{"id":"https://openalex.org/W7130593407","doi":"https://doi.org/10.1109/ictc66702.2025.11388461","title":"Reinforcement Learning for Semiconductor Wafer Scheduling","display_name":"Reinforcement Learning for Semiconductor Wafer Scheduling","publication_year":2025,"publication_date":"2025-10-14","ids":{"openalex":"https://openalex.org/W7130593407","doi":"https://doi.org/10.1109/ictc66702.2025.11388461"},"language":null,"primary_location":{"id":"doi:10.1109/ictc66702.2025.11388461","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ictc66702.2025.11388461","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 16th International Conference on Information and Communication Technology Convergence (ICTC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5126407111","display_name":"Hyojun Ahn","orcid":null},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyojun Ahn","raw_affiliation_strings":["Korea University,Department of Electrical and Computer Engineering,Seoul,Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Korea University,Department of Electrical and Computer Engineering,Seoul,Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059065977","display_name":"Tae Hoon Lee","orcid":"https://orcid.org/0000-0002-3545-9183"},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Tae Hoon Lee","raw_affiliation_strings":["Korea University,Department of Electrical and Computer Engineering,Seoul,Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Korea University,Department of Electrical and Computer Engineering,Seoul,Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5126424237","display_name":"Joongheon Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Joongheon Kim","raw_affiliation_strings":["Korea University,Department of Electrical and Computer Engineering,Seoul,Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Korea University,Department of Electrical and Computer Engineering,Seoul,Republic of Korea","institution_ids":["https://openalex.org/I197347611"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I197347611"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"143","last_page":"145"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.8546000123023987,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.8546000123023987,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.033900000154972076,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12176","display_name":"Optimization and Packing Problems","score":0.017899999395012856,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.695900022983551},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6915000081062317},{"id":"https://openalex.org/keywords/reinforcement-learning","display_name":"Reinforcement learning","score":0.6187999844551086},{"id":"https://openalex.org/keywords/markov-decision-process","display_name":"Markov decision process","score":0.6136999726295471},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.5820000171661377},{"id":"https://openalex.org/keywords/scalability","display_name":"Scalability","score":0.5313000082969666},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.47380000352859497},{"id":"https://openalex.org/keywords/dynamic-priority-scheduling","display_name":"Dynamic priority scheduling","score":0.4377000033855438}],"concepts":[{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.695900022983551},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6915000081062317},{"id":"https://openalex.org/C97541855","wikidata":"https://www.wikidata.org/wiki/Q830687","display_name":"Reinforcement learning","level":2,"score":0.6187999844551086},{"id":"https://openalex.org/C106189395","wikidata":"https://www.wikidata.org/wiki/Q176789","display_name":"Markov decision process","level":3,"score":0.6136999726295471},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5995000004768372},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.5820000171661377},{"id":"https://openalex.org/C48044578","wikidata":"https://www.wikidata.org/wiki/Q727490","display_name":"Scalability","level":2,"score":0.5313000082969666},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.47380000352859497},{"id":"https://openalex.org/C107568181","wikidata":"https://www.wikidata.org/wiki/Q5319000","display_name":"Dynamic priority scheduling","level":3,"score":0.4377000033855438},{"id":"https://openalex.org/C161406801","wikidata":"https://www.wikidata.org/wiki/Q963635","display_name":"Reentrancy","level":2,"score":0.3968999981880188},{"id":"https://openalex.org/C177606310","wikidata":"https://www.wikidata.org/wiki/Q5674297","display_name":"Adaptability","level":2,"score":0.37070000171661377},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.3555999994277954},{"id":"https://openalex.org/C159886148","wikidata":"https://www.wikidata.org/wiki/Q176645","display_name":"Markov process","level":2,"score":0.34220001101493835},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.3377000093460083},{"id":"https://openalex.org/C160403385","wikidata":"https://www.wikidata.org/wiki/Q220543","display_name":"Queue","level":2,"score":0.3190000057220459},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31130000948905945},{"id":"https://openalex.org/C98763669","wikidata":"https://www.wikidata.org/wiki/Q176645","display_name":"Markov chain","level":2,"score":0.2973000109195709},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.2955000102519989},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.28619998693466187},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.2827000021934509},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.26660001277923584},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.26489999890327454}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ictc66702.2025.11388461","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ictc66702.2025.11388461","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 16th International Conference on Information and Communication Technology Convergence (ICTC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2807766588","https://openalex.org/W2997873913","https://openalex.org/W4317792452","https://openalex.org/W4379382600","https://openalex.org/W4386212326","https://openalex.org/W4394862759","https://openalex.org/W4404877105","https://openalex.org/W4407352369"],"related_works":[],"abstract_inverted_index":{"Semiconductor":[0],"wafer":[1,43],"fabrication":[2],"involves":[3],"complex":[4],"scheduling":[5,44],"challenges":[6],"with":[7,51],"hundreds":[8],"of":[9,112],"processing":[10],"steps,":[11],"reentrant":[12],"flows,":[13],"and":[14,60,72,78,97],"stringent":[15],"operational":[16,61],"constraints.":[17,62],"Traditional":[18],"dispatching":[19],"rules":[20],"lack":[21],"adaptability":[22],"to":[23],"dynamic":[24,117],"fab":[25],"conditions,":[26],"while":[27,75],"optimization":[28],"methods":[29],"face":[30],"computational":[31],"scalability":[32],"issues.":[33],"This":[34],"paper":[35],"proposes":[36],"a":[37,46],"reinforcement":[38],"learning":[39,107],"framework":[40],"that":[41],"formulates":[42],"as":[45],"Markov":[47],"Decision":[48],"Process":[49],"(MDP)":[50],"comprehensive":[52],"state":[53],"representation":[54],"capturing":[55],"equipment":[56,73,99],"utilization,":[57],"queue":[58],"dynamics,":[59],"The":[63,105],"multi-objective":[64],"reward":[65],"function":[66],"balances":[67],"throughput,":[68,92],"cycle":[69],"time,":[70],"tardiness,":[71,96],"utilization":[74,100],"respecting":[76],"batching":[77],"setup":[79],"requirements.":[80],"Experimental":[81],"evaluation":[82],"demonstrates":[83],"significant":[84],"improvements":[85],"over":[86],"traditional":[87],"methods,":[88],"achieving":[89],"5.3%":[90],"higher":[91],"21%":[93],"reduction":[94],"in":[95],"superior":[98],"across":[101],"multiple":[102],"performance":[103],"indicators.":[104],"stable":[106],"convergence":[108],"validates":[109],"the":[110,113],"effectiveness":[111],"proposed":[114],"approach":[115],"for":[116],"semiconductor":[118],"manufacturing":[119],"environments.":[120]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2026-02-20T00:00:00"}