{"id":"https://openalex.org/W4413555753","doi":"https://doi.org/10.1109/icton67126.2025.11125459","title":"Optimizing Silicon Nitride Waveguide Fabrication for Classical and Quantum Applications","display_name":"Optimizing Silicon Nitride Waveguide Fabrication for Classical and Quantum Applications","publication_year":2025,"publication_date":"2025-07-06","ids":{"openalex":"https://openalex.org/W4413555753","doi":"https://doi.org/10.1109/icton67126.2025.11125459"},"language":"en","primary_location":{"id":"doi:10.1109/icton67126.2025.11125459","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton67126.2025.11125459","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 25th Anniversary International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},"type":"conference-abstract","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067330913","display_name":"Abubaker M. Tareki","orcid":"https://orcid.org/0000-0002-8117-0989"},"institutions":[{"id":"https://openalex.org/I67031392","display_name":"Carleton University","ror":"https://ror.org/02qtvee93","country_code":"CA","type":"education","lineage":["https://openalex.org/I67031392"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Abubaker Tareki","raw_affiliation_strings":["Carleton University,Ottawa,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Carleton University,Ottawa,Canada","institution_ids":["https://openalex.org/I67031392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000069278","display_name":"Khaled Mnaymneh","orcid":"https://orcid.org/0000-0002-1394-1841"},"institutions":[{"id":"https://openalex.org/I67031392","display_name":"Carleton University","ror":"https://ror.org/02qtvee93","country_code":"CA","type":"education","lineage":["https://openalex.org/I67031392"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Khaled Mnaymneh","raw_affiliation_strings":["Carleton University,Ottawa,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Carleton University,Ottawa,Canada","institution_ids":["https://openalex.org/I67031392"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103768346","display_name":"Jiang Weihong","orcid":null},"institutions":[{"id":"https://openalex.org/I67031392","display_name":"Carleton University","ror":"https://ror.org/02qtvee93","country_code":"CA","type":"education","lineage":["https://openalex.org/I67031392"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Jiang Weihong","raw_affiliation_strings":["Carleton University,Ottawa,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Carleton University,Ottawa,Canada","institution_ids":["https://openalex.org/I67031392"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5068415347","display_name":"Connor Kupchak","orcid":"https://orcid.org/0009-0005-2635-4047"},"institutions":[{"id":"https://openalex.org/I67031392","display_name":"Carleton University","ror":"https://ror.org/02qtvee93","country_code":"CA","type":"education","lineage":["https://openalex.org/I67031392"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Connor Kupchak","raw_affiliation_strings":["Carleton University,Ottawa,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Carleton University,Ottawa,Canada","institution_ids":["https://openalex.org/I67031392"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I67031392"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9650999903678894,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7787891626358032},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6100730895996094},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.5860523581504822},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4800513982772827},{"id":"https://openalex.org/keywords/nitride","display_name":"Nitride","score":0.47891533374786377},{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.47513559460639954},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4699345529079437},{"id":"https://openalex.org/keywords/quantum","display_name":"Quantum","score":0.45661917328834534},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3898967504501343},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3038938045501709},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2244076430797577},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.13080185651779175}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7787891626358032},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6100730895996094},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5860523581504822},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4800513982772827},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.47891533374786377},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.47513559460639954},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4699345529079437},{"id":"https://openalex.org/C84114770","wikidata":"https://www.wikidata.org/wiki/Q46344","display_name":"Quantum","level":2,"score":0.45661917328834534},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3898967504501343},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3038938045501709},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2244076430797577},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.13080185651779175},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icton67126.2025.11125459","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton67126.2025.11125459","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 25th Anniversary International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W2606427896","https://openalex.org/W2007805353","https://openalex.org/W2132500134","https://openalex.org/W2384315251","https://openalex.org/W2010953141","https://openalex.org/W4386282660","https://openalex.org/W2135033373","https://openalex.org/W2006846697"],"abstract_inverted_index":{"Addressing":[0],"optical":[1,61,107],"losses":[2,22,37,62],"in":[3,13,63,109],"chip-based":[4],"technologies":[5],"is":[6],"key":[7],"to":[8,96,131],"achieving":[9],"next-generation":[10],"technological":[11],"applications":[12],"classical":[14,20],"and":[15,26,32,41,57],"quantum":[16,35],"applications.":[17],"In":[18],"the":[19,47,97,100,106],"regime,":[21],"greatly":[23],"impact":[24,38],"delay":[25],"phase":[27],"architectures":[28],"needed":[29],"for":[30],"switching":[31],"routing.":[33],"For":[34],"applications,":[36],"state":[39],"fidelity":[40],"increases":[42],"decoherence.":[43],"Here,":[44],"we":[45,104],"investigate":[46],"influence":[48],"of":[49,99],"two":[50],"electron":[51],"beam":[52],"writing":[53],"voltages":[54],"(50":[55],"kV":[56],"100":[58],"kV)":[59],"on":[60],"waveguides":[64],"fabricated":[65],"from":[66],"400":[67],"nm":[68],"thick,":[69],"high-stress":[70],"(~":[71,112],"1.3":[72],"GPa)":[73],"low-pressure":[74],"chemical":[75,117],"vapor":[76,118],"deposition":[77,119],"(LPCVD)":[78],"silicon":[79,89,121,135],"nitride":[80,122,136],"films.":[81,137],"The":[82],"complete":[83],"fabrication":[84],"process":[85,94],"starts":[86],"with":[87],"a":[88],"dioxide":[90],"(SiO2)":[91],"pre-form,":[92],"stress-control":[93],"through":[95],"dicing":[98],"individual":[101],"devices.":[102],"Furthermore,":[103],"evaluate":[105],"loss":[108],"ammonia-free":[110],"thick":[111],"950":[113],"nm)":[114],"plasma":[115],"enhanced":[116],"(PECVD)":[120],"films,":[123],"which":[124],"has":[125],"very":[126],"low":[127],"stress":[128],"when":[129],"compared":[130],"our":[132],"stochiometric":[133],"LPCVD":[134]},"counts_by_year":[],"updated_date":"2026-07-29T09:40:50.615796","created_date":"2025-10-10T00:00:00"}