{"id":"https://openalex.org/W2908180264","doi":"https://doi.org/10.1109/icsens.2018.8589687","title":"Development of an Integrated CMOS-Microfluidics for Bioelectronic Nose","display_name":"Development of an Integrated CMOS-Microfluidics for Bioelectronic Nose","publication_year":2018,"publication_date":"2018-10-01","ids":{"openalex":"https://openalex.org/W2908180264","doi":"https://doi.org/10.1109/icsens.2018.8589687","mag":"2908180264"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2018.8589687","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589687","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5046910856","display_name":"Alexander Kuznetsov","orcid":"https://orcid.org/0000-0002-1333-5294"},"institutions":[{"id":"https://openalex.org/I4210109776","display_name":"Research and Production Complex Technological Centre","ror":"https://ror.org/01pq8wx80","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210109776"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. Kuznetsov","raw_affiliation_strings":["Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]},{"raw_affiliation_string":"Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058899254","display_name":"\u0415. \u0412. \u041a\u0443\u0437\u043d\u0435\u0446\u043e\u0432","orcid":"https://orcid.org/0000-0001-6161-0994"},"institutions":[{"id":"https://openalex.org/I4210109776","display_name":"Research and Production Complex Technological Centre","ror":"https://ror.org/01pq8wx80","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210109776"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"E. Kuznetsov","raw_affiliation_strings":["Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]},{"raw_affiliation_string":"Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066937739","display_name":"E. N. Rybachek","orcid":null},"institutions":[{"id":"https://openalex.org/I4210109776","display_name":"Research and Production Complex Technological Centre","ror":"https://ror.org/01pq8wx80","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210109776"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"E. Rybachek","raw_affiliation_strings":["Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]},{"raw_affiliation_string":"Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091133391","display_name":"Kirill Puchnin","orcid":"https://orcid.org/0000-0003-3158-4929"},"institutions":[{"id":"https://openalex.org/I4210109776","display_name":"Research and Production Complex Technological Centre","ror":"https://ror.org/01pq8wx80","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210109776"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"K. Puchnin","raw_affiliation_strings":["Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]},{"raw_affiliation_string":"Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072517557","display_name":"Vitaliy Grudtsov","orcid":"https://orcid.org/0000-0002-9564-5009"},"institutions":[{"id":"https://openalex.org/I4210109776","display_name":"Research and Production Complex Technological Centre","ror":"https://ror.org/01pq8wx80","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210109776"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"V. Grudtsov","raw_affiliation_strings":["Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]},{"raw_affiliation_string":"Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034858608","display_name":"A. N. Saurov","orcid":null},"institutions":[{"id":"https://openalex.org/I4210109776","display_name":"Research and Production Complex Technological Centre","ror":"https://ror.org/01pq8wx80","country_code":"RU","type":"facility","lineage":["https://openalex.org/I4210109776"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. Saurov","raw_affiliation_strings":["Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scientific-Manufacturing Complex \u201cTechnological centre\u201d, Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]},{"raw_affiliation_string":"Scientific-Manufacturing Complex \"Technological centre\", Zelenograd, Russia","institution_ids":["https://openalex.org/I4210109776"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210109776"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16141063,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"9","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9926000237464905,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microsystem","display_name":"Microsystem","score":0.8965262174606323},{"id":"https://openalex.org/keywords/microfluidics","display_name":"Microfluidics","score":0.7687081098556519},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.6416006684303284},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.6186434030532837},{"id":"https://openalex.org/keywords/isfet","display_name":"ISFET","score":0.6007166504859924},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5916568636894226},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.5064178705215454},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.4784550666809082},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.3575432300567627},{"id":"https://openalex.org/keywords/field-effect-transistor","display_name":"Field-effect transistor","score":0.3089672923088074},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.24705028533935547},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.1421811282634735},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.10758554935455322},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.10592621564865112},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09575653076171875}],"concepts":[{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.8965262174606323},{"id":"https://openalex.org/C8673954","wikidata":"https://www.wikidata.org/wiki/Q138845","display_name":"Microfluidics","level":2,"score":0.7687081098556519},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.6416006684303284},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.6186434030532837},{"id":"https://openalex.org/C154275363","wikidata":"https://www.wikidata.org/wiki/Q904133","display_name":"ISFET","level":5,"score":0.6007166504859924},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5916568636894226},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5064178705215454},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4784550666809082},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.3575432300567627},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.3089672923088074},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24705028533935547},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.1421811282634735},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.10758554935455322},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.10592621564865112},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09575653076171875},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2018.8589687","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589687","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.4099999964237213}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1970770629","https://openalex.org/W1998281576","https://openalex.org/W2006181275","https://openalex.org/W2060315146","https://openalex.org/W2063872198","https://openalex.org/W2103051216","https://openalex.org/W2166121654","https://openalex.org/W2564138572","https://openalex.org/W2767237175"],"related_works":["https://openalex.org/W2026128288","https://openalex.org/W4232410003","https://openalex.org/W2012873538","https://openalex.org/W1980614888","https://openalex.org/W2063174160","https://openalex.org/W1997963871","https://openalex.org/W4250442938","https://openalex.org/W2333264988","https://openalex.org/W4250415373","https://openalex.org/W2022856681"],"abstract_inverted_index":{"Integration":[0],"of":[1,16,30,33,64,70,96],"microfluidic":[2],"systems":[3],"within":[4],"an":[5,31],"integrated":[6],"circuit":[7],"is":[8],"a":[9,27,42],"promising":[10],"approach":[11],"for":[12,26,60,94],"developing":[13],"new":[14],"generation":[15],"bioelectronic":[17],"noses.":[18],"In":[19],"this":[20],"paper,":[21],"we":[22],"present":[23],"fabrication":[24],"techniques":[25],"microsystem":[28,75],"consisting":[29],"array":[32],"ion":[34],"sensitive":[35],"field-effect":[36],"transistors":[37],"in":[38],"hydrophilic":[39,68],"cell":[40],"under":[41],"hydrophobic":[43,62],"membrane.":[44],"Sacrificial":[45],"aluminum":[46],"etching":[47],"technique":[48],"was":[49,85],"used":[50,59],"to":[51,87],"form":[52],"capillary":[53],"microchannels,":[54],"and":[55,67],"self-assembled":[56],"monolayers":[57],"were":[58],"achieving":[61,90],"properties":[63,69],"the":[65,71],"membrane":[66,77],"microchannels.":[72],"The":[73],"developed":[74],"with":[76],"pore":[78],"size":[79],"4":[80],"\u03bcm":[81],"<sup":[82],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[83],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[84],"shown":[86],"hold":[88],"liquid,":[89],"stable":[91],"air-liquid":[92],"interface":[93],"extraction":[95],"molecules":[97],"from":[98],"gaseous":[99],"phase.":[100]},"counts_by_year":[],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}