{"id":"https://openalex.org/W1520831625","doi":"https://doi.org/10.1109/icton.2015.7193701","title":"AlOx/AlGaAs technology for multi-plane integrated photonic devices","display_name":"AlOx/AlGaAs technology for multi-plane integrated photonic devices","publication_year":2015,"publication_date":"2015-07-01","ids":{"openalex":"https://openalex.org/W1520831625","doi":"https://doi.org/10.1109/icton.2015.7193701","mag":"1520831625"},"language":"en","primary_location":{"id":"doi:10.1109/icton.2015.7193701","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2015.7193701","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 17th International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5089573077","display_name":"S. Calvez","orcid":"https://orcid.org/0000-0001-7788-5909"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Calvez","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001122240","display_name":"Ga\u00ebl Lafleur","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Lafleur","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021692634","display_name":"Alexandre Larrue","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Larrue","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005638697","display_name":"Pierre-Fran\u00e7ois Calmon","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P.-F Calmon","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046095264","display_name":"Alexandre Arnoult","orcid":"https://orcid.org/0000-0001-8240-8269"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Arnoult","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021262734","display_name":"Olivier Gauthier\u2010Lafaye","orcid":"https://orcid.org/0000-0003-2705-8811"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"O. Gauthier-Lafaye","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108166983","display_name":"Guilhem Almuneau","orcid":"https://orcid.org/0000-0003-1340-3629"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Almuneau","raw_affiliation_strings":["CNRS, LAAS, Toulouse, France","Univ de Toulouse, LAAS, Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I190497903","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"Univ de Toulouse, LAAS, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I190497903"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.02160874,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"391","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9857000112533569,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6883233785629272},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6881506443023682},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6793015003204346},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.6727439761161804},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.5579586625099182},{"id":"https://openalex.org/keywords/semiconductor","display_name":"Semiconductor","score":0.48609495162963867},{"id":"https://openalex.org/keywords/plane","display_name":"Plane (geometry)","score":0.44717004895210266},{"id":"https://openalex.org/keywords/anisotropy","display_name":"Anisotropy","score":0.4409422278404236},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.42115306854248047},{"id":"https://openalex.org/keywords/engineering-physics","display_name":"Engineering physics","score":0.3279656767845154},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2922399342060089},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17786762118339539},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09155702590942383}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6883233785629272},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6881506443023682},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6793015003204346},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.6727439761161804},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.5579586625099182},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.48609495162963867},{"id":"https://openalex.org/C17825722","wikidata":"https://www.wikidata.org/wiki/Q17285","display_name":"Plane (geometry)","level":2,"score":0.44717004895210266},{"id":"https://openalex.org/C85725439","wikidata":"https://www.wikidata.org/wiki/Q466686","display_name":"Anisotropy","level":2,"score":0.4409422278404236},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.42115306854248047},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.3279656767845154},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2922399342060089},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17786762118339539},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09155702590942383},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icton.2015.7193701","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icton.2015.7193701","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 17th International Conference on Transparent Optical Networks (ICTON)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-01768266v1","is_oa":false,"landing_page_url":"https://laas.hal.science/hal-01768266","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2015 17th International Conference on Transparent Optical Networks (ICTON), Jul 2015, Budapest, Hungary. 4p., ⟨10.1109/ICTON.2015.7193701⟩","raw_type":"Conference papers"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1504911167","https://openalex.org/W1991521478","https://openalex.org/W2001863818","https://openalex.org/W2009729770","https://openalex.org/W2010350784","https://openalex.org/W2012385622","https://openalex.org/W2027301026","https://openalex.org/W2055829994","https://openalex.org/W2063064573","https://openalex.org/W2067372333","https://openalex.org/W2069684840","https://openalex.org/W2072507024","https://openalex.org/W2093914900","https://openalex.org/W2112491157","https://openalex.org/W2113891479","https://openalex.org/W2135420070","https://openalex.org/W2138119890","https://openalex.org/W2163116013","https://openalex.org/W2322954860"],"related_works":["https://openalex.org/W2059751975","https://openalex.org/W2765328031","https://openalex.org/W2580504822","https://openalex.org/W3099810362","https://openalex.org/W2330370671","https://openalex.org/W4294945973","https://openalex.org/W1554328953","https://openalex.org/W4384834233","https://openalex.org/W2163243599","https://openalex.org/W4245281580"],"abstract_inverted_index":{"The":[0],"III-V":[1],"semiconductor":[2],"/oxide":[3],"technology":[4,66],"has":[5],"become":[6],"the":[7,21,28,48,53],"standard":[8],"fabrication":[9],"technique":[10],"for":[11],"Vertical-Cavity":[12],"Surface-Emitting":[13],"Lasers.":[14],"Current":[15],"research":[16],"aims":[17],"to":[18,74,88],"further":[19],"enhance":[20],"performance":[22],"of":[23,30,47,92],"these":[24],"emitters":[25],"and":[26],"diversify":[27],"range":[29],"devices":[31],"that":[32,64],"can":[33,67,85],"be":[34,68,86],"made":[35],"using":[36],"this":[37,40,65],"technology.":[38],"In":[39],"paper,":[41],"we":[42,62],"present":[43],"a":[44],"new":[45],"model":[46],"oxidation":[49],"process":[50],"which":[51,84],"includes":[52],"anisotropic":[54],"behaviour":[55],"observed":[56],"during":[57],"conventional":[58],"lateral":[59],"oxidation.":[60],"Furthermore,":[61],"demonstrate":[63],"used":[69],"as":[70],"an":[71,82],"innovative":[72],"method":[73],"make":[75],"micro-disk":[76],"resonators":[77],"with":[78],"vertically-coupled":[79],"access":[80],"waveguides,":[81],"approach":[83],"generalised":[87],"fabricate":[89],"other":[90],"types":[91],"multi-plane":[93],"photonic":[94],"devices.":[95]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}