{"id":"https://openalex.org/W4281550088","doi":"https://doi.org/10.1109/imw52921.2022.9779245","title":"Variability and disturb sources in ferroelectric 3D NANDs and comparison to Charge-Trap equivalents","display_name":"Variability and disturb sources in ferroelectric 3D NANDs and comparison to Charge-Trap equivalents","publication_year":2022,"publication_date":"2022-05-01","ids":{"openalex":"https://openalex.org/W4281550088","doi":"https://doi.org/10.1109/imw52921.2022.9779245"},"language":"en","primary_location":{"id":"doi:10.1109/imw52921.2022.9779245","is_oa":false,"landing_page_url":"https://doi.org/10.1109/imw52921.2022.9779245","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Memory Workshop (IMW)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://hdl.handle.net/11380/1280578","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5068149790","display_name":"Milan Pe\u0161i\u0107","orcid":"https://orcid.org/0000-0002-1788-8945"},"institutions":[{"id":"https://openalex.org/I193427800","display_name":"Applied Materials (United States)","ror":"https://ror.org/04h1q4c89","country_code":"US","type":"company","lineage":["https://openalex.org/I193427800"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Milan Pesic","raw_affiliation_strings":["Applied Materials Inc.,Santa Clara,CA,USA","Applied Materials Inc., Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Applied Materials Inc.,Santa Clara,CA,USA","institution_ids":["https://openalex.org/I193427800"]},{"raw_affiliation_string":"Applied Materials Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I193427800"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083166491","display_name":"Andrea Padovani","orcid":"https://orcid.org/0000-0003-1145-5257"},"institutions":[{"id":"https://openalex.org/I193427800","display_name":"Applied Materials (United States)","ror":"https://ror.org/04h1q4c89","country_code":"US","type":"company","lineage":["https://openalex.org/I193427800"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Andrea Padovani","raw_affiliation_strings":["Applied Materials Inc.,Santa Clara,CA,USA","Applied Materials Inc., Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Applied Materials Inc.,Santa Clara,CA,USA","institution_ids":["https://openalex.org/I193427800"]},{"raw_affiliation_string":"Applied Materials Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I193427800"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038281784","display_name":"Tommaso Rollo","orcid":"https://orcid.org/0000-0002-9831-9639"},"institutions":[{"id":"https://openalex.org/I193427800","display_name":"Applied Materials (United States)","ror":"https://ror.org/04h1q4c89","country_code":"US","type":"company","lineage":["https://openalex.org/I193427800"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tommaso Rollo","raw_affiliation_strings":["Applied Materials Inc.,Santa Clara,CA,USA","Applied Materials Inc., Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Applied Materials Inc.,Santa Clara,CA,USA","institution_ids":["https://openalex.org/I193427800"]},{"raw_affiliation_string":"Applied Materials Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I193427800"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086222984","display_name":"Bastien Beltrando","orcid":null},"institutions":[{"id":"https://openalex.org/I193427800","display_name":"Applied Materials (United States)","ror":"https://ror.org/04h1q4c89","country_code":"US","type":"company","lineage":["https://openalex.org/I193427800"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bastien Beltrando","raw_affiliation_strings":["Applied Materials Inc.,Santa Clara,CA,USA","Applied Materials Inc., Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Applied Materials Inc.,Santa Clara,CA,USA","institution_ids":["https://openalex.org/I193427800"]},{"raw_affiliation_string":"Applied Materials Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I193427800"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054542726","display_name":"Jack Strand","orcid":"https://orcid.org/0000-0002-4603-6151"},"institutions":[{"id":"https://openalex.org/I45129253","display_name":"University College London","ror":"https://ror.org/02jx3x895","country_code":"GB","type":"education","lineage":["https://openalex.org/I124357947","https://openalex.org/I45129253"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Jack Strand","raw_affiliation_strings":["University College London,Department of Physics and Astronomy,London,UK","Department of Physics and Astronomy, University College London, London, UK"],"affiliations":[{"raw_affiliation_string":"University College London,Department of Physics and Astronomy,London,UK","institution_ids":["https://openalex.org/I45129253"]},{"raw_affiliation_string":"Department of Physics and Astronomy, University College London, London, UK","institution_ids":["https://openalex.org/I45129253"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013324750","display_name":"Parnika Agrawal","orcid":"https://orcid.org/0000-0002-8040-937X"},"institutions":[{"id":"https://openalex.org/I193427800","display_name":"Applied Materials (United