{"id":"https://openalex.org/W3087981171","doi":"https://doi.org/10.1109/icton51198.2020.9203335","title":"Low Temperature SiN Waveguides Optimization for Photonic Platform","display_name":"Low Temperature SiN Waveguides Optimization for Photonic Platform","publication_year":2020,"publication_date":"2020-07-01","ids":{"openalex":"https://openalex.org/W3087981171","doi":"https://doi.org/10.1109/icton51198.2020.9203335","mag":"3087981171"},"language":"en","primary_location":{"id":"doi:10.1109/icton51198.2020.9203335","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton51198.2020.9203335","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 22nd International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-03517860","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018383556","display_name":"Eva Kempf","orcid":"https://orcid.org/0000-0001-7594-3167"},"institutions":[{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4210095849","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]},{"id":"https://openalex.org/I4210094169","display_name":"STMicroelectronics (India)","ror":"https://ror.org/00ft7bw25","country_code":"IN","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210094169"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR","IN"],"is_corresponding":true,"raw_author_name":"Eva Kempf","raw_affiliation_strings":["STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","STMicroelectronics [Crolles]","Institut des Nanotechnologies de Lyon"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210094169"]},{"raw_affiliation_string":"Institut des Nanotechnologies de Lyon","institution_ids":["https://openalex.org/I2800958632"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028729132","display_name":"Michele Calvo","orcid":null},"institutions":[{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4210095849","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]},{"id":"https://openalex.org/I4210094169","display_name":"STMicroelectronics (India)","ror":"https://ror.org/00ft7bw25","country_code":"IN","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210094169"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR","IN"],"is_corresponding":false,"raw_author_name":"M. Calvo","raw_affiliation_strings":["STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","STMicroelectronics [Crolles]","Institut des Nanotechnologies de Lyon"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210094169"]},{"raw_affiliation_string":"Institut des Nanotechnologies de Lyon","institution_ids":["https://openalex.org/I2800958632"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002488845","display_name":"Florian Domengie","orcid":null},"institutions":[{"id":"https://openalex.org/I4210094169","display_name":"STMicroelectronics (India)","ror":"https://ror.org/00ft7bw25","country_code":"IN","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210094169"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR","IN"],"is_corresponding":false,"raw_author_name":"Florian Domengie","raw_affiliation_strings":["STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","STMicroelectronics [Crolles]"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210094169"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107600846","display_name":"S. Monfray","orcid":null},"institutions":[{"id":"https://openalex.org/I4210094169","display_name":"STMicroelectronics (India)","ror":"https://ror.org/00ft7bw25","country_code":"IN","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210094169"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR","IN"],"is_corresponding":false,"raw_author_name":"Stephane Monfray","raw_affiliation_strings":["STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","STMicroelectronics [Crolles]"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210094169"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091096177","display_name":"F. B\u0153uf","orcid":"https://orcid.org/0000-0002-1710-5170"},"institutions":[{"id":"https://openalex.org/I4210094169","display_name":"STMicroelectronics (India)","ror":"https://ror.org/00ft7bw25","country_code":"IN","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210094169"]},{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR","IN"],"is_corresponding":false,"raw_author_name":"Frederic Boeuf","raw_affiliation_strings":["STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","STMicroelectronics [Crolles]"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 Rue Jean Monnet, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics [Crolles]","institution_ids":["https://openalex.org/I4210094169"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090778486","display_name":"Paul