{"id":"https://openalex.org/W4415248427","doi":"https://doi.org/10.1109/indin64977.2025.11279663","title":"Design and Development of a Robust Tolerance Optimisation Framework for Automated Optical Inspection in Semiconductor Manufacturing","display_name":"Design and Development of a Robust Tolerance Optimisation Framework for Automated Optical Inspection in Semiconductor Manufacturing","publication_year":2025,"publication_date":"2025-07-12","ids":{"openalex":"https://openalex.org/W4415248427","doi":"https://doi.org/10.1109/indin64977.2025.11279663"},"language":"en","primary_location":{"id":"doi:10.1109/indin64977.2025.11279663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/indin64977.2025.11279663","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 23rd International Conference on Industrial Informatics (INDIN)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["arxiv","crossref","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://pure.ulster.ac.uk/en/publications/34fd69a9-8e44-436f-810e-0de5b2c882bc","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5120024145","display_name":"Shruthi Kogileru","orcid":null},"institutions":[{"id":"https://openalex.org/I138801177","display_name":"University of Ulster","ror":"https://ror.org/01yp9g959","country_code":"GB","type":"education","lineage":["https://openalex.org/I138801177"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Shruthi Kogileru","raw_affiliation_strings":["Ulster University,School of Engineering,Belfast,UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ulster University,School of Engineering,Belfast,UK","institution_ids":["https://openalex.org/I138801177"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109500978","display_name":"M. W. McBride","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104332","display_name":"Elisha Systems (United Kingdom)","ror":"https://ror.org/00xts7a11","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210104332"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Mark McBride","raw_affiliation_strings":["Elite Electronic Systems Ltd,UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Elite Electronic Systems Ltd,UK","institution_ids":["https://openalex.org/I4210104332"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027797605","display_name":"Yaxin Bi","orcid":"https://orcid.org/0000-0002-0979-4084"},"institutions":[{"id":"https://openalex.org/I138801177","display_name":"University of Ulster","ror":"https://ror.org/01yp9g959","country_code":"GB","type":"education","lineage":["https://openalex.org/I138801177"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Yaxin Bi","raw_affiliation_strings":["Ulster University,School of Computing,Belfast,UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ulster University,School of Computing,Belfast,UK","institution_ids":["https://openalex.org/I138801177"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5042094604","display_name":"Kok Yew Ng","orcid":"https://orcid.org/0000-0003-1465-0592"},"institutions":[{"id":"https://openalex.org/I138801177","display_name":"University of Ulster","ror":"https://ror.org/01yp9g959","country_code":"GB","type":"education","lineage":["https://openalex.org/I138801177"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Kok Yew Ng","raw_affiliation_strings":["Ulster University,School of Engineering,Belfast,UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ulster University,School of Engineering,Belfast,UK","institution_ids":["https://openalex.org/I138801177"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9922000169754028,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9659000039100647,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/intuition","display_name":"Intuition","score":0.6057999730110168},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.5134999752044678},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.49079999327659607},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4702000021934509},{"id":"https://openalex.org/keywords/automotive-industry","display_name":"Automotive industry","score":0.4253000020980835},{"id":"https://openalex.org/keywords/lead-time","display_name":"Lead time","score":0.3659000098705292},{"id":"https://openalex.org/keywords/surface-mount-technology","display_name":"Surface-mount