{"id":"https://openalex.org/W4380359768","doi":"https://doi.org/10.1109/imw56887.2023.10145990","title":"SONOS Embedded Flash IP Using Trap-Depth-Controlled SiN Film Enabling Data Retention more than 10 years at 200\u00b0C","display_name":"SONOS Embedded Flash IP Using Trap-Depth-Controlled SiN Film Enabling Data Retention more than 10 years at 200\u00b0C","publication_year":2023,"publication_date":"2023-05-01","ids":{"openalex":"https://openalex.org/W4380359768","doi":"https://doi.org/10.1109/imw56887.2023.10145990"},"language":"en","primary_location":{"id":"doi:10.1109/imw56887.2023.10145990","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/imw56887.2023.10145990","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE International Memory Workshop (IMW)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110664867","display_name":"Yasuhiro Taniguchi","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Yasuhiro Taniguchi","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100979461","display_name":"Shoji Y\u014dshida","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shoji Yoshida","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110990220","display_name":"Teruhiko Egashira","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Teruhiko Egashira","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101211989","display_name":"ChihBin Kuo","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"ChihBin Kuo","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]},{"raw_affiliation_string":"Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108842879","display_name":"YiYang Shie","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"YiYang Shie","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]},{"raw_affiliation_string":"Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100774056","display_name":"Yuchun Wang","orcid":"https://orcid.org/0000-0003-2719-782X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"YuChun Wang","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]},{"raw_affiliation_string":"Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055845845","display_name":"Chenyu Huang","orcid":"https://orcid.org/0000-0001-6301-2568"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"ChenYu Huang","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]},{"raw_affiliation_string":"Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092146633","display_name":"Tsuyoshi Tamatsu","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Tsuyoshi Tamatsu","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102006050","display_name":"Keiji Okamoto","orcid":"https://orcid.org/0000-0002-9412-4324"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Keiji Okamoto","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083672159","display_name":"Masanobu Hishiki","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Masanobu Hishiki","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017509287","display_name":"Yasushi Sasaki","orcid":"https://orcid.org/0000-0002-3500-8059"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yasushi Sasaki","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092146632","display_name":"Fukuo Owada","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fukuo Owada","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045617194","display_name":"Nobuhiko Ito","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nobuhiko Ito","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111647702","display_name":"Y. Shinagawa","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yutaka Shinagawa","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101211988","display_name":"ChihMing Kuo","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"ChihMing Kuo","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]},{"raw_affiliation_string":"Floadia Corporation Taiwan Branch, Center of Innovative Incubator, NTHUNo. 101, Sec. 2, Guangfu Rd., HsinchuCiy, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025758113","display_name":"Satoshi Noda","orcid":"https://orcid.org/0000-0002-8023-2877"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Satoshi Noda","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110659538","display_name":"Toshikazu MATSUI","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Toshikazu Matsui","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103928918","display_name":"Kosuke Okuyama","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kosuke Okuyama","raw_affiliation_strings":["Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021"],"affiliations":[{"raw_affiliation_string":"Floaria Corporation, 1-30-9 Ogawa-Higashi, Kodairashi,Tokyo,Japan,187-0021","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":18,"corresponding_author_ids":["https://openalex.org/A5110664867"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.206,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.47252848,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11181","display_name":"Advanced Data Storage Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11181","display_name":"Advanced Data