{"id":"https://openalex.org/W2567899417","doi":"https://doi.org/10.1109/iecon.2016.7794105","title":"Monolithic magnetic circuit for MEMS magnetic device","display_name":"Monolithic magnetic circuit for MEMS magnetic device","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2567899417","doi":"https://doi.org/10.1109/iecon.2016.7794105","mag":"2567899417"},"language":"en","primary_location":{"id":"doi:10.1109/iecon.2016.7794105","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iecon.2016.7794105","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018843064","display_name":"Minami Takato","orcid":null},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Minami Takato","raw_affiliation_strings":["Department of Precision Machinery Engineering, Nihon University, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Machinery Engineering, Nihon University, Chiba, Japan","institution_ids":["https://openalex.org/I104946051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089196701","display_name":"Kaito Mishima","orcid":null},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kaito Mishima","raw_affiliation_strings":["Department of Precision Machinery Engineering, Nihon University, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Machinery Engineering, Nihon University, Chiba, Japan","institution_ids":["https://openalex.org/I104946051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002207976","display_name":"Kazuya Kudo","orcid":null},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuya Kudo","raw_affiliation_strings":["Department of Precision Machinery Engineering, Nihon University, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Machinery Engineering, Nihon University, Chiba, Japan","institution_ids":["https://openalex.org/I104946051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101948401","display_name":"Yuxuan Han","orcid":"https://orcid.org/0000-0003-0946-6141"},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuxuan Han","raw_affiliation_strings":["Department of Precision Machinery Engineering, Nihon University, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Machinery Engineering, Nihon University, Chiba, Japan","institution_ids":["https://openalex.org/I104946051"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086546709","display_name":"Ken Saito","orcid":"https://orcid.org/0000-0001-7126-3025"},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ken Saito","raw_affiliation_strings":["Department of Precision Machinery Engineering, Nihon University, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Machinery Engineering, Nihon University, Chiba, Japan","institution_ids":["https://openalex.org/I104946051"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112555796","display_name":"Fumio Uchikoba","orcid":null},"institutions":[{"id":"https://openalex.org/I104946051","display_name":"Nihon University","ror":"https://ror.org/05jk51a88","country_code":"JP","type":"education","lineage":["https://openalex.org/I104946051"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Fumio Uchikoba","raw_affiliation_strings":["Department of Precision Machinery Engineering, Nihon University, Chiba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Precision Machinery Engineering, Nihon University, Chiba, Japan","institution_ids":["https://openalex.org/I104946051"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.15090633,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"4958","last_page":"4963"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.995199978351593,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10278","display_name":"Electric Motor Design and Analysis","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electromagnetic-coil","display_name":"Electromagnetic coil","score":0.728974461555481},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7205073237419128},{"id":"https://openalex.org/keywords/magnetic-circuit","display_name":"Magnetic circuit","score":0.7074301242828369},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5352867841720581},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.526792585849762},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.48090410232543945},{"id":"https://openalex.org/keywords/magnetic-flux","display_name":"Magnetic flux","score":0.47718775272369385},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.4292455017566681},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.296233594417572},{"id":"https://openalex.org/keywords/magnetic-field","display_name":"Magnetic field","score":0.241968035697937},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23017823696136475},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11800181865692139}],"concepts":[{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.728974461555481},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7205073237419128},{"id":"https://openalex.org/C24214142","wikidata":"https://www.wikidata.org/wiki/Q118801","display_name":"Magnetic circuit","level":3,"score":0.7074301242828369},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5352867841720581},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.526792585849762},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.48090410232543945},{"id":"https://openalex.org/C157479481","wikidata":"https://www.wikidata.org/wiki/Q177831","display_name":"Magnetic flux","level":3,"score":0.47718775272369385},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.4292455017566681},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.296233594417572},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.241968035697937},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23017823696136475},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11800181865692139},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iecon.2016.7794105","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iecon.2016.7794105","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8299999833106995,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1966893778","https://openalex.org/W1971096490","https://openalex.org/W1975713948","https://openalex.org/W2026832619","https://openalex.org/W2097353465","https://openalex.org/W2099501149"],"related_works":["https://openalex.org/W1998212182","https://openalex.org/W2509690359","https://openalex.org/W4213069903","https://openalex.org/W2318857760","https://openalex.org/W1983400927","https://openalex.org/W2032245333","https://openalex.org/W2748755948","https://openalex.org/W2806820815","https://openalex.org/W2019931179","https://openalex.org/W2949662573"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"monolithic":[3,49],"magnetic":[4,11,18,26,35,45,76,82,96,118,123,181],"circuits":[5,77,86,128,152],"for":[6,57],"a":[7,30,38,44,116,156,173,194],"micro-electro-mechanical":[8],"system":[9],"(MEMS)":[10],"device.":[12],"The":[13,33,109,120,137,150,167,188,216,226],"problem":[14],"with":[15,172,193],"existing":[16],"miniature":[17,25,39,58,95,101],"devices":[19,208],"is":[20,55,61,87,92,107,113,130,170,183,191,223,235],"the":[21,24,48,64,81,85,90,100,104,133,142,180,186,220,230],"fabrication":[22,65],"of":[23,84,141,219,229],"circuit,":[27,177],"such":[28],"as":[29],"winding":[31],"wire.":[32],"proposed":[34],"circuit":[36,91,112],"has":[37,125,198],"three-dimensional":[40],"coil":[41,204],"structure":[42],"and":[43,89,129,139,146,162,197,212,232,237],"core":[46],"within":[47,132],"structure.":[50],"Multilayer":[51],"ceramic":[52],"technology":[53],"that":[54],"used":[56],"electronic":[59],"elements":[60],"applied":[62,93,114,154],"during":[63],"process.":[66],"In":[67],"this":[68],"paper,":[69],"various":[70],"differently":[71],"shaped":[72],"single-coil":[73],"or":[74],"multi-coil-type":[75,151],"are":[78,144,153,165],"described.":[79],"Moreover,":[80],"flux":[83],"analyzed":[88],"to":[94,115,155],"devices.":[97],"To":[98],"produce":[99],"mechanical":[102],"components,":[103],"MEMS":[105,117,122,134,157,221],"process":[106],"used.":[108],"fabricated":[110],"single-coil-type":[111],"motor.":[119],"developed":[121],"motor":[124,143,222],"three":[126],"multilayered":[127,174],"built":[131],"structural":[135],"component.":[136],"diameter":[138],"height":[140],"4.22":[145],"6.04":[147],"mm,":[148],"respectively.":[149,215,240],"turbine":[158],"generator.":[159],"Both":[160],"single-phase":[161,168,231],"three-phase":[163,189,233],"generators":[164,234],"fabricated.":[166],"generator":[169,190],"combined":[171,192],"step-wise":[175],"shape":[176],"in":[178],"which":[179],"material":[182],"arranged":[184],"around":[185],"magnet.":[187],"separated":[195],"type":[196],"an":[199],"air":[200],"gap":[201],"between":[202],"each":[203],"pattern.":[205],"These":[206],"two":[207],"demonstrate":[209],"rotational":[210,217],"motion":[211],"power":[213,228],"generation,":[214],"speed":[218],"1080":[224],"rpm.":[225],"output":[227],"1.74":[236],"1.41":[238],"\u00b5VA,":[239]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}