{"id":"https://openalex.org/W2787522418","doi":"https://doi.org/10.1109/intellect.2017.8277644","title":"Design and analysis of CMOS MEMS based single proof mass Tri-axial capacitive accelerometer with readout integrated circuit","display_name":"Design and analysis of CMOS MEMS based single proof mass Tri-axial capacitive accelerometer with readout integrated circuit","publication_year":2017,"publication_date":"2017-11-01","ids":{"openalex":"https://openalex.org/W2787522418","doi":"https://doi.org/10.1109/intellect.2017.8277644","mag":"2787522418"},"language":"en","primary_location":{"id":"doi:10.1109/intellect.2017.8277644","is_oa":false,"landing_page_url":"https://doi.org/10.1109/intellect.2017.8277644","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 First International Conference on Latest trends in Electrical Engineering and Computing Technologies (INTELLECT)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103219669","display_name":"Muhammad Shahbaz","orcid":"https://orcid.org/0000-0001-6493-226X"},"institutions":[{"id":"https://openalex.org/I103583917","display_name":"Karachi Institute of Economics and Technology","ror":"https://ror.org/02sdmkj94","country_code":"PK","type":"education","lineage":["https://openalex.org/I103583917"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"Muhammad Aaquib Shahbaz","raw_affiliation_strings":["College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan","institution_ids":["https://openalex.org/I103583917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062799718","display_name":"Zain Hussain Warsi","orcid":null},"institutions":[{"id":"https://openalex.org/I103583917","display_name":"Karachi Institute of Economics and Technology","ror":"https://ror.org/02sdmkj94","country_code":"PK","type":"education","lineage":["https://openalex.org/I103583917"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"Zain Hussain Warsi","raw_affiliation_strings":["College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan","institution_ids":["https://openalex.org/I103583917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051781738","display_name":"Shahzadi Mahaa Irshad","orcid":null},"institutions":[{"id":"https://openalex.org/I103583917","display_name":"Karachi Institute of Economics and Technology","ror":"https://ror.org/02sdmkj94","country_code":"PK","type":"education","lineage":["https://openalex.org/I103583917"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"Shahzadi Mahaa Irshad","raw_affiliation_strings":["College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan","institution_ids":["https://openalex.org/I103583917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063716113","display_name":"Shahzada Tahaa Irshad","orcid":null},"institutions":[{"id":"https://openalex.org/I103583917","display_name":"Karachi Institute of Economics and Technology","ror":"https://ror.org/02sdmkj94","country_code":"PK","type":"education","lineage":["https://openalex.org/I103583917"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"Shahzada Tahaa Irshad","raw_affiliation_strings":["College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan","institution_ids":["https://openalex.org/I103583917"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5086960731","display_name":"Syed Arsalan Jawed","orcid":"https://orcid.org/0000-0003-0940-6333"},"institutions":[{"id":"https://openalex.org/I103583917","display_name":"Karachi Institute of Economics and Technology","ror":"https://ror.org/02sdmkj94","country_code":"PK","type":"education","lineage":["https://openalex.org/I103583917"]}],"countries":["PK"],"is_corresponding":false,"raw_author_name":"Syed Arsalan Jawed","raw_affiliation_strings":["College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Electronic Devices, Circuits and Systems Group, Karachi Institute of Economics and Technology, Karachi, Pakistan","institution_ids":["https://openalex.org/I103583917"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I103583917"],"apc_list":null,"apc_paid":null,"fwci":0.7584,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.68810788,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8505910634994507},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7905234098434448},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.7879031300544739},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7595465183258057},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6789032816886902},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4999427795410156},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4684709906578064},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.42855826020240784},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3811255395412445},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.322983980178833},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.32225745916366577},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.31635814905166626}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8505910634994507},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7905234098434448},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.7879031300544739},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7595465183258057},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6789032816886902},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4999427795410156},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4684709906578064},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.42855826020240784},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3811255395412445},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.322983980178833},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.32225745916366577},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.31635814905166626},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/intellect.2017.8277644","is_oa":false,"landing_page_url":"https://doi.org/10.1109/intellect.2017.8277644","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 First International Conference on Latest trends in Electrical Engineering and Computing Technologies (INTELLECT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6499999761581421,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1630602315","https://openalex.org/W1843981434","https://openalex.org/W1972947581","https://openalex.org/W2010684297","https://openalex.org/W2058333535","https://openalex.org/W2075391089","https://openalex.org/W2076278764","https://openalex.org/W2078136180","https://openalex.org/W2090983280","https://openalex.org/W2103198996","https://openalex.org/W2105982865","https://openalex.org/W2127252908","https://openalex.org/W2136268807","https://openalex.org/W2138332488","https://openalex.org/W2156771193","https://openalex.org/W2262430607","https://openalex.org/W3120346404","https://openalex.org/W4405139749","https://openalex.org/W6788205927"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W4232743211","https://openalex.org/W2145387305","https://openalex.org/W2026330382","https://openalex.org/W756886103"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"a":[3,58,113,129],"Monolithic":[4],"CMOS-MEMS":[5,23,31],"(MicroElectroMechanical":[6],"Systems)":[7],"based":[8],"Tri-axis":[9],"Accelerometer":[10,101],"with":[11,140],"complete":[12],"Readout":[13],"Integrated":[14],"Circuit":[15],"(ROIC)":[16],"implemented":[17,81],"using":[18,97],"150nm":[19],"one-poly-Silicon":[20],"and":[21,40,43,86,95],"six-metal/dielectric":[22],"process.":[24],"The":[25,90,100,122],"multilayer":[26],"stacking":[27],"features":[28],"of":[29,67,112],"the":[30,37,50,64,68,71,84,88,107,135],"process":[32],"were":[33],"exploited":[34],"to":[35,62,82,109,128],"integrate":[36],"in-plane":[38],"(x":[39],"y":[41],"axes)":[42],"out-of-plane":[44],"(z-axis)":[45],"capacitive":[46,123],"sensing":[47,52,74],"electrodes.":[48],"Thus,":[49],"three-axis":[51],"electrodes":[53,75,108],"can":[54],"be":[55],"integrated":[56],"on":[57],"single":[59],"proof":[60,114],"mass":[61],"reduce":[63],"overall":[65],"footprint":[66],"Accelerometer.":[69],"Moreover,":[70],"fully":[72],"differential":[73,130],"among":[76],"all":[77],"three":[78],"axes":[79],"are":[80],"increase":[83],"sensitivities":[85],"decrease":[87],"noise.":[89],"accelerometer":[91],"structure":[92,125],"was":[93],"designed":[94],"simulated":[96],"Coventor's":[98],"MEMS+.":[99],"measures":[102],"changes":[103],"in":[104,138,142],"capacitance":[105],"between":[106],"detect":[110],"detections":[111],"mass,":[115],"which":[116],"result":[117],"from":[118],"external":[119],"acceleration":[120],"input.":[121],"MEMS":[124],"is":[126],"connected":[127],"position-sense":[131],"interface":[132],"that":[133],"gives":[134],"output":[136],"Voltage":[137],"accordance":[139],"change":[141],"capacitance.":[143]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}