Storage Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9894000291824341,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/flash-memory","display_name":"Flash memory","score":0.7306172847747803},{"id":"https://openalex.org/keywords/flash","display_name":"Flash (photography)","score":0.6823515892028809},{"id":"https://openalex.org/keywords/trap","display_name":"Trap (plumbing)","score":0.6086701154708862},{"id":"https://openalex.org/keywords/data-retention","display_name":"Data retention","score":0.5926684141159058},{"id":"https://openalex.org/keywords/non-volatile-memory","display_name":"Non-volatile memory","score":0.5590561628341675},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.4923139810562134},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4618583619594574},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.456935316324234},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.4154476523399353},{"id":"https://openalex.org/keywords/computer-data-storage","display_name":"Computer data storage","score":0.41496366262435913},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.34556645154953003},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.343672513961792},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.32364749908447266},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2332765758037567},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.129195898771286}],"concepts":[{"id":"https://openalex.org/C2776531357","wikidata":"https://www.wikidata.org/wiki/Q174077","display_name":"Flash memory","level":2,"score":0.7306172847747803},{"id":"https://openalex.org/C2777526259","wikidata":"https://www.wikidata.org/wiki/Q221836","display_name":"Flash (photography)","level":2,"score":0.6823515892028809},{"id":"https://openalex.org/C121099081","wikidata":"https://www.wikidata.org/wiki/Q665580","display_name":"Trap (plumbing)","level":2,"score":0.6086701154708862},{"id":"https://openalex.org/C2780866740","wikidata":"https://www.wikidata.org/wiki/Q5227345","display_name":"Data retention","level":2,"score":0.5926684141159058},{"id":"https://openalex.org/C177950962","wikidata":"https://www.wikidata.org/wiki/Q10997658","display_name":"Non-volatile memory","level":2,"score":0.5590561628341675},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.4923139810562134},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4618583619594574},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.456935316324234},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.4154476523399353},{"id":"https://openalex.org/C194739806","wikidata":"https://www.wikidata.org/wiki/Q66221","display_name":"Computer data storage","level":2,"score":0.41496366262435913},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.34556645154953003},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.343672513961792},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.32364749908447266},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2332765758037567},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.129195898771286},{"id":"https://openalex.org/C87717796","wikidata":"https://www.wikidata.org/wiki/Q146326","display_name":"Environmental engineering","level":1,"score":0.0},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/imw56887.2023.10145990","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/imw56887.2023.10145990","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE International Memory Workshop (IMW)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7200000286102295,"display_name":"Climate action","id":"https://metadata.un.org/sdg/13"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1579388513","https://openalex.org/W2134305207","https://openalex.org/W2623060708","https://openalex.org/W2808985247","https://openalex.org/W3033826949","https://openalex.org/W3169755176","https://openalex.org/W6752309912"],"related_works":["https://openalex.org/W2110321764","https://openalex.org/W1580039394","https://openalex.org/W3040260745","https://openalex.org/W2104937488","https://openalex.org/W2329688742","https://openalex.org/W2106449802","https://openalex.org/W2168060209","https://openalex.org/W2544543223","https://openalex.org/W2036350002","https://openalex.org/W2102924097"],"abstract_inverted_index":{"We":[0],"introduce":[1],"a":[2],"cost-effective,":[3],"reliable":[4],"and":[5,13],"energy-efficient":[6],"embedded-flash":[7],"memory":[8,18],"IP":[9],"for":[10],"IoT,":[11],"industry,":[12],"automotive.":[14],"A":[15],"Silicon-Oxide-Nitride-Oxide-Silicon":[16],"(SONOS)type":[17],"is":[19,58],"embedded":[20],"on":[21],"130BCD+":[22],"process":[23],"platform":[24],"with":[25],"only":[26],"three":[27],"additional":[28],"mask":[29],"steps.":[30],"Performance":[31],"including":[32],"qualification":[33],"has":[34],"been":[35],"checked":[36],"as":[37],"expected":[38],"at":[39,56],"TSMC.":[40],"By":[41],"applying":[42],"trapdepth-controlled":[43],"SiN":[44],"film":[45],"to":[46],"the":[47],"SONOS":[48],"memory,":[49],"data":[50],"storage":[51],"more":[52],"than":[53],"10":[54],"years":[55],"200<sup>o</sup>C":[57],"achieved.":[59]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-12-21T23:12:01.093139","created_date":"2025-10-10T00:00:00"}