{"id":"https://openalex.org/W4392943827","doi":"https://doi.org/10.1109/icst59744.2023.10460818","title":"Design and Optimization of MEMS-based Thermopile Detector Arrays for Infrared Sensing Applications","display_name":"Design and Optimization of MEMS-based Thermopile Detector Arrays for Infrared Sensing Applications","publication_year":2023,"publication_date":"2023-12-17","ids":{"openalex":"https://openalex.org/W4392943827","doi":"https://doi.org/10.1109/icst59744.2023.10460818"},"language":"en","primary_location":{"id":"doi:10.1109/icst59744.2023.10460818","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icst59744.2023.10460818","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 16th International Conference on Sensing Technology (ICST)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5094189147","display_name":"Bilal Shaikh","orcid":null},"institutions":[{"id":"https://openalex.org/I74796645","display_name":"Birla Institute of Technology and Science, Pilani","ror":"https://ror.org/001p3jz28","country_code":"IN","type":"education","lineage":["https://openalex.org/I74796645"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"Bilal Shaikh","raw_affiliation_strings":["Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Hyderabad,India"],"affiliations":[{"raw_affiliation_string":"Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Hyderabad,India","institution_ids":["https://openalex.org/I74796645"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5094189148","display_name":"Mihir Ganwani","orcid":null},"institutions":[{"id":"https://openalex.org/I74796645","display_name":"Birla Institute of Technology and Science, Pilani","ror":"https://ror.org/001p3jz28","country_code":"IN","type":"education","lineage":["https://openalex.org/I74796645"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Mihir Ganwani","raw_affiliation_strings":["Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Hyderabad,India"],"affiliations":[{"raw_affiliation_string":"Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Hyderabad,India","institution_ids":["https://openalex.org/I74796645"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031083830","display_name":"Soumendu Sinha","orcid":"https://orcid.org/0000-0003-3088-7637"},"institutions":[{"id":"https://openalex.org/I41763900","display_name":"Central Electronics Engineering Research Institute","ror":"https://ror.org/01hh45364","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I41763900","https://openalex.org/I4210134808","https://openalex.org/I66760702"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Soumendu Sinha","raw_affiliation_strings":["CSIR-Central Electronics Engineering Research Institute,Semiconductor Sensors and Microsystems Group,Pilani,India","Semiconductor Sensors and Microsystems Group, CSIR-Central Electronics Engineering Research Institute, Pilani, India"],"affiliations":[{"raw_affiliation_string":"CSIR-Central Electronics Engineering Research Institute,Semiconductor Sensors and Microsystems Group,Pilani,India","institution_ids":["https://openalex.org/I41763900"]},{"raw_affiliation_string":"Semiconductor Sensors and Microsystems Group, CSIR-Central Electronics Engineering Research Institute, Pilani, India","institution_ids":["https://openalex.org/I41763900"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5094189147"],"corresponding_institution_ids":["https://openalex.org/I74796645"],"apc_list":null,"apc_paid":null,"fwci":0.2678,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.57047303,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9757999777793884,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9757999777793884,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermopile","display_name":"Thermopile","score":0.9801580905914307},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7903048992156982},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.6981120109558105},{"id":"https://openalex.org/keywords/infrared","display_name":"Infrared","score":0.5486444234848022},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4394893944263458},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4352138638496399},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3877050280570984},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.33819302916526794},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2288062572479248},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.17539995908737183},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17404857277870178},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.1192619800567627}],"concepts":[{"id":"https://openalex.org/C47279676","wikidata":"https://www.wikidata.org/wiki/Q915693","display_name":"Thermopile","level":3,"score":0.9801580905914307},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7903048992156982},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.6981120109558105},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.5486444234848022},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4394893944263458},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4352138638496399},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3877050280570984},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.33819302916526794},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2288062572479248},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.17539995908737183},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17404857277870178},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.1192619800567627}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icst59744.2023.10460818","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icst59744.2023.10460818","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 16th International Conference on Sensing Technology (ICST)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5199999809265137,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1977911971","https://openalex.org/W1983026806","https://openalex.org/W1990311671","https://openalex.org/W2107080285","https://openalex.org/W2118744719","https://openalex.org/W2169581025","https://openalex.org/W2559939504","https://openalex.org/W2625887608","https://openalex.org/W2808010523","https://openalex.org/W2995591055","https://openalex.org/W3198961606","https://openalex.org/W4206625496"],"related_works":["https://openalex.org/W1598554143","https://openalex.org/W1497220320","https://openalex.org/W4319301974","https://openalex.org/W4328092585","https://openalex.org/W2895400523","https://openalex.org/W1551902208","https://openalex.org/W2515506503","https://openalex.org/W2046349245","https://openalex.org/W1973568336","https://openalex.org/W3115077618"],"abstract_inverted_index":{"This":[0,61],"research":[1,54],"focuses":[2],"on":[3],"MEMS":[4],"thermopile-based":[5],"arrays.":[6],"Thermopile-based":[7],"detectors":[8],"employ":[9],"the":[10,41,70,125,134,138,147,165],"Seebeck":[11,109,126],"effect":[12],"to":[13,20,34,106,154],"generate":[14],"electrical":[15],"potential":[16],"differences":[17],"in":[18,32,80,145,158,168],"response":[19],"temperature":[21],"variations.":[22],"The":[23],"thermopiles":[24],"are":[25,152],"composed":[26],"of":[27,65,72],"polysilicon-based":[28],"thermocouple":[29,57,130],"elements":[30],"interconnected":[31],"arrays":[33,151,170],"enhance":[35],"sensitivity":[36],"and":[37,48,67,69,76,100,111,174],"output":[38,114,135,148],"voltage.Expanding":[39],"upon":[40],"prior":[42],"work":[43],"involving":[44],"a":[45,49,81],"double-layer":[46,74,176],"structure":[47,75],"single-layer":[50],"circular":[51,82,150,169],"structure,":[52],"our":[53,86],"explores":[55],"various":[56],"designs":[58],"more":[59],"comprehensively.":[60],"includes":[62],"parametric":[63],"variations":[64],"length":[66],"thickness":[68,105,132,141],"development":[71],"stacked":[73,175],"its":[77],"subsequent":[78],"implementation":[79],"array":[83],".":[84],"In":[85],"study,":[87],"we":[88],"delve":[89],"into":[90],"crucial":[91],"factors":[92],"such":[93],"as":[94],"doping":[95,122],"concentration,":[96],"polysilicon":[97],"layer":[98,104,140],"thickness,":[99],"insulating":[101],"silicon":[102],"dioxide":[103],"engineer":[107],"specific":[108],"coefficients":[110],"achieve":[112],"enhanced":[113],"voltage.Our":[115],"findings":[116],"reveal":[117],"an":[118],"important":[119],"trend:":[120],"increasing":[121,146],"concentration":[123],"reduces":[124],"coefficient,":[127],"while":[128],"decreasing":[129],"strip":[131],"improves":[133],"voltage.":[136],"Minimizing":[137],"oxide":[139],"also":[142],"proves":[143],"instrumental":[144],"voltage.Additionally,":[149],"examined":[153],"analyze":[155],"their":[156],"performance":[157,167],"different":[159],"thermoelectric":[160],"structures.":[161],"Through":[162],"comparative":[163],"analysis,":[164],"device":[166],"for":[171],"single-layer,":[172],"double-layer,":[173],"thermopile":[177],"structures":[178],"is":[179],"demonstrated.":[180]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-12-25T23:11:45.687758","created_date":"2025-10-10T00:00:00"}