{"id":"https://openalex.org/W2913657821","doi":"https://doi.org/10.1109/icsens.2018.8630307","title":"A Low-G MEMS Acceleration Switch Based on Direct Contact Method","display_name":"A Low-G MEMS Acceleration Switch Based on Direct Contact Method","publication_year":2018,"publication_date":"2018-10-01","ids":{"openalex":"https://openalex.org/W2913657821","doi":"https://doi.org/10.1109/icsens.2018.8630307","mag":"2913657821"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2018.8630307","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8630307","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101570836","display_name":"Zhuang Xiong","orcid":"https://orcid.org/0000-0003-1455-2116"},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Z. Xiong","raw_affiliation_strings":["Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA","institution_ids":["https://openalex.org/I2801345734"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101934606","display_name":"Bin Tang","orcid":"https://orcid.org/0000-0002-3010-0980"},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"B. Tang","raw_affiliation_strings":["Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA","institution_ids":["https://openalex.org/I2801345734"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058585663","display_name":"F. Zhang","orcid":"https://orcid.org/0009-0009-2411-9253"},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"F. Zhang","raw_affiliation_strings":["Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA","institution_ids":["https://openalex.org/I2801345734"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108674800","display_name":"Miao Yuan","orcid":"https://orcid.org/0009-0009-5346-5593"},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"M. Yuan","raw_affiliation_strings":["Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA","institution_ids":["https://openalex.org/I2801345734"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032309582","display_name":"Jin Xie","orcid":"https://orcid.org/0000-0001-5461-7178"},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"J. Xie","raw_affiliation_strings":["Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA","institution_ids":["https://openalex.org/I2801345734"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100407167","display_name":"Chao Wang","orcid":"https://orcid.org/0009-0003-4893-1533"},"institutions":[{"id":"https://openalex.org/I2801345734","display_name":"China Academy of Engineering Physics","ror":"https://ror.org/039vqpp67","country_code":"CN","type":"facility","lineage":["https://openalex.org/I2801345734"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"C. Wang","raw_affiliation_strings":["Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, CHINA","institution_ids":["https://openalex.org/I2801345734"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5101570836"],"corresponding_institution_ids":["https://openalex.org/I2801345734"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.16712703,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"22","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7580382823944092},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.7347755432128906},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.7107508182525635},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.6712125539779663},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6106178760528564},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.5565730333328247},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4868428111076355},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"Bulk micromachining","score":0.46912693977355957},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.46398165822029114},{"id":"https://openalex.org/keywords/analogue-switch","display_name":"Analogue switch","score":0.4555782079696655},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.43886786699295044},{"id":"https://openalex.org/keywords/centrifugal-force","display_name":"Centrifugal force","score":0.432860404253006},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.4323018789291382},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3920210897922516},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3602452576160431},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35340598225593567},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.34014350175857544},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.31368231773376465},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2480676770210266},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23404759168624878},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20618963241577148},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.14852258563041687}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7580382823944092},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.7347755432128906},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.7107508182525635},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.6712125539779663},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6106178760528564},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5565730333328247},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4868428111076355},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.46912693977355957},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.46398165822029114},{"id":"https://openalex.org/C45367353","wikidata":"https://www.wikidata.org/wiki/Q1327315","display_name":"Analogue switch","level":3,"score":0.4555782079696655},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.43886786699295044},{"id":"https://openalex.org/C50735335","wikidata":"https://www.wikidata.org/wiki/Q178733","display_name":"Centrifugal force","level":3,"score":0.432860404253006},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.4323018789291382},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3920210897922516},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3602452576160431},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35340598225593567},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.34014350175857544},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.31368231773376465},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2480676770210266},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23404759168624878},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20618963241577148},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.14852258563041687},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C81063470","wikidata":"https://www.wikidata.org/wiki/Q1256787","display_name":"Rotational speed","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2018.8630307","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8630307","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8399999737739563,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1975888941","https://openalex.org/W1991004252","https://openalex.org/W2002934484","https://openalex.org/W2147934000","https://openalex.org/W2285077720"],"related_works":["https://openalex.org/W2296264082","https://openalex.org/W1501419981","https://openalex.org/W3215636742","https://openalex.org/W2096478611","https://openalex.org/W1991559067","https://openalex.org/W2022641457","https://openalex.org/W199926285","https://openalex.org/W2061864336","https://openalex.org/W2059967747","https://openalex.org/W1855148897"],"abstract_inverted_index":{"A":[0],"MEMS":[1,24],"low-g":[2],"inertial":[3,25],"switch":[4,26,43,86,144],"is":[5,109,114],"typically":[6],"used":[7,82],"for":[8],"linearly":[9],"increased/decreased":[10],"acceleration":[11,156],"signal":[12,149,157],"sensing.":[13],"In":[14],"this":[15],"paper,":[16],"we":[17],"introduce":[18],"a":[19,47,56,71,89],"novel":[20],"design":[21],"concept":[22],"of":[23,38,50,124,164],"based":[27],"on":[28,70],"direct":[29,90,128,142],"contact":[30,125,131,143],"sensing":[31],"method":[32],"to":[33,83,100,160],"eliminate":[34,146],"the":[35,39,85,96,101,105,119,141,147,154,161,165],"bouncing":[36,150],"effect":[37,151],"output":[40,148],"signal.":[41],"The":[42,65,122,137],"was":[44,67,133,158],"designed":[45,120],"with":[46,74,118],"threshold":[48,107,162],"value":[49,108,163],"12":[51],"g":[52],"and":[53,87,95,129],"composed":[54],"by":[55,60],"proof":[57],"mass,":[58],"suspended":[59],"six":[61],"Z-shaped":[62],"flexure":[63],"beams.":[64],"fabrication":[66],"carried":[68,135],"out":[69],"SOI":[72],"wafer":[73],"standard":[75],"silicon":[76],"micromachining.":[77],"Two":[78],"glass":[79],"wafers":[80],"were":[81],"encapsulate":[84],"establish":[88],"connection":[91],"between":[92,127],"movable":[93],"electrode":[94],"detection":[97],"circuits.":[98],"According":[99],"centrifugal":[102],"experiment":[103],"results,":[104],"measured":[106],"around":[110],"11.8":[111],"g,":[112],"which":[113],"in":[115],"good":[116],"agreement":[117],"value.":[121],"comparison":[123],"behavior":[126],"indirect":[130],"switches":[132],"also":[134],"out.":[136],"results":[138],"showed":[139],"that,":[140],"can":[145],"especially":[152],"when":[153],"applied":[155],"approximate":[159],"switch.":[166]},"counts_by_year":[{"year":2022,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}