{"id":"https://openalex.org/W4411233383","doi":"https://doi.org/10.1109/imw61990.2025.11026936","title":"Hole-Side Airgap Integration as Enabler for 3D NAND Flash Z-Pitch Scaling","display_name":"Hole-Side Airgap Integration as Enabler for 3D NAND Flash Z-Pitch Scaling","publication_year":2025,"publication_date":"2025-05-18","ids":{"openalex":"https://openalex.org/W4411233383","doi":"https://doi.org/10.1109/imw61990.2025.11026936"},"language":"en","primary_location":{"id":"doi:10.1109/imw61990.2025.11026936","is_oa":false,"landing_page_url":"https://doi.org/10.1109/imw61990.2025.11026936","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Memory Workshop (IMW)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5082997317","display_name":"S. Rachidi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"S. Rachidi","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014719699","display_name":"S. Ramesh","orcid":"https://orcid.org/0000-0002-8473-7258"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"S. Ramesh","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052918419","display_name":"Devin Verreck","orcid":"https://orcid.org/0000-0002-3833-5880"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Verreck","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033598710","display_name":"J. Loyo","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Loyo","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082589351","display_name":"Yongbin Jeong","orcid":"https://orcid.org/0000-0002-0311-6629"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Y. Jeong","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038714522","display_name":"Harinarayanan Puliyalil","orcid":"https://orcid.org/0000-0002-9749-5307"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"H. Puliyalil","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100428231","display_name":"Jie Li","orcid":"https://orcid.org/0000-0002-3400-8241"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Li","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031494048","display_name":"F. C. Seidel","orcid":"https://orcid.org/0000-0002-4282-2198"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"F. Seidel","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035325463","display_name":"G. Van den bosch","orcid":"https://orcid.org/0000-0001-9971-6954"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G. Van Den Bosch","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026576657","display_name":"M. Rosmeulen","orcid":"https://orcid.org/0000-0002-3663-7439"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Rosmeulen","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5082997317"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.13561889,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11181","display_name":"Advanced Data Storage Technologies","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11181","display_name":"Advanced Data Storage Technologies","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nand-gate","display_name":"NAND gate","score":0.788886547088623},{"id":"https://openalex.org/keywords/scaling","display_name":"Scaling","score":0.7408807277679443},{"id":"https://openalex.org/keywords/flash","display_name":"Flash (photography)","score":0.681647539138794},{"id":"https://openalex.org/keywords/enabling","display_name":"Enabling","score":0.5367231369018555},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5163317918777466},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.43926459550857544},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42768287658691406},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3943772614002228},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3803369700908661},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.35227447748184204},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.28734952211380005},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17347273230552673},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.11540764570236206},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.06937623023986816}],"concepts":[{"id":"https://openalex.org/C124296912","wikidata":"https://www.wikidata.org/wiki/Q575178","display_name":"NAND gate","level":3,"score":0.788886547088623},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.7408807277679443},{"id":"https://openalex.org/C2777526259","wikidata":"https://www.wikidata.org/wiki/Q221836","display_name":"Flash (photography)","level":2,"score":0.681647539138794},{"id":"https://openalex.org/C22607594","wikidata":"https://www.wikidata.org/wiki/Q5375150","display_name":"Enabling","level":2,"score":0.5367231369018555},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5163317918777466},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.43926459550857544},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42768287658691406},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3943772614002228},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3803369700908661},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.35227447748184204},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.28734952211380005},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17347273230552673},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.11540764570236206},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.06937623023986816},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/imw61990.2025.11026936","is_oa":false,"landing_page_url":"https://doi.org/10.1109/imw61990.2025.11026936","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Memory Workshop (IMW)","raw_type":"proceedings-article"},{"id":"pmh:oai:lirias2repo.kuleuven.be:20.500.12942/785356","is_oa":false,"landing_page_url":"https://lirias.kuleuven.be/handle/20.500.12942/785356","pdf_url":null,"source":{"id":"https://openalex.org/S7407055369","display_name":"Lirias","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"2025 International Memory Workshop-IMW-Annual, CA, Monterey, 18-21 May 2025","raw_type":"info:eu-repo/semantics/publishedVersion"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6800000071525574,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2054139911","https://openalex.org/W2162027152","https://openalex.org/W2489439822","https://openalex.org/W3165307257","https://openalex.org/W2515312339","https://openalex.org/W2145098804","https://openalex.org/W4237143391","https://openalex.org/W4226211266","https://openalex.org/W2991151827","https://openalex.org/W2130440338"],"abstract_inverted_index":{"We":[0,49],"demonstrate":[1],"for":[2,41,103,119],"the":[3,11,52,76,88],"first":[4],"time":[5],"a":[6,16,58,116],"scalable":[7],"airgap":[8],"introduced":[9],"from":[10],"memory":[12],"hole":[13],"region":[14],"as":[15],"3D":[17,61,125],"NAND":[18,62,126],"flash":[19,63,127],"z-pitch":[20,60,121],"scaling":[21,122],"enabler.":[22],"The":[23],"proposed":[24],"integration":[25],"scheme":[26,93],"successfully":[27],"forms":[28],"airgaps":[29,56,113],"with":[30,86,105],"controlled":[31],"depth":[32],"extension":[33],"in":[34,57,123],"between":[35],"word":[36],"lines,":[37],"offering":[38],"great":[39],"potential":[40],"manufacturability":[42],"and":[43,47,70,106],"advancing":[44],"storage":[45],"density":[46],"performance.":[48],"show":[50],"that":[51,112],"introduction":[53],"of":[54],"these":[55],"30nm":[59],"process":[64],"flow":[65],"effectively":[66],"reduces":[67],"WL-WL":[68],"interference":[69],"has":[71],"no":[72],"observable":[73],"impact":[74],"on":[75],"programming":[77],"operation.":[78],"While":[79],"single":[80],"cell":[81],"erase":[82],"operation":[83],"shows":[84],"degradation":[85],"airgaps,":[87],"conventional":[89],"\"all":[90],"cells":[91],"erase\"":[92],"is":[94,101],"much":[95],"less":[96],"impacted.":[97],"Comparable":[98],"reliability":[99],"performance":[100],"obtained":[102],"devices":[104],"without":[107],"airgaps.":[108],"Our":[109],"results":[110],"suggest":[111],"can":[114],"be":[115],"viable":[117],"solution":[118],"extreme":[120],"future":[124],"technologies.":[128]},"counts_by_year":[],"updated_date":"2026-04-20T07:46:08.049788","created_date":"2025-10-10T00:00:00"}