{"id":"https://openalex.org/W2759550515","doi":"https://doi.org/10.1109/iolts.2017.8046170","title":"Automating wafer-level test of uncooled infrared detectors using wafer-prober","display_name":"Automating wafer-level test of uncooled infrared detectors using wafer-prober","publication_year":2017,"publication_date":"2017-07-01","ids":{"openalex":"https://openalex.org/W2759550515","doi":"https://doi.org/10.1109/iolts.2017.8046170","mag":"2759550515"},"language":"en","primary_location":{"id":"doi:10.1109/iolts.2017.8046170","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iolts.2017.8046170","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 23rd International Symposium on On-Line Testing and Robust System Design (IOLTS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024777090","display_name":"M. Makhlouf","orcid":"https://orcid.org/0000-0002-2658-2913"},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Makhlouf","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031756656","display_name":"D. Goller","orcid":null},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D. Goller","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010445236","display_name":"Lutz Gendrisch","orcid":null},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"L. Gendrisch","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047139413","display_name":"S. Kolnsberg","orcid":null},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Kolnsberg","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071478136","display_name":"F. Vogt","orcid":null},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"F. Vogt","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072190231","display_name":"Alexander Utz","orcid":"https://orcid.org/0000-0002-1274-4563"},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Utz","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075170843","display_name":"Dirk Weiler","orcid":null},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D. Weiler","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032788526","display_name":"H. Vogt","orcid":"https://orcid.org/0000-0001-8006-8598"},"institutions":[{"id":"https://openalex.org/I4210100127","display_name":"Fraunhofer Institute for Microelectronic Circuits and Systems","ror":"https://ror.org/01243c877","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210100127","https://openalex.org/I4923324"]},{"id":"https://openalex.org/I62318514","display_name":"University of Duisburg-Essen","ror":"https://ror.org/04mz5ra38","country_code":"DE","type":"education","lineage":["https://openalex.org/I62318514"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Vogt","raw_affiliation_strings":["Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","Elektronische Bauelemente und Schaltungen (EBS), Faculty University Duisburg-Essen"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstra\u00dfe 61, 47057 Duisburg - Germany","institution_ids":["https://openalex.org/I4210100127"]},{"raw_affiliation_string":"Elektronische Bauelemente und Schaltungen (EBS), Faculty University Duisburg-Essen","institution_ids":["https://openalex.org/I62318514"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":6.5237,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.97288944,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"13","last_page":"16"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12389","display_name":"Infrared Target Detection Methodologies","score":0.9944000244140625,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12389","display_name":"Infrared Target Detection Methodologies","score":0.9944000244140625,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11992","display_name":"CCD and CMOS Imaging Sensors","score":0.9939000010490417,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9883000254631042,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microbolometer","display_name":"Microbolometer","score":0.8799504041671753},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.8440628051757812},{"id":"https://openalex.org/keywords/responsivity","display_name":"Responsivity","score":0.7211736440658569},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.611209511756897},{"id":"https://openalex.org/keywords/infrared","display_name":"Infrared","score":0.5871841311454773},{"id":"https://openalex.org/keywords/dot-pitch","display_name":"Dot pitch","score":0.5729232430458069},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5607662200927734},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.448306679725647},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4185999035835266},{"id":"https://openalex.org/keywords/wafer-testing","display_name":"Wafer