{"id":"https://openalex.org/W2974528547","doi":"https://doi.org/10.1109/icton.2019.8840268","title":"Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics","display_name":"Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics","publication_year":2019,"publication_date":"2019-07-01","ids":{"openalex":"https://openalex.org/W2974528547","doi":"https://doi.org/10.1109/icton.2019.8840268","mag":"2974528547"},"language":"en","primary_location":{"id":"doi:10.1109/icton.2019.8840268","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2019.8840268","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 21st International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111580569","display_name":"R. Orobtchouk","orcid":null},"institutions":[{"id":"https://openalex.org/I100532134","display_name":"Universit\u00e9 Claude Bernard Lyon 1","ror":"https://ror.org/029brtt94","country_code":"FR","type":"education","lineage":["https://openalex.org/I100532134","https://openalex.org/I203339264"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"R. Orobtchouk","raw_affiliation_strings":["INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I100532134","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015734865","display_name":"Ali Belarouci","orcid":"https://orcid.org/0000-0002-9818-5976"},"institutions":[{"id":"https://openalex.org/I100532134","display_name":"Universit\u00e9 Claude Bernard Lyon 1","ror":"https://ror.org/029brtt94","country_code":"FR","type":"education","lineage":["https://openalex.org/I100532134","https://openalex.org/I203339264"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Belarouci","raw_affiliation_strings":["INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I100532134","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083740586","display_name":"Bertrand Vilquin","orcid":"https://orcid.org/0000-0002-7404-0019"},"institutions":[{"id":"https://openalex.org/I100532134","display_name":"Universit\u00e9 Claude Bernard Lyon 1","ror":"https://ror.org/029brtt94","country_code":"FR","type":"education","lineage":["https://openalex.org/I100532134","https://openalex.org/I203339264"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"B. Vilquin","raw_affiliation_strings":["INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I100532134","https://openalex.org/I1294671590"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109194653","display_name":"P\u00e9dro Rojo Romeo","orcid":null},"institutions":[{"id":"https://openalex.org/I100532134","display_name":"Universit\u00e9 Claude Bernard Lyon 1","ror":"https://ror.org/029brtt94","country_code":"FR","type":"education","lineage":["https://openalex.org/I100532134","https://openalex.org/I203339264"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2800958632","display_name":"Institut des Nanotechnologies de Lyon","ror":"https://ror.org/04jsk0b74","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I203339264","https://openalex.org/I2800958632","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I48430043","https://openalex.org/I59692284"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Rojo Romeo","raw_affiliation_strings":["INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"INSA, Institut des Nanotechnologies de Lyon, CNRS UMR5270, University of Lyon, Villeurbanne","institution_ids":["https://openalex.org/I2800958632","https://openalex.org/I100532134","https://openalex.org/I1294671590"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.09513379,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6603450179100037},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6491986513137817},{"id":"https://openalex.org/keywords/silicon-photonics","display_name":"Silicon photonics","score":0.6235058307647705},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6096667051315308},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.587921142578125},{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.5702943801879883},{"id":"https://openalex.org/keywords/amorphous-silicon","display_name":"Amorphous silicon","score":0.5616569519042969},{"id":"https://openalex.org/keywords/refractive-index","display_name":"Refractive index","score":0.4849286377429962},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.482523649930954},{"id":"https://openalex.org/keywords/amorphous-solid","display_name":"Amorphous solid","score":0.45936721563339233},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.4538775682449341},{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"Sputter deposition","score":0.4307788610458374},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3776094913482666},{"id":"https://openalex.org/keywords/crystalline-silicon","display_name":"Crystalline silicon","score":0.25987809896469116},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.2165732979774475},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.18267500400543213},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.168808251619339},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.13731789588928223},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08264175057411194}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6603450179100037},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6491986513137817},{"id":"https://openalex.org/C119423029","wikidata":"https://www.wikidata.org/wiki/Q3749103","display_name":"Silicon photonics","level":3,"score":0.6235058307647705},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6096667051315308},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.587921142578125},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.5702943801879883},{"id":"https://openalex.org/C2776390347","wikidata":"https://www.wikidata.org/wiki/Q474163","display_name":"Amorphous silicon","level":4,"score":0.5616569519042969},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.4849286377429962},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.482523649930954},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.45936721563339233},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.4538775682449341},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.4307788610458374},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3776094913482666},{"id":"https://openalex.org/C2779667780","wikidata":"https://www.wikidata.org/wiki/Q18206302","display_name":"Crystalline