{"id":"https://openalex.org/W2752689825","doi":"https://doi.org/10.1109/icton.2017.8025046","title":"Thin phase tailoring of As-Te phase change materials","display_name":"Thin phase tailoring of As-Te phase change materials","publication_year":2017,"publication_date":"2017-07-01","ids":{"openalex":"https://openalex.org/W2752689825","doi":"https://doi.org/10.1109/icton.2017.8025046","mag":"2752689825"},"language":"en","primary_location":{"id":"doi:10.1109/icton.2017.8025046","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2017.8025046","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 19th International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000134459","display_name":"Leonid Mochalov","orcid":"https://orcid.org/0000-0002-7842-8563"},"institutions":[{"id":"https://openalex.org/I4210138365","display_name":"Nizhny Novgorod State Technical University","ror":"https://ror.org/037d0vf92","country_code":"RU","type":"education","lineage":["https://openalex.org/I4210138365"]},{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"Leonid Mochalov","raw_affiliation_strings":["Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia","Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Nizhny Novgorod, Russia"],"affiliations":[{"raw_affiliation_string":"Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]},{"raw_affiliation_string":"Nizhny Novgorod State Technical University n.a. R.E. Alekseev, Nizhny Novgorod, Russia","institution_ids":["https://openalex.org/I4210138365"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015576044","display_name":"\u0410. \u0412. \u041d\u0435\u0436\u0434\u0430\u043d\u043e\u0432","orcid":"https://orcid.org/0000-0002-7484-106X"},"institutions":[{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Aleksey Nezhdanov","raw_affiliation_strings":["Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia"],"affiliations":[{"raw_affiliation_string":"Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5036160473","display_name":"\u0410. \u0418. \u041c\u0430\u0448\u0438\u043d","orcid":"https://orcid.org/0000-0001-5786-5871"},"institutions":[{"id":"https://openalex.org/I79563041","display_name":"N. I. Lobachevsky State University of Nizhny Novgorod","ror":"https://ror.org/01bb1zm18","country_code":"RU","type":"education","lineage":["https://openalex.org/I79563041"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Aleksandr Mashin","raw_affiliation_strings":["Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia"],"affiliations":[{"raw_affiliation_string":"Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia","institution_ids":["https://openalex.org/I79563041"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5000134459"],"corresponding_institution_ids":["https://openalex.org/I4210138365","https://openalex.org/I79563041"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.097774,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10590","display_name":"Chalcogenide Semiconductor Thin Films","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10939","display_name":"Crystal Structures and Properties","score":0.9940000176429749,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.5833266973495483},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"Plasma-enhanced chemical vapor deposition","score":0.4717370271682739},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.465536504983902},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4501785635948181},{"id":"https://openalex.org/keywords/chalcogenide","display_name":"Chalcogenide","score":0.4291936159133911},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.41092824935913086},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.32807981967926025},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.28810667991638184},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2737298309803009},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.20971834659576416},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.19954857230186462},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.17499232292175293}],"concepts":[{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.5833266973495483},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.4717370271682739},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.465536504983902},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4501785635948181},{"id":"https://openalex.org/C2778177714","wikidata":"https://www.wikidata.org/wiki/Q898920","display_name":"Chalcogenide","level":2,"score":0.4291936159133911},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.41092824935913086},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.32807981967926025},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.28810667991638184},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2737298309803009},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20971834659576416},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.19954857230186462},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.17499232292175293},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icton.2017.8025046","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2017.8025046","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 19th International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation","score":0.5699999928474426}],"awards":[],"funders":[{"id":"https://openalex.org/F4320324099","display_name":"Russian Science Foundation","ror":"https://ror.org/03y2gwe85"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W75242704","https://openalex.org/W1616004029","https://openalex.org/W1980746936","https://openalex.org/W1990828084","https://openalex.org/W2003215406","https://openalex.org/W2019032411","https://openalex.org/W2034431514","https://openalex.org/W2077305827","https://openalex.org/W2323741085","https://openalex.org/W2398404849","https://openalex.org/W2479057198","https://openalex.org/W2531574262","https://openalex.org/W2550738973"],"related_works":["https://openalex.org/W2220684565","https://openalex.org/W2227000312","https://openalex.org/W2149914063","https://openalex.org/W1666926046","https://openalex.org/W647748641","https://openalex.org/W4366222751","https://openalex.org/W4383868380","https://openalex.org/W2971701988","https://openalex.org/W2909468184","https://openalex.org/W2797945640"],"abstract_inverted_index":{"The":[0,30,105,131],"possibility":[1],"of":[2,4,15,20,24,37,57,79,98,112,144,150],"usage":[3],"Plasma-Enhanced":[5],"Chemical":[6],"Vapor":[7],"Deposition":[8],"(PECVD)":[9],"has":[10,101,153],"been":[11,102,135,154],"demonstrated":[12],"in":[13,116,127],"terms":[14],"its":[16],"effectiveness":[17],"for":[18],"preparation":[19],"As-Te":[21],"chalcogenide":[22],"films":[23,132],"different":[25],"chemical":[26],"and":[27,39,54,73,83,93,123,156],"phase":[28,119,151],"composition.":[29],"samples":[31],"were":[32,108],"synthesized":[33],"via":[34],"direct":[35],"interaction":[36],"arsenic":[38],"tellurium":[40],"vapors":[41],"into":[42],"low-temperature":[43],"non-equilibrium":[44],"RF":[45],"(40":[46],"MHz)":[47],"plasma":[48,129],"discharge":[49],"at":[50],"reduced":[51],"pressure.":[52],"Phase":[53],"structural":[55],"evolution":[56],"As":[58,84],"<sub":[59,63,85,89],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[60,64,86,90],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">x</sub>":[61],"Te":[62,88],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">100-x</sub>":[65],"films,":[66],"(where":[67],"x":[68],"=":[69],"31,":[70],"35,":[71],"38,":[72],"49),":[74],"based":[75],"on":[76],"equilibrium":[77],"coexistence":[78],"two":[80],"phases":[81],"(AsTe":[82],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[87],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[91],")":[92],"implemented":[94],"by":[95,138],"gradual":[96],"change":[97],"deposition":[99],"parameters":[100,107],"carried":[103],"out.":[104],"variable":[106],"as":[109,120],"the":[110,113,117,121,124,128,142],"ratio":[111],"initial":[114],"substances":[115],"gas":[118],"temperature":[122],"electron":[125],"density":[126],"discharge.":[130],"obtained":[133],"have":[134],"also":[136],"modified":[137],"laser":[139],"irradiation":[140],"with":[141],"wavelength":[143],"632.8":[145],"nm.":[146],"A":[147],"possible":[148],"mechanism":[149],"modification":[152],"proposed":[155],"discussed.":[157]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}