{"id":"https://openalex.org/W2108155295","doi":"https://doi.org/10.1109/iros.2009.5353921","title":"Motion controller for the Atomic Force Microscopy based nanomanipulation system","display_name":"Motion controller for the Atomic Force Microscopy based nanomanipulation system","publication_year":2009,"publication_date":"2009-10-01","ids":{"openalex":"https://openalex.org/W2108155295","doi":"https://doi.org/10.1109/iros.2009.5353921","mag":"2108155295"},"language":"en","primary_location":{"id":"doi:10.1109/iros.2009.5353921","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2009.5353921","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041747112","display_name":"Ruiguo Yang","orcid":"https://orcid.org/0000-0002-1361-4277"},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ruiguo Yang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA","institution_ids":["https://openalex.org/I87216513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023212284","display_name":"Ning Xi","orcid":"https://orcid.org/0000-0001-8276-5696"},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ning Xi","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA","institution_ids":["https://openalex.org/I87216513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015332770","display_name":"King Wai Chiu Lai","orcid":"https://orcid.org/0000-0001-5002-2273"},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"King Wai Chiu Lai","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA","institution_ids":["https://openalex.org/I87216513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091704948","display_name":"Bingtuan Gao","orcid":"https://orcid.org/0000-0001-6933-0743"},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bingtuan Gao","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA","institution_ids":["https://openalex.org/I87216513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101653377","display_name":"Hongzhi Chen","orcid":"https://orcid.org/0000-0003-3492-1177"},"institutions":[{"id":"https://openalex.org/I87216513","display_name":"Michigan State University","ror":"https://ror.org/05hs6h993","country_code":"US","type":"education","lineage":["https://openalex.org/I87216513"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hongzhi Chen","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA","institution_ids":["https://openalex.org/I87216513"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI. 48823, USA","institution_ids":["https://openalex.org/I87216513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082044965","display_name":"Chanmin Su","orcid":"https://orcid.org/0000-0001-9086-3747"},"institutions":[{"id":"https://openalex.org/I864088423","display_name":"Veeco (United States)","ror":"https://ror.org/055c6bd74","country_code":"US","type":"company","lineage":["https://openalex.org/I864088423"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Chanmin Su","raw_affiliation_strings":["Veeco Instruments, Inc., Santa Barbara, CA, USA","Veeco Instruments Inc. Santa Barbara, CA 93117 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Veeco Instruments, Inc., Santa Barbara, CA, USA","institution_ids":["https://openalex.org/I864088423"]},{"raw_affiliation_string":"Veeco Instruments Inc. Santa Barbara, CA 93117 USA","institution_ids":["https://openalex.org/I864088423"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102730403","display_name":"Jian Shi","orcid":"https://orcid.org/0009-0009-7134-4496"},"institutions":[{"id":"https://openalex.org/I864088423","display_name":"Veeco (United States)","ror":"https://ror.org/055c6bd74","country_code":"US","type":"company","lineage":["https://openalex.org/I864088423"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jian Shi","raw_affiliation_strings":["Veeco Instruments, Inc., Santa Barbara, CA, USA","Veeco Instruments Inc. Santa Barbara, CA 93117 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Veeco Instruments, Inc., Santa Barbara, CA, USA","institution_ids":["https://openalex.org/I864088423"]},{"raw_affiliation_string":"Veeco Instruments Inc. Santa Barbara, CA 93117 USA","institution_ids":["https://openalex.org/I864088423"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"9","issue":null,"first_page":"1339","last_page":"1344"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9952999949455261,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11601","display_name":"Neuroscience and Neural Engineering","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/2804","display_name":"Cellular and Molecular Neuroscience"},"field":{"id":"https://openalex.org/fields/28","display_name":"Neuroscience"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.7376065254211426},{"id":"https://openalex.org/keywords/haptic-technology","display_name":"Haptic technology","score":0.7153102159500122},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.6275725960731506},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.595209002494812},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.522540271282196},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.5198443531990051},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.4835960268974304},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.4509985148906708},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.31335246562957764},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.24920609593391418},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.24255570769309998},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22120442986488342},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.20228788256645203},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.13698327541351318},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.11035266518592834}],"concepts":[{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.7376065254211426},{"id":"https://openalex.org/C152086174","wikidata":"https://www.wikidata.org/wiki/Q3030571","display_name":"Haptic technology","level":2,"score":0.7153102159500122},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.6275725960731506},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.595209002494812},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.522540271282196},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5198443531990051},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.4835960268974304},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.4509985148906708},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.31335246562957764},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.24920609593391418},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.24255570769309998},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22120442986488342},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.20228788256645203},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.13698327541351318},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.11035266518592834},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iros.2009.5353921","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2009.5353921","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:hub.hku.hk:10722/213092","is_oa":false,"landing_page_url":"http://hdl.handle.net/10722/213092","pdf_url":null,"source":{"id":"https://openalex.org/S4377196271","display_name":"The HKU Scholars Hub (University of Hong Kong)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I889458895","host_organization_name":"University of Hong Kong","host_organization_lineage":["https://openalex.org/I889458895"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference_Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.7799999713897705,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W2095402492","https://openalex.org/W2100281874","https://openalex.org/W2104119761","https://openalex.org/W2108370104","https://openalex.org/W2110900933","https://openalex.org/W2113774671","https://openalex.org/W2123033640","https://openalex.org/W2127916986","https://openalex.org/W2134665492","https://openalex.org/W2138677095","https://openalex.org/W2151735129","https://openalex.org/W6674922589","https://openalex.org/W6678202887","https://openalex.org/W6678847834"],"related_works":["https://openalex.org/W156716224","https://openalex.org/W2111871955","https://openalex.org/W1524640612","https://openalex.org/W3175380930","https://openalex.org/W1989694608","https://openalex.org/W2139876914","https://openalex.org/W1986738380","https://openalex.org/W2642061445","https://openalex.org/W4233260495","https://openalex.org/W3094485622"],"abstract_inverted_index":{"Nanomanipulation":[0],"with":[1,68,79],"Atomic":[2],"force":[3],"microscopy":[4],"(AFM)":[5],"is":[6,49,91],"one":[7],"of":[8,16,31,57,103],"the":[9,17,24,32,55,58,65,69,101,104],"fundamental":[10],"tools":[11],"for":[12,100],"nano-manufacturing.":[13],"The":[14,47],"control":[15,33,41,56],"nanomanipulation":[18,61],"system":[19,78,90],"requires":[20],"accurate":[21],"feedback":[22],"from":[23],"piezoelectric":[25],"actuator":[26],"and":[27,37,97],"high":[28,80],"frequency":[29],"response":[30,81],"system.":[34,62],"We":[35],"designed":[36],"implemented":[38],"two":[39],"distinct":[40],"schemes":[42],"by":[43],"using":[44],"real-time":[45,72],"Linux.":[46],"aim":[48],"to":[50,93],"study":[51],"various":[52],"factors":[53],"in":[54],"AFM":[59],"based":[60],"By":[63],"integrating":[64],"original":[66],"controller":[67],"external":[70],"Linux":[71],"controller,":[73],"we":[74],"achieved":[75],"a":[76,108],"stable":[77],"frequency.":[82],"Finally":[83],"this":[84],"multiple":[85],"input":[86],"single":[87],"output":[88],"(MISO)":[89],"validated":[92],"be":[94],"an":[95],"effective":[96],"efficient":[98],"tool":[99],"controlling":[102],"nanolithography":[105],"operation":[106],"through":[107],"haptic":[109],"device.":[110]},"counts_by_year":[{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}