silicon","level":3,"score":0.25987809896469116},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.2165732979774475},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18267500400543213},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.168808251619339},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.13731789588928223},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08264175057411194},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icton.2019.8840268","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2019.8840268","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 21st International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-02400096v1","is_oa":false,"landing_page_url":"https://hal.science/hal-02400096","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, &#x27E8;10.1109/ICTON.2019.8840268&#x27E9;","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.49000000953674316,"id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2003841863","https://openalex.org/W2015584127","https://openalex.org/W2037530588"],"related_works":["https://openalex.org/W2104300577","https://openalex.org/W4206445530","https://openalex.org/W2771786520","https://openalex.org/W2174354966","https://openalex.org/W2810180604","https://openalex.org/W2325281603","https://openalex.org/W2944964251","https://openalex.org/W2012754971","https://openalex.org/W3107079038","https://openalex.org/W626562494"],"abstract_inverted_index":{"Rapid":[0],"progress":[1],"of":[2,25,30,56,59,63,88,102,116,126,187,195,209,215,275,278,284,290,296,309,350,363,396],"Silicon":[3,90],"photonics":[4],"circuits":[5],"this":[6],"last":[7],"decade":[8],"makes":[9],"it":[10],"as":[11,74],"a":[12,45,57,64,89,264,276,365,389,393,397],"key":[13],"enabling":[14],"technology":[15],"for":[16,110,147,233,316],"data":[17],"communications.":[18],"In":[19,379],"order":[20,380],"to":[21,337,372,381],"increase":[22],"optical":[23,234],"functionalities":[24],"such":[26],"circuits,":[27],"monolithic":[28],"integration":[29,55],"new":[31,394],"materials":[32,73],"[1]-[3]":[33],"having":[34],"different":[35,417],"physical":[36],"properties":[37],"is":[38,42,108,120,136,140,155],"challenging.":[39],"This":[40,138],"study":[41],"focused":[43],"on":[44,86,91,177,415],"generic":[46],"waveguide":[47,128,154],"configuration":[48],"called":[49],"\"Half":[50],"Etch":[51],"Waveguide\"":[52],"(HEW)":[53],"allowing":[54],"stack":[58],"2":[60],"layers":[61],"composed":[62],"High":[65],"Band":[66],"Gap":[67],"(HBG)":[68],"and":[69,81,83,114,217,229,241,248,287,293,312,319,370,403],"low":[70,398],"refractive":[71],"index":[72],"HFO":[75],"<sub":[76,269,321],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[77,270,322],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[78,271,323],",":[79],"AlN,":[80],"SiC":[82],"amorphous":[84,161],"silicon":[85,162],"top":[87],"Insulator":[92],"(SOI)":[93],"substrate":[94],"(see":[95],"Fig.":[96],"1a).":[97],"Advantages":[98],"HEW":[99],"are":[100,243,261,305,326,335,406],"that:-Interaction":[101],"light":[103,117],"with":[104,132,142,213,328,377,392],"HBG":[105,119,168,179,216,357],"active":[106],"material":[107,180],"maximized":[109],"both":[111,291],"polarizations":[112],"(TE":[113],"TM)":[115],"because":[118],"located":[121],"in":[122,152,237,250,263,306,356,407],"the":[123,127,130,133,143,148,153,160,178,196,210,251,282,297,307,343,348,351,361,364,386,416],"central":[124],"part":[125],"where":[129],"overlap":[131],"TE-like":[134],"mode":[135,330],"optimum.":[137],"effect":[139,145],"increased":[141],"slot":[144],"occurring":[146],"TM-like":[149],"mode.--Light":[150],"confinement":[151],"provided":[156],"by":[157,219,245,254,342,347,360,385],"etching":[158],"only":[159],"(a-Si)":[163],"upper":[164],"layer":[165,253,358,367,401],"that":[166,181,302],"preserves":[167],"material.":[169],"Also":[170],"lateral":[171],"electrodes":[172],"can":[173],"be":[174,413],"placed":[175],"directly":[176],"overcomes":[182],"capacitance":[183],"parasitic":[184],"effects":[185],"responsible":[186],"high":[188],"speed":[189],"limitations.":[190],"Figure":[191],"1:(a)":[192],"Cross":[193],"section":[194],"guiding":[197],"structure":[198],"(a-Si/LR/SOI);":[199],"(b)":[200],"MMI":[201],"splitter;(c)":[202],"Asymmetric":[203],"Mach-Zehnder;":[204],"(d)":[205],"Racetrack":[206],"resonator.":[207],"Fabrication":[208],"devices":[211,260,280],"starts":[212],"deposition":[214,362,402],"a-Si":[218,252,400],"Low-cost":[220],"techniques:":[221],"RF":[222],"magnetron":[223],"sputtering":[224],"and/or":[225],"sol-gel":[226],"deposition.":[227],"Waveguides":[228],"basic":[230],"building":[231],"blocks":[232],"routings":[235],"shown":[236],"Figs.":[238],"1b,":[239],"1c":[240],"1d":[242],"realized":[244],"e-beam":[246,352],"lithography":[247,353,405],"transferred":[249],"Reactive":[255],"Ionic":[256],"Etching":[257],"(RIE).":[258],"Finally,":[259],"encapsulated":[262],"1":[265],"micron":[266],"PECVD":[267],"SiO":[268],"cap":[272],"layer.Optical":[273],"characterizations":[274,411],"set":[277],"test":[279],"allow":[281],"determination":[283],"propagation":[285,303,339],"losses":[286,304,340],"dispersion":[288,375],"laws":[289,376],"straight":[292],"bend":[294],"parts":[295],"waveguides.":[298],"First":[299],"measurements":[300],"show":[301],"range":[308],"5,":[310],"8":[311],"12":[313],"dB/cm,":[314],"respectively,":[315],"SiC,":[317],"AlN":[318],"HfO":[320],".":[324],"Modellings":[325],"performed":[327,414],"home-made":[329],"solvers":[331,334],"[4].":[332],"Mode":[333],"used":[336],"calculate":[338],"originated":[341],"punctual":[344],"defects":[345,383],"induced":[346,384],"stitching":[349],"(~1.3":[354],"dB/cm),":[355],"involved":[359],"-Si":[366],"(~3":[368],"dB/cm)":[369],"also":[371],"compare":[373],"experimental":[374],"theory.":[378],"overcome":[382],"fabrication":[387],"process,":[388],"next":[390],"run":[391],"recipe":[395],"loss":[399],"laser":[404],"progress.":[408],"Optical":[409],"non-linear":[410],"will":[412],"samples.":[418]},"counts_by_year":[],"updated_date":"2026-07-02T09:51:11.867554","created_date":"2025-10-10T00:00:00"}