testing","score":0.41821929812431335},{"id":"https://openalex.org/keywords/pixel","display_name":"Pixel","score":0.41298067569732666},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4060212969779968},{"id":"https://openalex.org/keywords/bolometer","display_name":"Bolometer","score":0.3006006181240082},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2390640377998352},{"id":"https://openalex.org/keywords/photodetector","display_name":"Photodetector","score":0.16978144645690918}],"concepts":[{"id":"https://openalex.org/C2776111576","wikidata":"https://www.wikidata.org/wiki/Q495462","display_name":"Microbolometer","level":4,"score":0.8799504041671753},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8440628051757812},{"id":"https://openalex.org/C178889773","wikidata":"https://www.wikidata.org/wiki/Q7316011","display_name":"Responsivity","level":3,"score":0.7211736440658569},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.611209511756897},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.5871841311454773},{"id":"https://openalex.org/C179813606","wikidata":"https://www.wikidata.org/wiki/Q2032861","display_name":"Dot pitch","level":3,"score":0.5729232430458069},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5607662200927734},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.448306679725647},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4185999035835266},{"id":"https://openalex.org/C44445679","wikidata":"https://www.wikidata.org/wiki/Q2538844","display_name":"Wafer testing","level":3,"score":0.41821929812431335},{"id":"https://openalex.org/C160633673","wikidata":"https://www.wikidata.org/wiki/Q355198","display_name":"Pixel","level":2,"score":0.41298067569732666},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4060212969779968},{"id":"https://openalex.org/C21028948","wikidata":"https://www.wikidata.org/wiki/Q852212","display_name":"Bolometer","level":3,"score":0.3006006181240082},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2390640377998352},{"id":"https://openalex.org/C23125352","wikidata":"https://www.wikidata.org/wiki/Q210765","display_name":"Photodetector","level":2,"score":0.16978144645690918}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iolts.2017.8046170","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iolts.2017.8046170","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE 23rd International Symposium on On-Line Testing and Robust System Design (IOLTS)","raw_type":"proceedings-article"},{"id":"pmh:oai:publica.fraunhofer.de:publica/397875","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/397875","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6299999952316284}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2092307796","https://openalex.org/W3173022071","https://openalex.org/W7039750947"],"related_works":["https://openalex.org/W2463152212","https://openalex.org/W2048831694","https://openalex.org/W2069825465","https://openalex.org/W2354849850","https://openalex.org/W1975679687","https://openalex.org/W2030738448","https://openalex.org/W2568283761","https://openalex.org/W2386050120","https://openalex.org/W2438759716","https://openalex.org/W2019237182"],"abstract_inverted_index":{"Fraunhofer":[0],"IMS":[1],"develops":[2],"and":[3,79,136,164],"fabricates":[4],"far-infrared":[5,138],"focal":[6],"plane":[7],"arrays":[8],"(IRFPA)":[9],"using":[10,119],"microbolometers":[11,32],"with":[12],"a":[13,23,36,41,57,66,80,93,114,120,127,133],"pixel":[14],"pitch":[15],"of":[16,22,103,126,132,151,167],"17\u03bcm":[17],"technology":[18],"realized":[19,49],"on":[20,113],"top":[21],"0.35":[24],"\u03bcm":[25],"CMOS":[26],"readout":[27],"integrated":[28],"circuit":[29],"(ROIC).":[30],"The":[31,46],"are":[33],"encapsulated":[34],"by":[35,50,92,118],"Chip-Scale-Package":[37],"(CSP)":[38],"to":[39,73,98],"ensure":[40],"high":[42],"quality":[43],"vacuum":[44],"level.":[45],"CSP":[47],"is":[48,70],"placing":[51],"an":[52],"infrared":[53,82,100],"transparent":[54,101],"lid":[55],"above":[56],"solder":[58],"frame":[59],"surrounding":[60],"the":[61,89,99,104,123,129,137,142,146,165,168],"microbolometer":[62],"array.":[63],"To":[64],"concept":[65],"wafer-level":[67,107],"test":[68,108,121,134],"it":[69],"very":[71],"challenging":[72],"implement":[74],"highly":[75],"accurate":[76],"electrical":[77,130],"stimuli":[78,131],"far":[81],"radiation":[83,139],"source":[84],"(black":[85],"body)":[86],"while":[87],"affecting":[88],"wafer-prober":[90],"handling":[91,125],"non-flat":[94],"wafer":[95,124],"surface,":[96],"due":[97],"lids":[102],"CSP.":[105],"Accordingly,":[106],"has":[109],"been":[110],"developed":[111],"based":[112],"PC":[115],"which":[116],"controls,":[117],"program,":[122],"prober,":[128],"hardware,":[135],"such":[140],"as":[141],"optical":[143],"stimuli.":[144],"Thus,":[145],"most":[147],"important":[148],"electro-optical":[149],"parameters":[150],"IRFPAs":[152],"will":[153],"be":[154],"measured":[155],"at":[156],"wafer-level:":[157],"Noise":[158],"Equivalent":[159],"Temperature":[160],"Difference":[161],"(NETD),":[162],"responsivity,":[163],"percentage":[166],"defective":[169],"pixels.":[170]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}