{"id":"https://openalex.org/W2907371565","doi":"https://doi.org/10.1109/icsens.2018.8589887","title":"Low-Noise Drive of a Micromachined Resonant Accelerometer with Separated Sensing and Actuation","display_name":"Low-Noise Drive of a Micromachined Resonant Accelerometer with Separated Sensing and Actuation","publication_year":2018,"publication_date":"2018-10-01","ids":{"openalex":"https://openalex.org/W2907371565","doi":"https://doi.org/10.1109/icsens.2018.8589887","mag":"2907371565"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2018.8589887","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589887","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032424446","display_name":"Zhengxiang Fang","orcid":"https://orcid.org/0000-0002-5347-2234"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhengxiang Fang","raw_affiliation_strings":["State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056251690","display_name":"Yonggang Yin","orcid":"https://orcid.org/0000-0001-6782-9495"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yonggang Yin","raw_affiliation_strings":["State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100357489","display_name":"Yunfeng Liu","orcid":"https://orcid.org/0000-0003-1840-5527"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunfeng Liu","raw_affiliation_strings":["State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023046572","display_name":"Fengtian Han","orcid":"https://orcid.org/0000-0001-8425-6764"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fengtian Han","raw_affiliation_strings":["State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.22745941,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7330195903778076},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6979367136955261},{"id":"https://openalex.org/keywords/tuning-fork","display_name":"Tuning fork","score":0.6275879740715027},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6210593581199646},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.6114261150360107},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5678893327713013},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5053017735481262},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.47432443499565125},{"id":"https://openalex.org/keywords/signal-to-noise-ratio","display_name":"Signal-to-noise ratio (imaging)","score":0.468887060880661},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.44166526198387146},{"id":"https://openalex.org/keywords/noise-floor","display_name":"Noise floor","score":0.4146895706653595},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3855285048484802},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.37327346205711365},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3599165081977844},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3515353798866272},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3237111568450928},{"id":"https://openalex.org/keywords/noise-measurement","display_name":"Noise measurement","score":0.2926967740058899},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27248483896255493},{"id":"https://openalex.org/keywords/noise-reduction","display_name":"Noise reduction","score":0.25403517484664917},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.17163777351379395}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7330195903778076},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6979367136955261},{"id":"https://openalex.org/C107677527","wikidata":"https://www.wikidata.org/wiki/Q201898","display_name":"Tuning fork","level":3,"score":0.6275879740715027},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6210593581199646},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.6114261150360107},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5678893327713013},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5053017735481262},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.47432443499565125},{"id":"https://openalex.org/C13944312","wikidata":"https://www.wikidata.org/wiki/Q7512748","display_name":"Signal-to-noise ratio (imaging)","level":2,"score":0.468887060880661},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.44166526198387146},{"id":"https://openalex.org/C187612029","wikidata":"https://www.wikidata.org/wiki/Q17083130","display_name":"Noise floor","level":4,"score":0.4146895706653595},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3855285048484802},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.37327346205711365},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3599165081977844},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3515353798866272},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3237111568450928},{"id":"https://openalex.org/C29265498","wikidata":"https://www.wikidata.org/wiki/Q7047719","display_name":"Noise measurement","level":3,"score":0.2926967740058899},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27248483896255493},{"id":"https://openalex.org/C163294075","wikidata":"https://www.wikidata.org/wiki/Q581861","display_name":"Noise reduction","level":2,"score":0.25403517484664917},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.17163777351379395},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2018.8589887","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589887","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8199999928474426}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W98941673","https://openalex.org/W1985903408","https://openalex.org/W2016946512","https://openalex.org/W2086524195","https://openalex.org/W2219933160","https://openalex.org/W2334862408","https://openalex.org/W2341295932","https://openalex.org/W2577800958","https://openalex.org/W2592121206","https://openalex.org/W2766870709","https://openalex.org/W6604028783","https://openalex.org/W6688971506"],"related_works":["https://openalex.org/W2889345340","https://openalex.org/W4317582057","https://openalex.org/W4377704402","https://openalex.org/W2799048710","https://openalex.org/W2054124615","https://openalex.org/W2077145597","https://openalex.org/W2366084554","https://openalex.org/W2139175597","https://openalex.org/W3045176038","https://openalex.org/W1985239937"],"abstract_inverted_index":{"Micromachined":[0],"resonant":[1],"accelerometer":[2],"(MRA)":[3],"is":[4,22],"typically":[5],"operated":[6],"at":[7],"its":[8,53],"optimal":[9],"drive":[10,19,35,48,63,73,88,130],"amplitude":[11,21,45],"to":[12,38],"minimize":[13],"nonlinear":[14],"vibration":[15],"noise.":[16],"However,":[17],"the":[18,44,47,97,112,127],"voltage":[20,36],"set":[23],"usually":[24],"as":[25,27],"low":[26,34],"10":[28],"mV,":[29],"which":[30],"consequently":[31],"results":[32,104],"in":[33,76,111],"signal":[37,49],"noise":[39,115],"ratio":[40,69],"(SNR).":[41],"To":[42],"increase":[43],"of":[46,70,109,120],"and":[50,64,67,72,89,94,116],"thus":[51],"improve":[52],"SNR,":[54],"this":[55],"paper":[56],"proposes":[57],"a":[58,107,117],"resonator":[59],"structure":[60],"with":[61,86,96],"separated":[62,87],"sensing":[65,71,90],"electrodes":[66],"high":[68],"comb":[74],"teeth":[75],"two":[77],"dual-ended":[78],"tuning":[79],"fork":[80],"resonator.":[81],"Experiments":[82],"on":[83],"MRA":[84],"prototypes":[85],"scheme":[91],"were":[92],"conducted":[93],"compared":[95],"usual":[98],"multiplexed":[99],"electrode":[100],"scheme.":[101],"The":[102],"experimental":[103],"show":[105],"that":[106],"reduction":[108],"30%":[110],"measured":[113],"frequency":[114],"bias":[118],"instability":[119],"1.05":[121],"\u03bcg":[122],"have":[123],"been":[124],"reached":[125],"by":[126],"proposed":[128],"low-noise":[129],"design.":[131]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}