.org/0000-0002-0159-167X"},"institutions":[{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Naresh Marturi","raw_affiliation_strings":["Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]},{"raw_affiliation_string":"Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011782479","display_name":"Brahim Tamadazte","orcid":"https://orcid.org/0000-0002-4668-3092"},"institutions":[{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Brahim Tamadazte","raw_affiliation_strings":["Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]},{"raw_affiliation_string":"Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058495477","display_name":"Sounkalo Demb\u00e9l\u00e9","orcid":"https://orcid.org/0000-0001-9982-0663"},"institutions":[{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Sounkalo Dembele","raw_affiliation_strings":["Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]},{"raw_affiliation_string":"Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110670394","display_name":"Nadine Piat","orcid":null},"institutions":[{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Nadine Piat","raw_affiliation_strings":["Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic control and Micro Mechatronic Systems (AS 2M) department, Institute FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]},{"raw_affiliation_string":"Autom. control & Micro Mechatron. Syst. (AS2M) Dept., Inst. FEMTO-ST, Besancon, France","institution_ids":["https://openalex.org/I2802759292"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I2802759292"],"apc_list":null,"apc_paid":null,"fwci":4.3593,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.95533209,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11897","display_name":"Digital Holography and Microscopy","score":0.989799976348877,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10531","display_name":"Advanced Vision and Imaging","score":0.9894999861717224,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/visual-servoing","display_name":"Visual servoing","score":0.7692736387252808},{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.7692538499832153},{"id":"https://openalex.org/keywords/focus","display_name":"Focus (optics)","score":0.7478713989257812},{"id":"https://openalex.org/keywords/autofocus","display_name":"Autofocus","score":0.7003911137580872},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6913959980010986},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6522136926651001},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.6148247718811035},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.3175833225250244},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.25117963552474976},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.06868624687194824}],"concepts":[{"id":"https://openalex.org/C10912380","wikidata":"https://www.wikidata.org/wiki/Q527952","display_name":"Visual servoing","level":3,"score":0.7692736387252808},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.7692538499832153},{"id":"https://openalex.org/C192209626","wikidata":"https://www.wikidata.org/wiki/Q190909","display_name":"Focus (optics)","level":2,"score":0.7478713989257812},{"id":"https://openalex.org/C103764139","wikidata":"https://www.wikidata.org/wiki/Q210008","display_name":"Autofocus","level":3,"score":0.7003911137580872},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6913959980010986},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6522136926651001},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.6148247718811035},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.3175833225250244},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.25117963552474976},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06868624687194824},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iros.2013.6696734","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2013.6696734","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","score":0.7699999809265137,"display_name":"Peace, Justice and strong institutions"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2004568838","https://openalex.org/W2034757622","https://openalex.org/W2082991751","https://openalex.org/W2092663246","https://openalex.org/W2121174176","https://openalex.org/W2143357402","https://openalex.org/W2143950495","https://openalex.org/W2155395565","https://openalex.org/W2161077353","https://openalex.org/W2166117551","https://openalex.org/W2552885458","https://openalex.org/W4249736943"],"related_works":["https://openalex.org/W2059320410","https://openalex.org/W2067469524","https://openalex.org/W2007850256","https://openalex.org/W2099513764","https://openalex.org/W2293735384","https://openalex.org/W2349849942","https://openalex.org/W2075738584","https://openalex.org/W3094590434","https://openalex.org/W2079188893","https://openalex.org/W2367442185"],"abstract_inverted_index":{"Fast":[0],"and":[1,69,123],"reliable":[2],"autofocusing":[3,25,73,116],"methods":[4],"are":[5,42],"essential":[6],"for":[7],"performing":[8],"automatic":[9],"nano-objects":[10],"positioning":[11],"tasks":[12],"using":[13,90,100],"a":[14,31,66,101],"scanning":[15],"electron":[16],"microscope":[17],"(SEM).":[18],"So":[19],"far":[20],"in":[21,118],"the":[22,36,49,53,79,87,111,114],"literature,":[23],"various":[24],"algorithms":[26],"have":[27],"been":[28,75],"proposed":[29,115],"utilizing":[30],"sharpness":[32,50,104],"measure":[33],"to":[34,58,85],"compute":[35],"best":[37],"focus.":[38],"Most":[39],"of":[40,56,72,81,113,120],"them":[41],"based":[43,77],"on":[44,78],"iterative":[45],"search":[46],"approaches;":[47],"applying":[48],"function":[51],"over":[52],"total":[54],"range":[55],"focus":[57,88],"find":[59],"an":[60,91],"image":[61],"in-focus.":[62],"In":[63],"this":[64],"paper,":[65],"new,":[67],"fast":[68],"direct":[70],"method":[71,117],"has":[74],"presented":[76],"idea":[80],"traditional":[82],"visual":[83,95],"servoing":[84],"control":[86,96],"step":[89],"adaptive":[92],"gain.":[93],"The":[94,106],"law":[97],"is":[98],"validated":[99],"normalized":[102],"variance":[103],"function.":[105],"obtained":[107],"experimental":[108],"results":[109],"demonstrate":[110],"performance":[112],"terms":[119],"accuracy,":[121],"speed":[122],"robustness.":[124]},"counts_by_year":[{"year":2024,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}