{"id":"https://openalex.org/W2034513697","doi":"https://doi.org/10.1109/iros.2010.5650553","title":"Modelling of a MEMS-based microgripper: application to dexterous micromanipulation","display_name":"Modelling of a MEMS-based microgripper: application to dexterous micromanipulation","publication_year":2010,"publication_date":"2010-10-01","ids":{"openalex":"https://openalex.org/W2034513697","doi":"https://doi.org/10.1109/iros.2010.5650553","mag":"2034513697"},"language":"en","primary_location":{"id":"doi:10.1109/iros.2010.5650553","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2010.5650553","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022642519","display_name":"Mokrane Boudaoud","orcid":"https://orcid.org/0000-0002-5679-0617"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I90843659","display_name":"Universit\u00e9 de Franche-Comt\u00e9","ror":"https://ror.org/03pcc9z86","country_code":"FR","type":"education","lineage":["https://openalex.org/I90843659"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M Boudaoud","raw_affiliation_strings":["Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, UFC-ENSMM-UTBM-CNRS, University of Franche-Comt\u00e9, Besancon, France","[Automatic Control and Micro Mechatronic Systems Department, FEMTO-ST Institute, UFC, ENSMM, UTBM, CNRS, University of Franche-Comt\u00e9, Besancon, France]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, UFC-ENSMM-UTBM-CNRS, University of Franche-Comt\u00e9, Besancon, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I90843659"]},{"raw_affiliation_string":"[Automatic Control and Micro Mechatronic Systems Department, FEMTO-ST Institute, UFC, ENSMM, UTBM, CNRS, University of Franche-Comt\u00e9, Besancon, France]","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I90843659"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018599664","display_name":"Yassine Haddab","orcid":"https://orcid.org/0000-0001-7931-2645"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I90843659","display_name":"Universit\u00e9 de Franche-Comt\u00e9","ror":"https://ror.org/03pcc9z86","country_code":"FR","type":"education","lineage":["https://openalex.org/I90843659"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Y Haddab","raw_affiliation_strings":["Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, UFC-ENSMM-UTBM-CNRS, University of Franche-Comt\u00e9, Besancon, France","[Automatic Control and Micro Mechatronic Systems Department, FEMTO-ST Institute, UFC, ENSMM, UTBM, CNRS, University of Franche-Comt\u00e9, Besancon, France]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, UFC-ENSMM-UTBM-CNRS, University of Franche-Comt\u00e9, Besancon, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I90843659"]},{"raw_affiliation_string":"[Automatic Control and Micro Mechatronic Systems Department, FEMTO-ST Institute, UFC, ENSMM, UTBM, CNRS, University of Franche-Comt\u00e9, Besancon, France]","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I90843659"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081513986","display_name":"Yann Le Gorrec","orcid":"https://orcid.org/0000-0001-6935-1915"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I90843659","display_name":"Universit\u00e9 de Franche-Comt\u00e9","ror":"https://ror.org/03pcc9z86","country_code":"FR","type":"education","lineage":["https://openalex.org/I90843659"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Y Le Gorrec","raw_affiliation_strings":["Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, UFC-ENSMM-UTBM-CNRS, University of Franche-Comt\u00e9, Besancon, France","[Automatic Control and Micro Mechatronic Systems Department, FEMTO-ST Institute, UFC, ENSMM, UTBM, CNRS, University of Franche-Comt\u00e9, Besancon, France]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, UFC-ENSMM-UTBM-CNRS, University of Franche-Comt\u00e9, Besancon, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699","https://openalex.org/I90843659"]},{"raw_affiliation_string":"[Automatic Control and Micro Mechatronic Systems Department, FEMTO-ST Institute, UFC, ENSMM, UTBM, CNRS, University of Franche-Comt\u00e9, Besancon, France]","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I90843659"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":9.3463,"has_fulltext":false,"cited_by_count":23,"citation_normalized_percentile":{"value":0.98175658,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"5634","last_page":"5639"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/grippers","display_name":"Grippers","score":0.783748209476471},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7810285091400146},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.542282223701477},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.5361502170562744},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5181525945663452},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