{"id":"https://openalex.org/W4392944157","doi":"https://doi.org/10.1109/icst59744.2023.10460816","title":"Design, Modelling, and Simulation of PMUT Device for Ultrasound Imaging Applications","display_name":"Design, Modelling, and Simulation of PMUT Device for Ultrasound Imaging Applications","publication_year":2023,"publication_date":"2023-12-17","ids":{"openalex":"https://openalex.org/W4392944157","doi":"https://doi.org/10.1109/icst59744.2023.10460816"},"language":"en","primary_location":{"id":"doi:10.1109/icst59744.2023.10460816","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icst59744.2023.10460816","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 16th International Conference on Sensing Technology (ICST)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102340429","display_name":"Upmanyu Kumar","orcid":null},"institutions":[{"id":"https://openalex.org/I74796645","display_name":"Birla Institute of Technology and Science, Pilani","ror":"https://ror.org/001p3jz28","country_code":"IN","type":"education","lineage":["https://openalex.org/I74796645"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"Upmanyu Kumar","raw_affiliation_strings":["Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Goa,India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Goa,India","institution_ids":["https://openalex.org/I74796645"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5094188595","display_name":"Suchith Naga Sri Dontaraju","orcid":null},"institutions":[{"id":"https://openalex.org/I74796645","display_name":"Birla Institute of Technology and Science, Pilani","ror":"https://ror.org/001p3jz28","country_code":"IN","type":"education","lineage":["https://openalex.org/I74796645"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Suchith Naga Sri Dontaraju","raw_affiliation_strings":["Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Goa,India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Birla Institute of Technology and Science – Pilani,Department of Electrical and Electronics Engineering,Goa,India","institution_ids":["https://openalex.org/I74796645"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031083830","display_name":"Soumendu Sinha","orcid":"https://orcid.org/0000-0003-3088-7637"},"institutions":[{"id":"https://openalex.org/I41763900","display_name":"Central Electronics Engineering Research Institute","ror":"https://ror.org/01hh45364","country_code":"IN","type":"facility","lineage":["https://openalex.org/I2799351866","https://openalex.org/I41763900","https://openalex.org/I4210134808","https://openalex.org/I66760702"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Soumendu Sinha","raw_affiliation_strings":["CSIR-Central Electronics Engineering Research Institute,Semiconductor Sensors and Microsystems Group,Pilani,India","Semiconductor Sensors and Microsystems Group, CSIR-Central Electronics Engineering Research Institute, Pilani, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CSIR-Central Electronics Engineering Research Institute,Semiconductor Sensors and Microsystems Group,Pilani,India","institution_ids":["https://openalex.org/I41763900"]},{"raw_affiliation_string":"Semiconductor Sensors and Microsystems Group, CSIR-Central Electronics Engineering Research Institute, Pilani, India","institution_ids":["https://openalex.org/I41763900"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5102340429"],"corresponding_institution_ids":["https://openalex.org/I74796645"],"apc_list":null,"apc_paid":null,"fwci":0.147,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.49744285,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14156","display_name":"Engineering Applied Research","score":0.6974999904632568,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14156","display_name":"Engineering Applied Research","score":0.6974999904632568,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ultrasonic-imaging","display_name":"Ultrasonic imaging","score":0.5901131629943848},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5727659463882446},{"id":"https://openalex.org/keywords/ultrasound","display_name":"Ultrasound","score":0.5452204346656799},{"id":"https://openalex.org/keywords/ultrasound-imaging","display_name":"Ultrasound