technology","score":0.3474000096321106},{"id":"https://openalex.org/keywords/consumables","display_name":"Consumables","score":0.3424000144004822},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.33660000562667847}],"concepts":[{"id":"https://openalex.org/C132010649","wikidata":"https://www.wikidata.org/wiki/Q189222","display_name":"Intuition","level":2,"score":0.6057999730110168},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.572700023651123},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.5134999752044678},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.49079999327659607},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.47600001096725464},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4702000021934509},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4528999924659729},{"id":"https://openalex.org/C526921623","wikidata":"https://www.wikidata.org/wiki/Q190117","display_name":"Automotive industry","level":2,"score":0.4253000020980835},{"id":"https://openalex.org/C2781468064","wikidata":"https://www.wikidata.org/wiki/Q1267117","display_name":"Lead time","level":2,"score":0.3659000098705292},{"id":"https://openalex.org/C2776584680","wikidata":"https://www.wikidata.org/wiki/Q191042","display_name":"Surface-mount technology","level":3,"score":0.3474000096321106},{"id":"https://openalex.org/C62126406","wikidata":"https://www.wikidata.org/wiki/Q1681365","display_name":"Consumables","level":2,"score":0.3424000144004822},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.33660000562667847},{"id":"https://openalex.org/C112930515","wikidata":"https://www.wikidata.org/wiki/Q4389547","display_name":"Risk analysis (engineering)","level":1,"score":0.33570000529289246},{"id":"https://openalex.org/C164830781","wikidata":"https://www.wikidata.org/wiki/Q787330","display_name":"Automated optical inspection","level":2,"score":0.33410000801086426},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.3142000138759613},{"id":"https://openalex.org/C113644684","wikidata":"https://www.wikidata.org/wiki/Q1356717","display_name":"Statistical process control","level":3,"score":0.310699999332428},{"id":"https://openalex.org/C19351080","wikidata":"https://www.wikidata.org/wiki/Q1395034","display_name":"New product development","level":2,"score":0.30790001153945923},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.3041999936103821},{"id":"https://openalex.org/C91439571","wikidata":"https://www.wikidata.org/wiki/Q1279773","display_name":"Process capability","level":3,"score":0.30300000309944153},{"id":"https://openalex.org/C2987875673","wikidata":"https://www.wikidata.org/wiki/Q187939","display_name":"Manufacturing process","level":2,"score":0.29809999465942383},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.29019999504089355},{"id":"https://openalex.org/C168820333","wikidata":"https://www.wikidata.org/wiki/Q448889","display_name":"Visual inspection","level":2,"score":0.27230000495910645},{"id":"https://openalex.org/C122048520","wikidata":"https://www.wikidata.org/wiki/Q2913954","display_name":"Percentile","level":2,"score":0.26989999413490295},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.2612999975681305},{"id":"https://openalex.org/C2778820799","wikidata":"https://www.wikidata.org/wiki/Q3454688","display_name":"Cost reduction","level":2,"score":0.257999986410141},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.2513999938964844},{"id":"https://openalex.org/C174998907","wikidata":"https://www.wikidata.org/wiki/Q357662","display_name":"Work in process","level":2,"score":0.2500999867916107}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/indin64977.2025.11279663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/indin64977.2025.11279663","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE 23rd International Conference on Industrial Informatics (INDIN)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.atira.dk:publications/34fd69a9-8e44-436f-810e-0de5b2c882bc","is_oa":true,"landing_page_url":"https://pure.ulster.ac.uk/en/publications/34fd69a9-8e44-436f-810e-0de5b2c882bc","pdf_url":null,"source":{"id":"https://openalex.org/S4306402454","display_name":"Ulster University Research Portal (Ulster University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I138801177","host_organization_name":"University of Ulster","host_organization_lineage":["https://openalex.org/I138801177"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Kogileru, S, McBride, M, Bi, Y & Ng, K Y 2026, Design and Development of a Robust Tolerance Optimisation Framework for Automated Optical Inspection in Semiconductor Manufacturing. in 2025 IEEE 23rd International Conference on Industrial Informatics (INDIN). 