States)","ror":"https://ror.org/04h1q4c89","country_code":"US","type":"company","lineage":["https://openalex.org/I193427800"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Parnika Agrawal","raw_affiliation_strings":["Applied Materials Inc.,Santa Clara,CA,USA","Applied Materials Inc., Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Applied Materials Inc.,Santa Clara,CA,USA","institution_ids":["https://openalex.org/I193427800"]},{"raw_affiliation_string":"Applied Materials Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I193427800"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064002062","display_name":"Alexander L. Shluger","orcid":"https://orcid.org/0000-0002-2488-0896"},"institutions":[{"id":"https://openalex.org/I45129253","display_name":"University College London","ror":"https://ror.org/02jx3x895","country_code":"GB","type":"education","lineage":["https://openalex.org/I124357947","https://openalex.org/I45129253"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Alexander Shluger","raw_affiliation_strings":["University College London,Department of Physics and Astronomy,London,UK","Department of Physics and Astronomy, University College London, London, UK"],"affiliations":[{"raw_affiliation_string":"University College London,Department of Physics and Astronomy,London,UK","institution_ids":["https://openalex.org/I45129253"]},{"raw_affiliation_string":"Department of Physics and Astronomy, University College London, London, UK","institution_ids":["https://openalex.org/I45129253"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5003731777","display_name":"Luca Larcher","orcid":"https://orcid.org/0000-0002-9139-349X"},"institutions":[{"id":"https://openalex.org/I193427800","display_name":"Applied Materials (United States)","ror":"https://ror.org/04h1q4c89","country_code":"US","type":"company","lineage":["https://openalex.org/I193427800"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Luca Larcher","raw_affiliation_strings":["Applied Materials Inc.,Santa Clara,CA,USA","Applied Materials Inc., Santa Clara, CA, USA"],"affiliations":[{"raw_affiliation_string":"Applied Materials Inc.,Santa Clara,CA,USA","institution_ids":["https://openalex.org/I193427800"]},{"raw_affiliation_string":"Applied Materials Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I193427800"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5068149790"],"corresponding_institution_ids":["https://openalex.org/I193427800"],"apc_list":null,"apc_paid":null,"fwci":1.1051,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.75980922,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":97},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/discretization","display_name":"Discretization","score":0.7686872482299805},{"id":"https://openalex.org/keywords/nand-gate","display_name":"NAND gate","score":0.7230282425880432},{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.6794651746749878},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5651848316192627},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5511816740036011},{"id":"https://openalex.org/keywords/trap","display_name":"Trap (plumbing)","score":0.5078821778297424},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.48970964550971985},{"id":"https://openalex.org/keywords/charge","display_name":"Charge (physics)","score":0.48629555106163025},{"id":"https://openalex.org/keywords/scaling","display_name":"Scaling","score":0.4376242160797119},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.41715994477272034},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.40130120515823364},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.35883256793022156},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3187524676322937},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26942378282546997},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.24910244345664978},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.2199653685092926},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.17931514978408813},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17772150039672852},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.12029027938842773}],"concepts":[{"id":"https://openalex.org/C73000952","wikidata":"https://www.wikidata.org/wiki/Q17007827","display_name":"Discretization","level":2,"score":0.7686872482299805},{"id":"https://openalex.org/C124296912","wikidata":"https://www.wikidata.org/wiki/Q575178","display_name":"NAND gate","level":3,"score":0.7230282425880432},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.6794651746749878},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5651848316192627},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5511816740036011},{"id":"https://openalex.org/C121099081","wikidata":"https://www.wikidata.org/wiki/Q665580","display_name":"Trap (plumbing)","level":2,"score":0.5078821778297424},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.48970964550971985},{"id":"https://openalex.org/C188082385","wikidata":"https://www.wikidata.org/wiki/Q73792","display_name":"Charge (physics)","level":2,"score":0.48629555106163025},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.4376242160797119},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.41715994477272034},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.40130120515823364},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.35883256793022156},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3187524676322937},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26942378282546997},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.24910244345664978},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.2199653685092926},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.17931514978408813},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17772150039672852},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.12029027938842773},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/imw52921.2022.9779245","is_oa":false,"landing_page_url":"https://doi.org/10.1109/imw52921.2022.9779245","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Memory Workshop (IMW)","raw_type":"proceedings-article"},{"id":"pmh:oai:eprints.ucl.ac.uk.OAI2:10188322","is_oa":false,"landing_page_url":"https://discovery.ucl.ac.uk/id/eprint/10188322/","pdf_url":null,"source":{"id":"https://openalex.org/S4306400024","display_name":"UCL Discovery (University College London)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I45129253","host_organization_name":"University College London","host_organization_lineage":["https://openalex.org/I45129253"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"     In:  2022 IEEE International Memory Workshop (IMW).    IEEE: Dresden, Germany. (2022)     ","raw_type":"Proceedings paper"},{"id":"pmh:oai:iris.unimore.it:11380/1280578","is_oa":true,"landing_page_url":"http://hdl.handle.net/11380/1280578","pdf_url":null,"source":{"id":"https://openalex.org/S4306400718","display_name":"IRIS UNIMORE (University of Modena and Reggio Emilia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I122346577","host_organization_name":"University of Modena and Reggio Emilia","host_organization_lineage":["https://openalex.org/I122346577"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":{"id":"pmh:oai:iris.unimore.it:11380/1280578","is_oa":true,"landing_page_url":"http://hdl.handle.net/11380/1280578","pdf_url":null,"source":{"id":"https://openalex.org/S4306400718","display_name":"IRIS UNIMORE (University of Modena and Reggio Emilia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I122346577","host_organization_name":"University of Modena and Reggio Emilia","host_organization_lineage":["https://openalex.org/I122346577"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"},"sustainable_development_goals":[{"display_name":"Climate action","id":"https://metadata.un.org/sdg/13","score":0.4699999988079071}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1518929885","https://openalex.org/W1625170149","https://openalex.org/W2787833261","https://openalex.org/W3158867774","https://openalex.org/W3164014422","https://openalex.org/W4246043744"],"related_works":["https://openalex.org/W2364741597","https://openalex.org/W1492103595","https://openalex.org/W946352265","https://openalex.org/W3020787026","https://openalex.org/W2334479858","https://openalex.org/W2199813689","https://openalex.org/W1971388572","https://openalex.org/W2370926798","https://openalex.org/W3104199760","https://openalex.org/W4234142113"],"abstract_inverted_index":{"We":[0,49],"investigate":[1],"physical":[2],"mechanisms":[3],"driving":[4],"the":[5,31,41,45,59,94,98,105,141],"retention":[6,87,119],"and":[7,13,26,39,64,89,128,136],"disturb":[8],"of":[9,30,62,93,97,121,140],"charge-trap":[10],"(CT)":[11],"based":[12,15],"ferroelectric-(FE)":[14],"3D":[16,23,73,123],"NAND":[17,24,74],"string.":[18,142],"Combining":[19],"a":[20,53,86],"calibrated":[21,27],"CT":[22],"model":[25,88],"material":[28,33,129],"properties":[29],"FE":[32,72,122],"(extracted":[34],"from":[35],"FE-FinFET),":[36],"we":[37,84],"extrapolate":[38],"compare":[40],"existing":[42],"workhorse":[43],"with":[44,58,113],"low-power,":[46],"high-speed":[47],"contender.":[48],"show":[50,90],"that:":[51],"(1)":[52],"inherently":[54],"discretized":[55],"FE-stabilization":[56],"combined":[57,112],"polycrystalline":[60],"nature":[61],"HZO,":[63],"interface":[65],"charge":[66,102,108],"compensation":[67],"guarantees":[68],"MLC":[69],"capability;":[70],"(2)":[71],"offers":[75],"higher":[76],"ON":[77],"currents":[78],"that":[79,91,109],"enable":[80],"further":[81],"Z-scaling.":[82],"Furthermore,":[83],"develop":[85],"independently":[92],"inherited":[95],"discretization":[96],"storage":[99],"layer,":[100],"lateral":[101],"migration":[103],"(of":[104],"parasitically":[106],"trapped":[107],"stabilizes":[110],"polarization)":[111],"pass":[114],"voltage":[115],"(disturb)":[116],"can":[117],"cause":[118],"loss":[120],"NAND.":[124],"Finally,":[125],"integration":[126],"(layer-cut)":[127],"engineering":[130],"approaches":[131],"are":[132],"suggested":[133],"for":[134],"mitigation":[135],"guaranteeing":[137],"stable":[138],"operation":[139]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":3}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}