imaging","score":0.48993033170700073},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4259389042854309},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3310278654098511},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20370304584503174},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08630460500717163}],"concepts":[{"id":"https://openalex.org/C2989478337","wikidata":"https://www.wikidata.org/wiki/Q234904","display_name":"Ultrasonic imaging","level":3,"score":0.5901131629943848},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5727659463882446},{"id":"https://openalex.org/C143753070","wikidata":"https://www.wikidata.org/wiki/Q162564","display_name":"Ultrasound","level":2,"score":0.5452204346656799},{"id":"https://openalex.org/C2986892559","wikidata":"https://www.wikidata.org/wiki/Q234904","display_name":"Ultrasound imaging","level":3,"score":0.48993033170700073},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4259389042854309},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3310278654098511},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20370304584503174},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08630460500717163}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icst59744.2023.10460816","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icst59744.2023.10460816","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 16th International Conference on Sensing Technology (ICST)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1991739591","https://openalex.org/W2012779095","https://openalex.org/W2218635931","https://openalex.org/W2743764621","https://openalex.org/W2918367398","https://openalex.org/W2994823002","https://openalex.org/W3026347548","https://openalex.org/W3189577114","https://openalex.org/W3211995446","https://openalex.org/W4200411164","https://openalex.org/W4239836749","https://openalex.org/W4282576743","https://openalex.org/W4285116563","https://openalex.org/W4310521155","https://openalex.org/W4383670032"],"related_works":["https://openalex.org/W4250133764","https://openalex.org/W2391770021","https://openalex.org/W2613177006","https://openalex.org/W4390298813","https://openalex.org/W2990800024","https://openalex.org/W4247495643","https://openalex.org/W3032126157","https://openalex.org/W2182698094","https://openalex.org/W4240101417","https://openalex.org/W2370916954"],"abstract_inverted_index":{"In":[0,91],"this":[1],"work,":[2],"a":[3,50,110,117],"circular":[4],"piezoelectric":[5,32,86,104,154],"micromachined":[6],"ultrasonic":[7],"transducer":[8],"(PMUT)":[9],"suitable":[10],"for":[11,34,168],"ultrasound":[12],"imaging":[13],"applications":[14],"has":[15],"been":[16,47,174],"designed,":[17],"modelled,":[18],"and":[19,43,56,82,116],"simulated":[20],"using":[21,176],"COMSOL\u2122.":[22],"The":[23,38,106,134,171],"PMUT":[24],"device":[25,89,93],"uses":[26],"Aluminum":[27],"Nitride":[28],"(AlN)":[29],"as":[30,102],"the":[31,68,77,80,85,103,125,144,147,153,159],"material":[33],"achieving":[35],"optimal":[36],"performance.":[37,90],"resonant":[39,111,126,139,160],"frequency,":[40,127],"membrane":[41,119],"displacement,":[42],"pressure-induced":[44,129],"voltages":[45],"have":[46,173],"studied.":[48],"Moreover,":[49,158],"comparative":[51],"study":[52,76],"of":[53,79,84,113,121,146,162],"circular,":[54],"square":[55],"hexagonal":[57],"geometries":[58],"was":[59,95,164],"also":[60],"carried":[61],"out":[62],"to":[63,75],"evaluate":[64],"their":[65],"impact":[66],"on":[67,88,181],"eigenfrequency.":[69],"Further,":[70],"parametric":[71,135],"sweeps":[72],"are":[73],"performed":[74],"influence":[78],"radius":[81,145],"thickness":[83,156],"layer":[87],"addition,":[92],"performance":[94],"compared":[96],"with":[97],"Lead":[98],"Zirconate":[99],"Titanate":[100],"(PZT)":[101],"material.":[105],"simulation":[107],"results":[108,172],"show":[109,137],"frequency":[112,140,161],"7.7511":[114],"MHz":[115],"maximum":[118],"displacement":[120],"0.228":[122],"\u00b5m":[123],"at":[124],"while":[128,149],"voltage":[130],"reaches":[131],"0.292":[132],"V/mN.":[133],"studies":[136],"that":[138],"decreases":[141],"when":[142,152],"increasing":[143],"diaphragm":[148],"it":[150],"increases":[151],"layer\u2019s":[155],"increases.":[157],"AlN-PMUT":[163],"higher":[165],"than":[166],"PZT-PMUT":[167],"various":[169],"geometries.":[170],"verified":[175],"an":[177],"analytical":[178],"model":[179],"developed":[180],"MATLAB\u2122.":[182]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}