{"id":"https://openalex.org/W2908002502","doi":"https://doi.org/10.1109/icsens.2018.8589799","title":"Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine","display_name":"Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine","publication_year":2018,"publication_date":"2018-10-01","ids":{"openalex":"https://openalex.org/W2908002502","doi":"https://doi.org/10.1109/icsens.2018.8589799","mag":"2908002502"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2018.8589799","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589799","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102764091","display_name":"S. Kalaiselvi","orcid":null},"institutions":[{"id":"https://openalex.org/I4399657946","display_name":"Rajalakshmi Engineering College","ror":"https://ror.org/01dw2vm55","country_code":null,"type":"education","lineage":["https://openalex.org/I4399657946"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"S. Kalaiselvi","raw_affiliation_strings":["Centre for Excellence in MEMS and Microfluidics, Rajalakshmi Engineering College, Chennai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre for Excellence in MEMS and Microfluidics, Rajalakshmi Engineering College, Chennai, India","institution_ids":["https://openalex.org/I4399657946"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109131408","display_name":"L. Sujatha","orcid":null},"institutions":[{"id":"https://openalex.org/I4399657946","display_name":"Rajalakshmi Engineering College","ror":"https://ror.org/01dw2vm55","country_code":null,"type":"education","lineage":["https://openalex.org/I4399657946"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"L. Sujatha","raw_affiliation_strings":["Centre for Excellence in MEMS and Microfluidics, Rajalakshmi Engineering College, Chennai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre for Excellence in MEMS and Microfluidics, Rajalakshmi Engineering College, Chennai, India","institution_ids":["https://openalex.org/I4399657946"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5022231976","display_name":"R. Sundar","orcid":null},"institutions":[{"id":"https://openalex.org/I4399657946","display_name":"Rajalakshmi Engineering College","ror":"https://ror.org/01dw2vm55","country_code":null,"type":"education","lineage":["https://openalex.org/I4399657946"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"R. Sundar","raw_affiliation_strings":["Centre for Excellence in MEMS and Microfluidics, Rajalakshmi Engineering College, Chennai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre for Excellence in MEMS and Microfluidics, Rajalakshmi Engineering College, Chennai, India","institution_ids":["https://openalex.org/I4399657946"]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4399657946"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7898017168045044},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.7395989894866943},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7254801988601685},{"id":"https://openalex.org/keywords/stator","display_name":"Stator","score":0.7065310478210449},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5485183000564575},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.4973349869251251},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4684688448905945},{"id":"https://openalex.org/keywords/turbine","display_name":"Turbine","score":0.42928218841552734},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.4139821529388428},{"id":"https://openalex.org/keywords/automotive-engineering","display_name":"Automotive engineering","score":0.39170175790786743},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.38921481370925903},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.38581299781799316},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35016095638275146},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32486385107040405},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.30173546075820923},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.29918259382247925},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2772732377052307},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.13433736562728882},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.13271450996398926}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7898017168045044},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.7395989894866943},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7254801988601685},{"id":"https://openalex.org/C2776529397","wikidata":"https://www.wikidata.org/wiki/Q190312","display_name":"Stator","level":2,"score":0.7065310478210449},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5485183000564575},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.4973349869251251},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4684688448905945},{"id":"https://openalex.org/C2778449969","wikidata":"https://www.wikidata.org/wiki/Q130760","display_name":"Turbine","level":2,"score":0.42928218841552734},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.4139821529388428},{"id":"https://openalex.org/C171146098","wikidata":"https://www.wikidata.org/wiki/Q124192","display_name":"Automotive engineering","level":1,"score":0.39170175790786743},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.38921481370925903},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38581299781799316},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35016095638275146},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32486385107040405},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.30173546075820923},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.29918259382247925},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2772732377052307},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.13433736562728882},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.13271450996398926},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2018.8589799","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589799","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8700000047683716,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1507994059","https://openalex.org/W2008330154","https://openalex.org/W2029194108","https://openalex.org/W2090033539","https://openalex.org/W2538982490","https://openalex.org/W2567187542","https://openalex.org/W2768543716"],"related_works":["https://openalex.org/W2356006086","https://openalex.org/W1973973903","https://openalex.org/W2545168295","https://openalex.org/W2365897603","https://openalex.org/W4234814094","https://openalex.org/W2156308897","https://openalex.org/W4303613760","https://openalex.org/W2361871310","https://openalex.org/W2417246878","https://openalex.org/W1982154684"],"abstract_inverted_index":{"Vibrations":[0],"in":[1,14,67],"elements":[2,17,30],"of":[3,25,28,51,69,95,135],"dynamic":[4],"systems,":[5],"such":[6],"as":[7,121],"turbines,":[8],"can":[9,63,76],"lead":[10],"to":[11,19,37,58,123],"undue":[12],"stresses":[13],"critical":[15,57],"structural":[16,29],"leading":[18],"catastrophic":[20],"failures.":[21],"Measurement":[22],"and":[23,40,81,111],"characterization":[24],"vibration":[26,65,114],"levels":[27],"under":[31],"varied":[32],"operating":[33,74],"conditions":[34],"is":[35,140],"necessary":[36],"determine":[38],"anomalies":[39],"thereby":[41],"prevent":[42],"failure.":[43],"High-speed":[44,61],"gas":[45,105],"turbines":[46],"use":[47],"a":[48,70,96,129],"large":[49],"number":[50],"small":[52],"stator":[53,107],"blades":[54,108],"that":[55],"are":[56],"their":[59,113],"operation.":[60],"operation":[62],"induce":[64],"components":[66],"excess":[68],"few":[71],"kHz.":[72],"Internal":[73],"temperatures":[75],"be":[77,85],"well":[78],"above":[79],"250\u00b0C":[80],"the":[82,133],"sensors":[83],"should":[84],"operational":[86],"even":[87],"at":[88],"500\u00b0C.":[89],"This":[90],"paper":[91],"focuses":[92],"on":[93,104,132],"development":[94],"single-axis":[97],"MEMS":[98],"capacitive":[99],"accelerometer":[100],"for":[101,109,149],"direct":[102],"mounting":[103],"turbine":[106],"monitoring":[110],"analyzing":[112],"characteristics.":[115],"The":[116,137],"design":[117],"uses":[118],"SOI":[119],"wafer":[120],"substrate":[122],"realize":[124],"high":[125],"temperature":[126],"sensing":[127],"with":[128,145],"sensitivity":[130],"level":[131],"order":[134],"0.013\u03bcm/g.":[136],"proposed":[138],"device":[139],"developed":[141],"using":[142],"lab-scale":[143],"fabrication":[144],"minimal":[146],"facilities":[147],"amenable":[148],"low-cost":[150],"indigenous":[151],"manufacturing.":[152]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2019,"cited_by_count":2}],"updated_date":"2026-07-15T18:14:33.161393","created_date":"2025-10-10T00:00:00"}