2025 IEEE 23rd International Conference on Industrial Informatics (INDIN), IEEE, pp. 1-4. https://doi.org/10.1109/INDIN64977.2025.11279663","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:arXiv.org:2505.03576","is_oa":true,"landing_page_url":"http://arxiv.org/abs/2505.03576","pdf_url":"https://arxiv.org/pdf/2505.03576","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"doi:10.48550/arxiv.2505.03576","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2505.03576","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"pmh:oai:pure.atira.dk:publications/34fd69a9-8e44-436f-810e-0de5b2c882bc","is_oa":true,"landing_page_url":"https://pure.ulster.ac.uk/en/publications/34fd69a9-8e44-436f-810e-0de5b2c882bc","pdf_url":null,"source":{"id":"https://openalex.org/S4306402454","display_name":"Ulster University Research Portal (Ulster University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I138801177","host_organization_name":"University of Ulster","host_organization_lineage":["https://openalex.org/I138801177"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Kogileru, S, McBride, M, Bi, Y & Ng, K Y 2026, Design and Development of a Robust Tolerance Optimisation Framework for Automated Optical Inspection in Semiconductor Manufacturing. in 2025 IEEE 23rd International Conference on Industrial Informatics (INDIN). 2025 IEEE 23rd International Conference on Industrial Informatics (INDIN), IEEE, pp. 1-4. https://doi.org/10.1109/INDIN64977.2025.11279663","raw_type":"info:eu-repo/semantics/conferenceObject"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320335087","display_name":"Innovate UK","ror":"https://ror.org/05ar5fy68"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W4388737323","https://openalex.org/W2916960638","https://openalex.org/W2989925413","https://openalex.org/W4408138632","https://openalex.org/W4200265640","https://openalex.org/W4308427212","https://openalex.org/W2081087459","https://openalex.org/W4402437084"],"related_works":[],"abstract_inverted_index":{"Automated":[0],"Optical":[1],"Inspection":[2],"(AOI)":[3],"is":[4,24,142],"widely":[5],"used":[6],"across":[7],"various":[8],"industries,":[9],"including":[10],"surface":[11],"mount":[12],"technology":[13],"in":[14,22,61,71,98,161],"semiconductor":[15],"manufacturing.":[16],"One":[17],"of":[18,38,84,113,155],"the":[19,34,82,111,148,165,177],"key":[20],"challenges":[21],"AOI":[23],"optimising":[25],"inspection":[26,59],"tolerances.":[27],"Traditionally,":[28],"this":[29,72],"process":[30],"relies":[31],"heavily":[32],"on":[33,76],"expertise":[35],"and":[36,43,65,105,181,186],"intuition":[37],"engineers,":[39],"making":[40],"it":[41],"subjective":[42],"prone":[44],"to":[45,57,88,120,134],"inconsistency.":[46],"To":[47],"address":[48],"this,":[49],"we":[50],"are":[51,125],"developing":[52],"an":[53,158],"intelligent,":[54],"data-driven":[55],"approach":[56,109],"optimise":[58],"tolerances":[60],"a":[62,136,143,171],"more":[63],"objective":[64],"consistent":[66],"manner.":[67],"Most":[68],"existing":[69],"research":[70],"area":[73],"focuses":[74],"primarily":[75],"minimising":[77],"false":[78,162],"calls,":[79],"often":[80],"at":[81,164],"risk":[83],"allowing":[85],"actual":[86],"defects":[87,124],"go":[89],"undetected.":[90],"This":[91,175],"oversight":[92],"can":[93],"compromise":[94],"product":[95],"quality,":[96],"especially":[97],"critical":[99],"sectors":[100],"such":[101],"as":[102],"medical,":[103],"defence,":[104],"automotive":[106],"industries.":[107],"Our":[108,153],"introduces":[110],"use":[112],"percentile":[114,167],"rank,":[115,168],"amongst":[116],"other":[117],"logical":[118],"strategies,":[119],"ensure":[121],"that":[122],"genuine":[123],"not":[126],"overlooked.":[127],"With":[128],"continued":[129],"refinement,":[130],"our":[131],"method":[132],"aims":[133],"reach":[135],"point":[137],"where":[138],"every":[139],"flagged":[140],"item":[141],"true":[144],"defect,":[145],"thereby":[146],"eliminating":[147],"need":[149],"for":[150],"manual":[151],"inspection.":[152],"proof":[154],"concept":[156],"achieved":[157],"18%":[159],"reduction":[160],"calls":[163],"80th":[166],"while":[169],"maintaining":[170],"100%":[172],"recall":[173],"rate.":[174],"makes":[176],"system":[178],"both":[179],"efficient":[180],"reliable,":[182],"offering":[183],"significant":[184],"time":[185],"cost":[187],"savings.":[188]},"counts_by_year":[],"updated_date":"2026-07-18T07:39:51.176621","created_date":"2025-10-16T00:00:00"}