{"id":"https://openalex.org/W1970516031","doi":"https://doi.org/10.1109/iros.2005.1545139","title":"Single nanotube array based nano encoders","display_name":"Single nanotube array based nano encoders","publication_year":2005,"publication_date":"2005-01-01","ids":{"openalex":"https://openalex.org/W1970516031","doi":"https://doi.org/10.1109/iros.2005.1545139","mag":"1970516031"},"language":"en","primary_location":{"id":"doi:10.1109/iros.2005.1545139","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2005.1545139","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2005 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100718940","display_name":"Lixin Dong","orcid":"https://orcid.org/0000-0002-8816-4944"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Lixin Dong","raw_affiliation_strings":["Institute of Robotics and Intelligent Systems, ETH-Swiss Federal Institute of Technology, Z\u00fcrich, Zurich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Robotics and Intelligent Systems, ETH-Swiss Federal Institute of Technology, Z\u00fcrich, Zurich, Switzerland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035308944","display_name":"Arunkumar Subramanian","orcid":"https://orcid.org/0000-0001-8779-391X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Subramanian","raw_affiliation_strings":["Institute of Robotics and Intelligent Systems, ETH-Swiss Federal Institute of Technology, Z\u00fcrich, Zurich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Robotics and Intelligent Systems, ETH-Swiss Federal Institute of Technology, Z\u00fcrich, Zurich, Switzerland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006427311","display_name":"Bradley J. Nelson","orcid":"https://orcid.org/0000-0001-9070-6987"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B.J. Nelson","raw_affiliation_strings":["Institute of Robotics and Intelligent Systems, ETH-Swiss Federal Institute of Technology, Z\u00fcrich, Zurich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Robotics and Intelligent Systems, ETH-Swiss Federal Institute of Technology, Z\u00fcrich, Zurich, Switzerland","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077878309","display_name":"Yu Sun","orcid":"https://orcid.org/0000-0001-7895-0741"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Yu Sun","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, Canada","institution_ids":["https://openalex.org/I185261750"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16166924,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"270","issue":null,"first_page":"3598","last_page":"3603"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7802802920341492},{"id":"https://openalex.org/keywords/carbon-nanotube","display_name":"Carbon nanotube","score":0.6723951101303101},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.6296994686126709},{"id":"https://openalex.org/keywords/anode","display_name":"Anode","score":0.5629115104675293},{"id":"https://openalex.org/keywords/nanotube","display_name":"Nanotube","score":0.5229954719543457},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"Electron-beam lithography","score":0.5139965415000916},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.49377521872520447},{"id":"https://openalex.org/keywords/field-electron-emission","display_name":"Field electron emission","score":0.49300381541252136},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4895980954170227},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.468558132648468},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4458598494529724},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4366079568862915},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.4296228587627411},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.4283546209335327},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.21487879753112793},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.20233911275863647},{"id":"https://openalex.org/keywords/electron","display_name":"Electron","score":0.16130077838897705},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.1266816258430481},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1032668948173523},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.10317257046699524},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.09052518010139465}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7802802920341492},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.6723951101303101},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.6296994686126709},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.5629115104675293},{"id":"https://openalex.org/C2777619693","wikidata":"https://www.wikidata.org/wiki/Q539430","display_name":"Nanotube","level":3,"score":0.5229954719543457},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.5139965415000916},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.49377521872520447},{"id":"https://openalex.org/C121029787","wikidata":"https://www.wikidata.org/wiki/Q902877","display_name":"Field electron emission","level":3,"score":0.49300381541252136},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4895980954170227},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.468558132648468},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4458598494529724},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4366079568862915},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.4296228587627411},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.4283546209335327},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.21487879753112793},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.20233911275863647},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.16130077838897705},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.1266816258430481},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1032668948173523},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.10317257046699524},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.09052518010139465},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iros.2005.1545139","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iros.2005.1545139","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2005 IEEE/RSJ International Conference on Intelligent Robots and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W653382042","https://openalex.org/W1984869574","https://openalex.org/W2000509806","https://openalex.org/W2008547575","https://openalex.org/W2009508114","https://openalex.org/W2020743979","https://openalex.org/W2027501778","https://openalex.org/W2052048763","https://openalex.org/W2090921551","https://openalex.org/W2098197893","https://openalex.org/W2110167104","https://openalex.org/W2161606023","https://openalex.org/W2168038317","https://openalex.org/W2533702251","https://openalex.org/W3150248096","https://openalex.org/W4298444622","https://openalex.org/W6674865304","https://openalex.org/W6684561100"],"related_works":["https://openalex.org/W2007767700","https://openalex.org/W2035221585","https://openalex.org/W3012007250","https://openalex.org/W2166935850","https://openalex.org/W2039969115","https://openalex.org/W806091262","https://openalex.org/W2044824382","https://openalex.org/W1971644457","https://openalex.org/W2044100285","https://openalex.org/W1981823593"],"abstract_inverted_index":{"Linear":[0],"encoders":[1],"for":[2],"nanoscale":[3],"position":[4,129,141],"sensing":[5],"based":[6],"on":[7,52],"single":[8,17,119],"carbon":[9,19],"nanotube":[10,71],"(CNT)":[11],"arrays":[12,72],"are":[13,22,83,91],"presented.":[14],"Vertically":[15],"aligned":[16],"multi-walled":[18],"nanotubes":[20],"(MWNTs)":[21],"realized":[23],"using":[24],"a":[25,53,94,101,110,122],"combination":[26],"of":[27,58,64,88,142,154],"e-beam":[28],"lithography":[29,39],"and":[30,62,117,161],"plasma-enhanced":[31],"chemical":[32],"vapour":[33],"deposition":[34],"(PECVD)":[35],"growth.":[36],"Electron":[37],"beam":[38],"is":[40,125,130,146],"used":[41],"to":[42,79],"define":[43],"50-150":[44],"nm":[45,78,156,163],"nickel":[46],"catalyst":[47],"dots":[48],"at":[49],"precise":[50],"locations":[51],"silicon":[54],"chip.":[55],"Precise":[56],"control":[57],"the":[59,65,89,118,133,139,143,149,158,168],"position,":[60],"density":[61],"alignment":[63],"tubes":[66],"has":[67,171],"been":[68,172],"achieved.":[69,173],"Aligned":[70],"with":[73,100,105],"spacing":[74],"varying":[75],"from":[76,148],"250":[77],"25":[80],"/spl":[81],"mu/m":[82],"realized.":[84],"Field":[85],"emission":[86,136,150],"properties":[87],"array":[90],"investigated":[92,126],"inside":[93],"scanning":[95,111,115,144],"electron":[96],"microscope":[97],"(SEM)":[98],"equipped":[99],"3-DOF":[102],"nanorobotic":[103],"manipulator":[104],"nanometer":[106],"resolution":[107,153],"functioning":[108],"as":[109],"anode.":[112],"With":[113],"this":[114],"anode":[116,145],"MWNT":[120],"array,":[121],"nano":[123],"encoder":[124],"experimentally.":[127],"Vertical":[128],"detected":[131],"by":[132],"change":[134],"in":[135,157,167],"current,":[137],"whereas":[138],"horizontal":[140],"sensed":[147],"distribution.":[151],"A":[152],"98.3":[155],"vertical":[159],"direction":[160,170],"38.0":[162],"(best:":[164],"12.9":[165],"nm)":[166],"lateral":[169]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}