G. Charette","orcid":"https://orcid.org/0000-0003-3604-469X"},"institutions":[{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]},{"id":"https://openalex.org/I4210100562","display_name":"Centre de Nanosciences et de Nanotechnologies","ror":"https://ror.org/00zay3w86","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I204730241","https://openalex.org/I277688954","https://openalex.org/I4210100562"]},{"id":"https://openalex.org/I4387155352","display_name":"Laboratoire Nanotechnologies et Nanosyst\u00e8mes","ror":"https://ror.org/026m44z54","country_code":null,"type":"facility","lineage":["https://openalex.org/I112936343","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I4387155352","https://openalex.org/I48430043","https://openalex.org/I59692284","https://openalex.org/I899635006"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"Paul Charette","raw_affiliation_strings":["Laboratoire Nanotechnologies Nanosyst\u00e8mes (LN2)-CNRS UMI-3463, Universit\u00e9 de Sherbrooke, Sherbrooke, Qu\u00e9bec, Canada","Laboratoire Nanotechnologies et Nanosyst\u00e8mes [Sherbrooke]"],"affiliations":[{"raw_affiliation_string":"Laboratoire Nanotechnologies Nanosyst\u00e8mes (LN2)-CNRS UMI-3463, Universit\u00e9 de Sherbrooke, Sherbrooke, Qu\u00e9bec, Canada","institution_ids":["https://openalex.org/I135117807"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies et Nanosyst\u00e8mes [Sherbrooke]","institution_ids":["https://openalex.org/I4210100562","https://openalex.org/I4387155352","https://openalex.org/I135117807"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111580569","display_name":"R. Orobtchouk","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4210095849","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]},{"id":"https://openalex.org/I48430043","display_name":"Institut National des Sciences Appliqu\u00e9es de Lyon","ror":"https://ror.org/050jn9y42","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I48430043"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Regis Orobtchouk","raw_affiliation_strings":["Institut des Nanotechnologies de Lyon (INL), CNRS UMR5270, INSA de Lyon, 7 avenue Jean Capelle, Villeurbanne Cedex, France","Institut des Nanotechnologies de Lyon"],"affiliations":[{"raw_affiliation_string":"Institut des Nanotechnologies de Lyon (INL), CNRS UMR5270, INSA de Lyon, 7 avenue Jean Capelle, Villeurbanne Cedex, France","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I48430043","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Institut des Nanotechnologies de Lyon","institution_ids":["https://openalex.org/I2800958632"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5018383556"],"corresponding_institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I4210094169","https://openalex.org/I4210104693"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.10480626,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"17","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10988","display_name":"Advanced Fiber Laser Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10988","display_name":"Advanced Fiber Laser Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.7166196703910828},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"Plasma-enhanced chemical vapor deposition","score":0.5995178818702698},{"id":"https://openalex.org/keywords/fan-out","display_name":"Fan-out","score":0.49875855445861816},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.48865631222724915},{"id":"https://openalex.org/keywords/refractive-index","display_name":"Refractive index","score":0.44475480914115906},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4041493535041809},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3591189384460449},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3501889407634735},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.2954944968223572},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23242515325546265}],"concepts":[{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.7166196703910828},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.5995178818702698},{"id":"https://openalex.org/C68812741","wikidata":"https://www.wikidata.org/wiki/Q636609","display_name":"Fan-out","level":3,"score":0.49875855445861816},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48865631222724915},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.44475480914115906},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4041493535041809},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3591189384460449},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3501889407634735},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.2954944968223572},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23242515325546265},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icton51198.2020.9203335","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton51198.2020.9203335","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 