{"id":"https://openalex.org/W2549488912","doi":"https://doi.org/10.1109/icsenst.2013.6727725","title":"Novel high-resolution sidewall imaging using standard Atomic Force Microscopy equipment: Exceeding surface scanning using customized FIB-milled AFM tips in torsional feedback mode","display_name":"Novel high-resolution sidewall imaging using standard Atomic Force Microscopy equipment: Exceeding surface scanning using customized FIB-milled AFM tips in torsional feedback mode","publication_year":2013,"publication_date":"2013-12-01","ids":{"openalex":"https://openalex.org/W2549488912","doi":"https://doi.org/10.1109/icsenst.2013.6727725","mag":"2549488912"},"language":"en","primary_location":{"id":"doi:10.1109/icsenst.2013.6727725","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsenst.2013.6727725","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 Seventh International Conference on Sensing Technology (ICST)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://zenodo.org/record/3432020","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045933364","display_name":"Florian Krohs","orcid":null},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Florian Krohs","raw_affiliation_strings":["Dept. Computer Science, University of Oldenburg, Oldenburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. Computer Science, University of Oldenburg, Oldenburg, Germany","institution_ids":["https://openalex.org/I129877168"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5013858630","display_name":"Sergej Fatikow","orcid":"https://orcid.org/0000-0002-3352-7250"},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Sergej Fatikow","raw_affiliation_strings":["Dept. Computer Science, University of Oldenburg, Oldenburg, Germany"],"affiliations":[{"raw_affiliation_string":"Dept. Computer Science, University of Oldenburg, Oldenburg, Germany","institution_ids":["https://openalex.org/I129877168"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5045933364"],"corresponding_institution_ids":["https://openalex.org/I129877168"],"apc_list":null,"apc_paid":null,"fwci":0.2204,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.61778179,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"608","last_page":"611"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7367997169494629},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.5773105621337891},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.5592272877693176},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5328686237335205},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.5181837677955627},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.5094569325447083},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.46665024757385254},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4454077482223511},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.4420192241668701},{"id":"https://openalex.org/keywords/nanometrology","display_name":"Nanometrology","score":0.42814210057258606},{"id":"https://openalex.org/keywords/nanomanufacturing","display_name":"Nanomanufacturing","score":0.42482346296310425},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3426097631454468},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.10981059074401855}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7367997169494629},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.5773105621337891},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.5592272877693176},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5328686237335205},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.5181837677955627},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.5094569325447083},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.46665024757385254},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4454077482223511},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.4420192241668701},{"id":"https://openalex.org/C148402106","wikidata":"https://www.wikidata.org/wiki/Q1549529","display_name":"Nanometrology","level":3,"score":0.42814210057258606},{"id":"https://openalex.org/C46312889","wikidata":"https://www.wikidata.org/wiki/Q950502","display_name":"Nanomanufacturing","level":2,"score":0.42482346296310425},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3426097631454468},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.10981059074401855},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icsenst.2013.6727725","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsenst.2013.6727725","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 Seventh International Conference on Sensing Technology (ICST)","raw_type":"proceedings-article"},{"id":"pmh:oai:zenodo.org:3432020","is_oa":true,"landing_page_url":"https://zenodo.org/record/3432020","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferencePaper"}],"best_oa_location":{"id":"pmh:oai:zenodo.org:3432020","is_oa":true,"landing_page_url":"https://zenodo.org/record/3432020","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferencePaper"},"sustainable_development_goals":[{"score":0.44999998807907104,"display_name":"Responsible consumption and production","id":"https://metadata.un.org/sdg/12"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1986101723","https://openalex.org/W2057942144","https://openalex.org/W2089751703","https://openalex.org/W2143711213","https://openalex.org/W3150248096"],"related_works":["https://openalex.org/W2032097930","https://openalex.org/W3026754659","https://openalex.org/W1614842931","https://openalex.org/W1542771719","https://openalex.org/W2088774184","https://openalex.org/W2512631627","https://openalex.org/W1965910266","https://openalex.org/W2623598930","https://openalex.org/W2059985006","https://openalex.org/W2981321209"],"abstract_inverted_index":{"The":[0,114],"Atomic":[1],"Force":[2],"Microscope":[3],"(AFM)":[4],"represents":[5],"an":[6,101],"essential":[7],"measuring":[8],"instrument":[9],"in":[10,104,119,127,155,220],"various":[11],"disciplines":[12],"covering":[13],"life":[14],"science,":[15,18],"biology,":[16],"material":[17],"semiconductor":[19,47],"industries,":[20],"and":[21,23,48,58,81,99,165,170,176,227],"micro-":[22],"nanotechnology.":[24],"However,":[25],"conventional":[26],"AFM":[27,132,147,163,188,218,225,246],"technology":[28,75],"is":[29,33,65,93,121,190,212],"limited":[30],"as":[31,112,237],"it":[32],"a":[34,42,156,161,204,228],"2.5D":[35],"image":[36,164],"acquisition":[37],"technique":[38],"thus":[39],"only":[40],"giving":[41],"\u201cview":[43],"from":[44],"above\u201d.":[45],"In":[46],"nanomanufacturing":[49],"industries":[50],"the":[51,62,68,77,86,96,106,122,142,146,173,179,187,195,232,235,241,245],"measurement":[52],"of":[53,67,89,95,108,145,178,216,234,244],"linewidths,":[54],"critical":[55,78],"dimensions":[56],"(CD),":[57],"sidewall":[59,87,123,174,196,209],"angle/roughness":[60],"on":[61,214],"wafer":[63],"level":[64],"one":[66,94],"most":[69],"fundamental":[70],"dimensional":[71],"nanometrology":[72],"needs.":[73],"As":[74],"progresses":[76],"dimension":[79],"size":[80],"tolerance":[82],"decrease.":[83],"Especially,":[84],"characterizing":[85],"roughness":[88,124,175],"nanostructured":[90],"photonic":[91],"components":[92],"key":[97],"challenges":[98],"plays":[100],"important":[102],"role":[103],"optimizing":[105],"efficiency":[107],"nanooptical":[109],"devices":[110],"such":[111],"waveguides.":[113],"main":[115],"source":[116],"for":[117,207],"loss":[118],"waveguides":[120],"which":[125],"results":[126],"diffuse":[128],"scattering.":[129],"Standard":[130],"pyramidal":[131,143],"probes":[133],"are":[134],"unable":[135],"to":[136,160,166,193,239],"correctly":[137],"scan":[138,150],"these":[139,200],"structures.":[140],"Firstly,":[141],"tip":[144],"probe":[148,189],"cannot":[149,181],"high":[151],"aspect":[152],"ratio":[153],"structures":[154],"correct":[157],"way":[158],"leading":[159],"distorted":[162],"incorrect":[167],"trench":[168],"width":[169],"height.":[171],"Secondly,":[172],"angle":[177],"structure":[180],"be":[182],"measured":[183],"at":[184],"all":[185],"since":[186],"not":[191],"able":[192],"contact":[194],"structure.":[197],"To":[198],"overcome":[199],"problems,":[201],"we":[202],"suggest":[203],"novel":[205],"method":[206],"performing":[208],"measurements":[210],"that":[211],"based":[213],"utilization":[215],"standard":[217],"equipment":[219],"combination":[221],"with":[222],"customized":[223],"FIB-milled":[224],"tips":[226],"control":[229,240],"loop":[230],"incorporating":[231],"torsion":[233],"cantilever":[236],"feedback":[238],"lateral":[242],"position":[243],"tip.":[247]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}