{"id":"https://openalex.org/W2085180535","doi":"https://doi.org/10.1109/inss.2010.5572160","title":"Structuring of 2D photonic crystal on InP membranes as polarizing element for optical MEMS based sensor systems","display_name":"Structuring of 2D photonic crystal on InP membranes as polarizing element for optical MEMS based sensor systems","publication_year":2010,"publication_date":"2010-06-01","ids":{"openalex":"https://openalex.org/W2085180535","doi":"https://doi.org/10.1109/inss.2010.5572160","mag":"2085180535"},"language":"en","primary_location":{"id":"doi:10.1109/inss.2010.5572160","is_oa":false,"landing_page_url":"https://doi.org/10.1109/inss.2010.5572160","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 Seventh International Conference on Networked Sensing Systems (INSS)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016108681","display_name":"Ricardo Zamora","orcid":null},"institutions":[{"id":"https://openalex.org/I106157433","display_name":"University of Kassel","ror":"https://ror.org/04zc7p361","country_code":"DE","type":"education","lineage":["https://openalex.org/I106157433"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"R. Zamora","raw_affiliation_strings":["Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]},{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071463140","display_name":"Thomas Kusserow","orcid":"https://orcid.org/0000-0002-0567-3437"},"institutions":[{"id":"https://openalex.org/I106157433","display_name":"University of Kassel","ror":"https://ror.org/04zc7p361","country_code":"DE","type":"education","lineage":["https://openalex.org/I106157433"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Kusserow","raw_affiliation_strings":["Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]},{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027783714","display_name":"Matthias Wulf","orcid":"https://orcid.org/0000-0001-6613-1378"},"institutions":[{"id":"https://openalex.org/I106157433","display_name":"University of Kassel","ror":"https://ror.org/04zc7p361","country_code":"DE","type":"education","lineage":["https://openalex.org/I106157433"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Wulf","raw_affiliation_strings":["Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]},{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002293576","display_name":"Kelash Kanwar","orcid":null},"institutions":[{"id":"https://openalex.org/I106157433","display_name":"University of Kassel","ror":"https://ror.org/04zc7p361","country_code":"DE","type":"education","lineage":["https://openalex.org/I106157433"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Kanwar","raw_affiliation_strings":["Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]},{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053226091","display_name":"Bernd Witzigmann","orcid":"https://orcid.org/0000-0001-9705-9516"},"institutions":[{"id":"https://openalex.org/I106157433","display_name":"University of Kassel","ror":"https://ror.org/04zc7p361","country_code":"DE","type":"education","lineage":["https://openalex.org/I106157433"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B. Witzigmann","raw_affiliation_strings":["Computational Electronics and Photonics, University of Kassel, Kassel, Germany","Computational Electronics and Photonics, at the University of Kassel, Wilhelmsh\u00f6her Allee 71, 34121, Germany"],"affiliations":[{"raw_affiliation_string":"Computational Electronics and Photonics, University of Kassel, Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]},{"raw_affiliation_string":"Computational Electronics and Photonics, at the University of Kassel, Wilhelmsh\u00f6her Allee 71, 34121, Germany","institution_ids":["https://openalex.org/I106157433"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085037265","display_name":"Hartmut Hillmer","orcid":"https://orcid.org/0000-0001-8228-5895"},"institutions":[{"id":"https://openalex.org/I106157433","display_name":"University of Kassel","ror":"https://ror.org/04zc7p361","country_code":"DE","type":"education","lineage":["https://openalex.org/I106157433"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Hillmer","raw_affiliation_strings":["Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]},{"raw_affiliation_string":"Institute of Nanostructure Technologies and Analytics (INA), at University of Kassel and the Center of Interdisciplinary Nanostructure Science and Technology (CINSaT), Heinrich-Plett-Str. 40, 34132 Kassel, Germany","institution_ids":["https://openalex.org/I106157433"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5016108681"],"corresponding_institution_ids":["https://openalex.org/I106157433"],"apc_list":null,"apc_paid":null,"fwci":0.1843,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.55484154,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"18","issue":null,"first_page":"179","last_page":"182"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7908580303192139},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7695898413658142},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.6454665660858154},{"id":"https://openalex.org/keywords/photonic-crystal","display_name":"Photonic crystal","score":0.5987725853919983},{"id":"https://openalex.org/keywords/structuring","display_name":"Structuring","score":0.5637670755386353},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5558074712753296},{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"Reactive-ion