22nd International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-03517860v1","is_oa":true,"landing_page_url":"https://hal.science/hal-03517860","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"22nd International Conference on Transparent Optical Networks (ICTON 2020), Jul 2020, Bari, Italy. &#x27E8;10.1109/ICTON51198.2020.9203335&#x27E9;","raw_type":"Conference papers"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-03517860v1","is_oa":true,"landing_page_url":"https://hal.science/hal-03517860","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"22nd International Conference on Transparent Optical Networks (ICTON 2020), Jul 2020, Bari, Italy. &#x27E8;10.1109/ICTON51198.2020.9203335&#x27E9;","raw_type":"Conference papers"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W2003841863","https://openalex.org/W2047639939","https://openalex.org/W2110609553","https://openalex.org/W2166831233","https://openalex.org/W2221521666","https://openalex.org/W2344862545","https://openalex.org/W2756058399","https://openalex.org/W2766566884","https://openalex.org/W2786482165","https://openalex.org/W2802777054","https://openalex.org/W2803569090"],"related_works":["https://openalex.org/W2124081025","https://openalex.org/W1963703370","https://openalex.org/W2315275742","https://openalex.org/W142624727","https://openalex.org/W2026758251","https://openalex.org/W2081807968","https://openalex.org/W1942803881","https://openalex.org/W2000923380","https://openalex.org/W2317723750","https://openalex.org/W2003990680"],"abstract_inverted_index":{"Integration":[0],"of":[1,12,28,46,50,81,142,156,177,199],"SiN":[2,52],"on":[3,43,126],"Si":[4],"photonics":[5],"platform":[6,139],"becomes":[7],"attractive":[8],"for":[9,25,111],"3D":[10],"integration":[11],"different":[13,51],"waveguide":[14],"levels":[15],"in":[16],"an":[17],"optical":[18,48,84],"routing":[19,85],"circuit,":[20],"and":[21,59,94,105,119,189,201],"can":[22],"be":[23,149],"used":[24,172],"the":[26,44,47,74,127,154,166,175],"realization":[27],"athermal":[29],"devices":[30],"needing":[31],"specifics":[32],"group":[33,36],"index":[34],"or":[35],"velocity":[37],"dispersion.":[38],"This":[39,170],"paper":[40],"is":[41],"focused":[42],"determination":[45],"properties":[49],"deposited":[53],"by":[54],"PVD":[55],"(Plasma":[56,61],"Vapor":[57,64],"Deposition)":[58,65],"PECVD":[60],"Enhanced":[62],"Plasma":[63],"equipment":[66],"with":[67,76,108,145,165],"temperatures":[68],"lower":[69],"than":[70],"400\u00b0C":[71],"to":[72,101,173,181,192],"keep":[73],"compatibility":[75],"CMOS":[77],"process.":[78],"A":[79],"set":[80],"designs":[82],"including":[83],"basic":[86],"building":[87],"blocks":[88],"such":[89],"as":[90],"bends,":[91],"MMI":[92],"splitters":[93],"asymmetric":[95],"Mach-Zehnder":[96],"interferometer":[97],"has":[98],"been":[99],"designed":[100],"determine":[102],"propagation":[103,106,176],"losses":[104],"constants":[107],"high":[109],"accuracy,":[110],"a":[112],"large":[113],"spectral":[114],"range,":[115],"around":[116],"1.31":[117],"\u03bcm":[118,121],"1.55":[120],"[1].":[122],"Devices":[123],"were":[124],"manufactured":[125],"STMicroelectronics":[128],"DAPHNE":[129],"(Datacom":[130],"Advanced":[131],"Photonics":[132],"Nanoscale":[133],"Environment)":[134],"300":[135],"mm":[136],"Photonic":[137],"R&D":[138],"[2].":[140],"Comparison":[141],"experimental":[143],"data":[144],"theoretical":[146],"models":[147],"will":[148],"made.":[150],"Especially,":[151],"we":[152],"discuss":[153],"development":[155],"Finite":[157],"Difference":[158],"Full":[159],"Vectorial":[160],"mode":[161],"solvers":[162],"[3]-[4]":[163],"coupled":[164],"Mode":[167],"Matching":[168],"method.":[169],"method,":[171],"simulate":[174],"light,":[178],"also":[179],"allows":[180],"evaluate":[182],"side":[183],"wall":[184],"roughness":[185],"contributions,":[186],"Rayleigh":[187],"scattering":[188],"absorption":[190],"due":[191],"2":[193],"<sup":[194],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[195],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">nd</sup>":[196],"harmonic":[197],"vibrations":[198],"Si-OH":[200],"N-H":[202],"bonds.":[203]},"counts_by_year":[],"updated_date":"2026-04-19T08:26:33.389920","created_date":"2025-10-10T00:00:00"}