.47761648893356323},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.41074568033218384},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3812798857688904},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3600512146949768},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.21186763048171997},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1906561553478241},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.10347104072570801},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08094587922096252}],"concepts":[{"id":"https://openalex.org/C2775960376","wikidata":"https://www.wikidata.org/wiki/Q1435859","display_name":"Grippers","level":2,"score":0.783748209476471},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7810285091400146},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.542282223701477},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.5361502170562744},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5181525945663452},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.47761648893356323},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.41074568033218384},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3812798857688904},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3600512146949768},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.21186763048171997},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1906561553478241},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.10347104072570801},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08094587922096252},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iros.2010.5650553","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2010.5650553","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.41999998688697815,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W2010607480","https://openalex.org/W2039524202","https://openalex.org/W2043267873","https://openalex.org/W2048298714","https://openalex.org/W2069401367","https://openalex.org/W2105015109","https://openalex.org/W2105161487","https://openalex.org/W2112274618","https://openalex.org/W2133326679","https://openalex.org/W2156746603","https://openalex.org/W2157350792","https://openalex.org/W2157533783","https://openalex.org/W3175200532","https://openalex.org/W6676917501"],"related_works":["https://openalex.org/W2258669850","https://openalex.org/W1513401665","https://openalex.org/W4283263216","https://openalex.org/W3160851599","https://openalex.org/W2808090143","https://openalex.org/W2527333706","https://openalex.org/W2078285315","https://openalex.org/W2272290532","https://openalex.org/W3124536754","https://openalex.org/W4312233243"],"abstract_inverted_index":{"MEMS-based":[0,95],"microgrippers":[1],"with":[2,85,97,158],"integrated":[3,98],"force":[4,22,99],"sensor":[5,100],"have":[6],"proved":[7],"their":[8],"efficiency":[9],"to":[10,70,115],"perform":[11],"dexterous":[12],"micromanipulation":[13],"tasks":[14],"through":[15,129],"gripping":[16,153],"forces":[17],"sensing":[18,124],"and":[19,30,66,123,155],"control.":[20,170],"For":[21,77],"control,":[23],"knowledge":[24,137],"based":[25,138],"models":[26],"are":[27,163],"more":[28],"relevant":[29],"gives":[31],"better":[32],"physical":[33],"significance":[34],"than":[35],"the":[36,54,74,118,121,127,130,133,146,149,169],"use":[37],"of":[38,93,105,120,126,132,148],"black":[39],"box":[40],"models.":[41],"However":[42],"this":[43],"approach":[44,92],"is":[45,113,140,156],"often":[46],"limited":[47],"by":[48],"many":[49],"problems":[50],"commonly":[51],"encountered":[52],"in":[53],"MEMS":[55],"(micro":[56],"electromechanical":[57],"systems)":[58],"structures":[59],"such":[60],"as:":[61],"complex":[62],"architectures,":[63],"nonlinear":[64],"behaviors":[65],"parameters":[67],"uncertainties":[68],"due":[69],"fabrication":[71],"process":[72],"at":[73,145],"micrometer":[75],"scale.":[76],"these":[78],"reasons":[79],"theoretical":[80],"approaches":[81],"must":[82],"be":[83],"compared":[84,157],"experiments.":[86],"This":[87],"paper":[88],"describes":[89],"a":[90,94,109],"modelling":[91],"microgripper":[96],"while":[101],"handling":[102],"micro-glass":[103],"balls":[104],"80\u03bcm":[106],"diameter.":[107],"Therefore,":[108],"state":[110],"space":[111],"representation":[112],"developed":[114],"couple":[116],"both":[117],"dynamics":[119],"actuation":[122],"subsystems":[125],"gripper":[128,150],"stiffness":[131],"manipulated":[134],"object.":[135],"A":[136],"model":[139],"obtained":[141],"for":[142,168],"small":[143],"displacements":[144],"tip":[147],"arms":[151],"(small":[152],"forces)":[154],"experimental":[159],"approaches.":[160],"Good":[161],"agreements":[162],"observed":[164],"allowing":[165],"interesting":[166],"perspectives":[167]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2017,"cited_by_count":5},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}