etching","score":0.543635904788971},{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"Focused ion beam","score":0.49566709995269775},{"id":"https://openalex.org/keywords/optical-filter","display_name":"Optical filter","score":0.4844922721385956},{"id":"https://openalex.org/keywords/ion-beam-lithography","display_name":"Ion beam lithography","score":0.48163312673568726},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.4803951382637024},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.44627317786216736},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.4459015727043152},{"id":"https://openalex.org/keywords/polarization","display_name":"Polarization (electrochemistry)","score":0.4182267189025879},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.33375614881515503},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.20786121487617493},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.17335832118988037}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7908580303192139},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7695898413658142},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6454665660858154},{"id":"https://openalex.org/C75302062","wikidata":"https://www.wikidata.org/wiki/Q900150","display_name":"Photonic crystal","level":2,"score":0.5987725853919983},{"id":"https://openalex.org/C2775945657","wikidata":"https://www.wikidata.org/wiki/Q381442","display_name":"Structuring","level":2,"score":0.5637670755386353},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5558074712753296},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.543635904788971},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.49566709995269775},{"id":"https://openalex.org/C45613198","wikidata":"https://www.wikidata.org/wiki/Q1134091","display_name":"Optical filter","level":2,"score":0.4844922721385956},{"id":"https://openalex.org/C2781048479","wikidata":"https://www.wikidata.org/wiki/Q1672059","display_name":"Ion beam lithography","level":4,"score":0.48163312673568726},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.4803951382637024},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.44627317786216736},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.4459015727043152},{"id":"https://openalex.org/C205049153","wikidata":"https://www.wikidata.org/wiki/Q2698605","display_name":"Polarization (electrochemistry)","level":2,"score":0.4182267189025879},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.33375614881515503},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.20786121487617493},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.17335832118988037},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/inss.2010.5572160","is_oa":false,"landing_page_url":"https://doi.org/10.1109/inss.2010.5572160","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 Seventh International Conference on Networked Sensing Systems (INSS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W58968262","https://openalex.org/W1977157796","https://openalex.org/W1986387313","https://openalex.org/W1988868108","https://openalex.org/W2009631901","https://openalex.org/W2032042797","https://openalex.org/W2039428488","https://openalex.org/W2044750630","https://openalex.org/W2047561286","https://openalex.org/W2057561052","https://openalex.org/W2082847726","https://openalex.org/W2104906876","https://openalex.org/W2118630924","https://openalex.org/W2141983508","https://openalex.org/W2145208973","https://openalex.org/W2170273662","https://openalex.org/W6602395351"],"related_works":["https://openalex.org/W2188272038","https://openalex.org/W2065674648","https://openalex.org/W2541384682","https://openalex.org/W4365513717","https://openalex.org/W2026664737","https://openalex.org/W1965518244","https://openalex.org/W1991920643","https://openalex.org/W4293764395","https://openalex.org/W2080044930","https://openalex.org/W2024596828"],"abstract_inverted_index":{"Narrow":[0],"band":[1],"Fabry-P\u00e9rot":[2,38],"MEMS":[3],"filters":[4],"are":[5,59,110],"investigated":[6,60],"for":[7],"the":[8,63,71,75,81,86,95,99,103,106],"integration":[9],"in":[10,32,80],"optical":[11],"fiber":[12],"sensor":[13],"networks.":[14],"We":[15],"present":[16],"a":[17,22],"technological":[18],"process":[19],"to":[20,34,61,70,84,89],"implement":[21],"2D":[23],"photonic":[24],"crystal":[25],"(PhC)":[26],"structure":[27,109],"on":[28,105],"an":[29,36],"InP":[30],"membrane,":[31],"order":[33],"provide":[35],"InP/air-gap":[37],"filter":[39,108],"with":[40,54],"polarization":[41],"selectivity.":[42],"The":[43],"capabilities":[44],"and":[45,102],"limitations":[46],"of":[47,74,98],"Focused":[48],"Ion":[49,56],"Beam":[50],"(FIB)":[51],"lithography":[52],"combined":[53],"Reactive":[55],"Etching":[57],"(RIE)":[58],"fabricate":[62],"PhC":[64,100],"structure.":[65],"Special":[66],"focus":[67],"is":[68],"given":[69],"etching":[72],"rate":[73],"required":[76],"hard":[77],"mask,":[78],"utilized":[79],"FIB":[82],"lithography,":[83],"determine":[85],"optimal":[87],"thickness":[88],"produce":[90],"high":[91],"quality":[92],"structures.":[93],"Additionally,":[94],"mechanical":[96],"properties":[97],"membrane":[101],"influence":[104],"basic":[107],"investigated.":[111]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}