{"id":"https://openalex.org/W2085610212","doi":"https://doi.org/10.1109/iecon.2012.6389253","title":"Performance of an electrostatic actuated micromirror in a vacuum and non-vacuum packaging","display_name":"Performance of an electrostatic actuated micromirror in a vacuum and non-vacuum packaging","publication_year":2012,"publication_date":"2012-10-01","ids":{"openalex":"https://openalex.org/W2085610212","doi":"https://doi.org/10.1109/iecon.2012.6389253","mag":"2085610212"},"language":"en","primary_location":{"id":"doi:10.1109/iecon.2012.6389253","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iecon.2012.6389253","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IECON 2012 - 38th Annual Conference on IEEE Industrial Electronics Society","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000313869","display_name":"Imran Khan","orcid":"https://orcid.org/0000-0001-8835-6711"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"I. Khan","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","institution_ids":["https://openalex.org/I185261750"]},{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109264362","display_name":"Jasmine Chong","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"J. Chong","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","institution_ids":["https://openalex.org/I185261750"]},{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111110748","display_name":"R. Ben Mrad","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"R. Ben Mrad","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","institution_ids":["https://openalex.org/I185261750"]},{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023751104","display_name":"Siyuan He","orcid":"https://orcid.org/0000-0002-6954-1206"},"institutions":[{"id":"https://openalex.org/I530967","display_name":"Toronto Metropolitan University","ror":"https://ror.org/05g13zd79","country_code":"CA","type":"education","lineage":["https://openalex.org/I530967"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"S. He","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ONT, Canada","Department of Mechanical and Industrial Engineering, Ryerson University, 350 Victoria Street, Toronto, Ontario M5B 2K3, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ONT, Canada","institution_ids":["https://openalex.org/I530967"]},{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, Ryerson University, 350 Victoria Street, Toronto, Ontario M5B 2K3, Canada","institution_ids":["https://openalex.org/I530967"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075682636","display_name":"Michael J. Schertzer","orcid":"https://orcid.org/0000-0002-3062-9657"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M. J. Schertzer","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ONT, Canada","institution_ids":["https://openalex.org/I185261750"]},{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, 5 King\u00bfs College Road, Ontario, M5S 3G8, Canada","institution_ids":["https://openalex.org/I185261750"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2498,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.61886872,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"3987","last_page":"3990"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/overshoot","display_name":"Overshoot (microwave communication)","score":0.7687652111053467},{"id":"https://openalex.org/keywords/settling-time","display_name":"Settling time","score":0.6984487771987915},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5746108293533325},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5423042178153992},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4345698058605194},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35511112213134766},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26928773522377014},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.15671128034591675},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09009730815887451}],"concepts":[{"id":"https://openalex.org/C2780323453","wikidata":"https://www.wikidata.org/wiki/Q7113957","display_name":"Overshoot (microwave communication)","level":2,"score":0.7687652111053467},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.6984487771987915},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5746108293533325},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5423042178153992},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4345698058605194},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35511112213134766},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26928773522377014},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.15671128034591675},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09009730815887451},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.0},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iecon.2012.6389253","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iecon.2012.6389253","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IECON 2012 - 38th Annual Conference on IEEE Industrial Electronics Society","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.7200000286102295}],"awards":[],"funders":[{"id":"https://openalex.org/F4320310709","display_name":"CMC Microsystems","ror":"https://ror.org/03k70ea39"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1560517892","https://openalex.org/W1978593953","https://openalex.org/W1999702269","https://openalex.org/W2026341891","https://openalex.org/W2045414264","https://openalex.org/W2060072331","https://openalex.org/W2096500209","https://openalex.org/W2119007976","https://openalex.org/W2129000627","https://openalex.org/W2150305454","https://openalex.org/W2157763436","https://openalex.org/W2224458138"],"related_works":["https://openalex.org/W4377820486","https://openalex.org/W2132353065","https://openalex.org/W4377825843","https://openalex.org/W2889951799","https://openalex.org/W2626571124","https://openalex.org/W2381304112","https://openalex.org/W2962749641","https://openalex.org/W3107721637","https://openalex.org/W3184876520","https://openalex.org/W1973539555"],"abstract_inverted_index":{"Experimental":[0],"results":[1,164],"of":[2,110,141],"micromirrors":[3,72,102],"sealed":[4],"in":[5,17,36,84,92,168,181],"vacuum":[6,68,86,100,143],"and":[7,19,33,49,57,69,75,128,162,184,201],"non-vacuum":[8,70],"environments":[9],"are":[10,73,119,189],"presented.":[11],"The":[12,27,39,61,95,112,137,160],"micromirror":[13,28,83,118,145,156,167],"is":[14,20,46,103,146,157],"1.0":[15],"mm":[16],"diameter":[18],"supported":[21],"by":[22],"four":[23],"electrostatic":[24],"repulsive":[25],"actuators.":[26],"exhibits":[29],"linear":[30],"out-of-plane":[31],"motion":[32,35,45,127],"rotational":[34,64],"two":[37],"axes.":[38],"measured":[40],"data":[41],"shows":[42],"that":[43,172],"translational":[44],"71":[47],"\u03bcm":[48,51],"76":[50],"at":[52,78],"200":[53],"V":[54],"for":[55,66,98,115,125,134,153,165],"vacuumed":[56],"non-vacuumed":[58,117,155],"micromirrors,":[59],"respectively.":[60],"maximum":[62],"optical":[63],"displacements":[65],"the":[67,82,88,93,99,116,142,150,154,166,175],"packaged":[71,101,144],"1.0\u00b0":[74],"1.1\u00b0,":[76],"respectively":[77],"160":[79],"V.":[80],"Packaging":[81],"a":[85],"decreases":[87],"squeeze":[89,185],"film":[90,186],"damping":[91,187],"system.":[94],"settling":[96,113,199],"time":[97,200],"75":[104],"ms":[105,121,130],"with":[106,122,131],"an":[107],"average":[108],"overshoot":[109,124,133],"116%.":[111],"times":[114],"2.75":[120],"5%":[123],"downward":[126],"3.32":[129],"48%":[132],"upward":[135],"motion.":[136],"estimated":[138],"resonant":[139,151],"frequency":[140,152],"2900":[147],"Hz,":[148],"whereas":[149],"1400":[158],"Hz.":[159],"static":[161],"dynamic":[163],"reduced":[169],"pressures":[170],"determined":[171],"effects":[173,188],"approaching":[174],"breakdown":[176],"voltage":[177],"become":[178],"evident,":[179],"resulting":[180],"lower":[182],"displacements,":[183],"mitigated,":[190],"leading":[191],"to":[192],"more":[193],"consistent":[194],"performance":[195],"characteristics":[196],"such":[197],"as":[198],"percent":[202],"overshoot.":[203]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}