{"id":"https://openalex.org/W2907458316","doi":"https://doi.org/10.1109/icsens.2018.8589773","title":"Lateral Porous Silicon Interferometric Transducer for Sensing Applications","display_name":"Lateral Porous Silicon Interferometric Transducer for Sensing Applications","publication_year":2018,"publication_date":"2018-10-01","ids":{"openalex":"https://openalex.org/W2907458316","doi":"https://doi.org/10.1109/icsens.2018.8589773","mag":"2907458316"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2018.8589773","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589773","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-03212723","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081220792","display_name":"Yingning He","orcid":"https://orcid.org/0000-0002-5873-4520"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Yingning He","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-MEMS - \u00c9quipe Microsyst\u00e8mes \u00e9lectrom\u00e9caniques (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-MEMS - \u00c9quipe Microsyst\u00e8mes \u00e9lectrom\u00e9caniques (France)","institution_ids":["https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034578836","display_name":"Douglas Silva de Vasconcellos","orcid":"https://orcid.org/0000-0003-0657-9642"},"institutions":[{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Douglas Silva De Vasconcellos","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-MEMS - \u00c9quipe Microsyst\u00e8mes \u00e9lectrom\u00e9caniques (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-MEMS - \u00c9quipe Microsyst\u00e8mes \u00e9lectrom\u00e9caniques (France)","institution_ids":["https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007560622","display_name":"V\u00e9ronique Bardinal","orcid":"https://orcid.org/0000-0001-9242-4457"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Veronique Bardinal","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-MICA - \u00c9quipe MICrosyst\u00e8mes d'Analyse (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-MICA - \u00c9quipe MICrosyst\u00e8mes d'Analyse (France)","institution_ids":["https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090037811","display_name":"David Bourrier","orcid":"https://orcid.org/0000-0003-0659-1924"},"institutions":[{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"David Bourrier","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001085414","display_name":"\u00c9ric Imbernon","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Eric Imbernon","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052323681","display_name":"Ludovic Salvagnac","orcid":"https://orcid.org/0000-0001-8862-5889"},"institutions":[{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ludovic Salvagnac","raw_affiliation_strings":["Universite Federale Toulouse Midi-Pyrenees, Toulouse, Occitanie, FR","LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)"],"affiliations":[{"raw_affiliation_string":"Universite Federale Toulouse Midi-Pyrenees, Toulouse, Occitanie, FR","institution_ids":[]},{"raw_affiliation_string":"LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105703035","display_name":"Adrian Laborde","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Adrian Laborde","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-TEAM - Service Techniques et \u00c9quipements Appliqu\u00e9s \u00e0 la Micro\u00e9lectronique (France)","institution_ids":["https://openalex.org/I4210128684","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004359620","display_name":"Xavier Dollat","orcid":null},"institutions":[{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Xavier Dollat","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-I2C - Service Instrumentation Conception Caract\u00e9risation (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-I2C - Service Instrumentation Conception Caract\u00e9risation (France)","institution_ids":["https://openalex.org/I190497903"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061931579","display_name":"Thierry Le\u00efchl\u00e9","orcid":"https://orcid.org/0000-0003-3183-8976"},"institutions":[{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I190497903","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210159245","https://openalex.org/I4387153255","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I17866349","display_name":"Universit\u00e9 F\u00e9d\u00e9rale de Toulouse Midi-Pyr\u00e9n\u00e9es","ror":"https://ror.org/004raaa70","country_code":"FR","type":"education","lineage":["https://openalex.org/I17866349"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Thierry Leichle","raw_affiliation_strings":["LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","LAAS-MEMS - \u00c9quipe Microsyst\u00e8mes \u00e9lectrom\u00e9caniques (France)"],"affiliations":[{"raw_affiliation_string":"LAAS-CNRS, Universit\u00e9 de Toulouse, Toulouse, France","institution_ids":["https://openalex.org/I17866349","https://openalex.org/I1294671590","https://openalex.org/I190497903"]},{"raw_affiliation_string":"LAAS-MEMS - \u00c9quipe Microsyst\u00e8mes \u00e9lectrom\u00e9caniques (France)","institution_ids":["https://openalex.org/I190497903"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5081220792"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I17866349","https://openalex.org/I190497903"],"apc_list":null,"apc_paid":null,"fwci":0.2959,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.53102207,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.8600455522537231},{"id":"https://openalex.org/keywords/refractive-index","display_name":"Refractive index","score":0.7520186305046082},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7350224852561951},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.7348500490188599},{"id":"https://openalex.org/keywords/porous-silicon","display_name":"Porous silicon","score":0.624314546585083},{"id":"https://openalex.org/keywords/interference","display_name":"Interference (communication)","score":0.6131508350372314},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.565954327583313},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.5247542858123779},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.49513593316078186},{"id":"https://openalex.org/keywords/fourier-transform","display_name":"Fourier transform","score":0.44085028767585754},{"id":"https://openalex.org/keywords/fourier-transform-infrared-spectroscopy","display_name":"Fourier transform infrared spectroscopy","score":0.4407828450202942},{"id":"https://openalex.org/keywords/refraction","display_name":"Refraction","score":0.4385930895805359},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.32153820991516113},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.1890963613986969},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1444130539894104},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09565410017967224},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07911407947540283}],"concepts":[{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.8600455522537231},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.7520186305046082},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7350224852561951},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.7348500490188599},{"id":"https://openalex.org/C2776685891","wikidata":"https://www.wikidata.org/wiki/Q428660","display_name":"Porous silicon","level":3,"score":0.624314546585083},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.6131508350372314},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.565954327583313},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5247542858123779},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.49513593316078186},{"id":"https://openalex.org/C102519508","wikidata":"https://www.wikidata.org/wiki/Q6520159","display_name":"Fourier transform","level":2,"score":0.44085028767585754},{"id":"https://openalex.org/C160892712","wikidata":"https://www.wikidata.org/wiki/Q901559","display_name":"Fourier transform infrared spectroscopy","level":2,"score":0.4407828450202942},{"id":"https://openalex.org/C205318122","wikidata":"https://www.wikidata.org/wiki/Q72277","display_name":"Refraction","level":2,"score":0.4385930895805359},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.32153820991516113},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.1890963613986969},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1444130539894104},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09565410017967224},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07911407947540283},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/icsens.2018.8589773","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589773","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-03212723v1","is_oa":true,"landing_page_url":"https://hal.science/hal-03212723","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2018 IEEE SENSORS, Oct 2018, New Delhi, India. ⟨10.1109/ICSENS.2018.8589773⟩","raw_type":"Conference papers"},{"id":"pmh:oai:oskar-bordeaux.fr:20.500.12278/36254","is_oa":false,"landing_page_url":"https://oskar-bordeaux.fr/handle/20.500.12278/36254","pdf_url":null,"source":{"id":"https://openalex.org/S4306402569","display_name":"Oskar-Bordeaux (Universite de Bordeaux)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2018 IEEE SENSORS","raw_type":"Communication dans un congr\u00e8s avec actes"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-03212723v1","is_oa":true,"landing_page_url":"https://hal.science/hal-03212723","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2018 IEEE SENSORS, Oct 2018, New Delhi, India. ⟨10.1109/ICSENS.2018.8589773⟩","raw_type":"Conference papers"},"sustainable_development_goals":[{"display_name":"Reduced inequalities","score":0.699999988079071,"id":"https://metadata.un.org/sdg/10"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W583369893","https://openalex.org/W1912205943","https://openalex.org/W2012976282","https://openalex.org/W2026988234","https://openalex.org/W2032777352","https://openalex.org/W2050972474","https://openalex.org/W2161483977","https://openalex.org/W2171761737","https://openalex.org/W2321334902","https://openalex.org/W2517707533"],"related_works":["https://openalex.org/W2012283803","https://openalex.org/W4384820447","https://openalex.org/W2072454424","https://openalex.org/W2117438306","https://openalex.org/W2185942010","https://openalex.org/W2260725127","https://openalex.org/W2004297762","https://openalex.org/W1857804639","https://openalex.org/W3149795367","https://openalex.org/W2369311880"],"abstract_inverted_index":{"In":[0],"this":[1,18],"work,":[2],"we":[3,20],"demonstrate":[4],"the":[5,39,57,68,73,79,82,89,99,108],"transducing":[6],"ability":[7],"of":[8,67,76,78,107],"lateral":[9],"porous":[10],"silicon":[11],"membranes":[12,47],"(LPSi)":[13],"using":[14,27],"optical":[15,70],"interferometry.":[16],"To":[17],"aim,":[19],"carry":[21],"out":[22],"Fourier-transform":[23],"infrared":[24],"spectroscopy":[25],"measurements":[26],"a":[28,105],"microscope":[29],"equipped":[30],"with":[31,48,59],"an":[32],"appropriate":[33],"objective":[34],"in":[35,81],"order":[36],"to":[37,41],"overcome":[38],"difficulty":[40],"obtain":[42],"interference":[43],"signal":[44],"from":[45],"LPSi":[46,109],"small":[49],"dimensions.":[50],"Reflectance":[51],"spectra":[52],"are":[53],"recorded":[54],"while":[55],"filling":[56],"membrane":[58],"various":[60,90],"solvents":[61,91],"and":[62,72,96],"their":[63],"analysis":[64],"provide":[65],"estimations":[66],"effective":[69],"thicknesses":[71],"resulting":[74],"index":[75],"refraction":[77],"fillers":[80],"NIR":[83],"range.":[84],"The":[85],"results":[86],"show":[87],"that":[88],"can":[92],"appropriately":[93],"be":[94],"identified":[95],"discriminated":[97],"through":[98],"derived":[100],"refractive":[101],"indices,":[102],"thus":[103],"providing":[104],"proof-of-concept":[106],"interferometric":[110],"transducer.":[111]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}