{"id":"https://openalex.org/W2908171239","doi":"https://doi.org/10.1109/icsens.2018.8589630","title":"Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications","display_name":"Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications","publication_year":2018,"publication_date":"2018-10-01","ids":{"openalex":"https://openalex.org/W2908171239","doi":"https://doi.org/10.1109/icsens.2018.8589630","mag":"2908171239"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2018.8589630","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589630","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056978501","display_name":"Luke M. Middelburg","orcid":"https://orcid.org/0000-0003-1599-6659"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"L.M. Middelburg","raw_affiliation_strings":["Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008700921","display_name":"Brahim El Mansouri","orcid":null},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"B. El Mansouri","raw_affiliation_strings":["Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061448538","display_name":"Ren\u00e9 H. Poelma","orcid":"https://orcid.org/0000-0002-4180-7033"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Rene Poelma","raw_affiliation_strings":["Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000424567","display_name":"Guoqi Zhang","orcid":"https://orcid.org/0000-0002-8023-5170"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"G.Q. Zhang","raw_affiliation_strings":["Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022656667","display_name":"Henk van Zeijl","orcid":null},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Henk Van Zeijl","raw_affiliation_strings":["Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Components, Technology and Materials, Delft University of Technology, Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5008658012","display_name":"Jia Wei","orcid":"https://orcid.org/0000-0002-4638-7146"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jia Wei","raw_affiliation_strings":["Else Kooi Laboratory, Delft, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Else Kooi Laboratory, Delft, The Netherlands","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.15216292,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2001","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8583955764770508},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7232545018196106},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5707893371582031},{"id":"https://openalex.org/keywords/photodiode","display_name":"Photodiode","score":0.4865402281284332},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.45957231521606445},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.4496496319770813},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.43799909949302673},{"id":"https://openalex.org/keywords/tilt","display_name":"Tilt (camera)","score":0.43581920862197876},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.41035449504852295},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4027327299118042},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.39124172925949097},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3594087064266205},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3299791216850281},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32700222730636597},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2769085764884949},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2606791853904724},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.2457522451877594},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17441493272781372}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8583955764770508},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7232545018196106},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5707893371582031},{"id":"https://openalex.org/C751236","wikidata":"https://www.wikidata.org/wiki/Q175943","display_name":"Photodiode","level":2,"score":0.4865402281284332},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.45957231521606445},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.4496496319770813},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.43799909949302673},{"id":"https://openalex.org/C2779844322","wikidata":"https://www.wikidata.org/wiki/Q2919140","display_name":"Tilt (camera)","level":2,"score":0.43581920862197876},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.41035449504852295},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4027327299118042},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.39124172925949097},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3594087064266205},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3299791216850281},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32700222730636597},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2769085764884949},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2606791853904724},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.2457522451877594},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17441493272781372},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icsens.2018.8589630","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2018.8589630","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:tudelft.nl:uuid:cb60696d-11f4-4e07-adc4-2aca485f3b87","is_oa":false,"landing_page_url":"http://resolver.tudelft.nl/uuid:cb60696d-11f4-4e07-adc4-2aca485f3b87","pdf_url":null,"source":{"id":"https://openalex.org/S4306400906","display_name":"Research Repository (Delft University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I98358874","host_organization_name":"Delft University of Technology","host_organization_lineage":["https://openalex.org/I98358874"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1533567697","https://openalex.org/W2105103777","https://openalex.org/W2136268807","https://openalex.org/W2315483489","https://openalex.org/W2519117914","https://openalex.org/W2767284204","https://openalex.org/W6632174570"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2272290532","https://openalex.org/W2355290145","https://openalex.org/W2353465659","https://openalex.org/W2009888974","https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2018992582"],"abstract_inverted_index":{"This":[0,84],"work":[1,37,102],"describes":[2],"the":[3,9,38,71,75,82],"design,":[4],"modelling":[5],"and":[6,53,79],"realisation":[7],"of":[8,12,61,81,90,100],"mechanical":[10,39,88],"part":[11],"a":[13,24,51,58,87,106],"non-linear":[14],"MEMS":[15],"accelerometer":[16],"intended":[17],"for":[18,112],"large":[19],"displacement":[20],"behaviour.":[21],"For":[22],"this,":[23],"mass/spring":[25],"system":[26],"was":[27,41],"designed":[28],"with":[29],"an":[30,47],"extremely":[31],"low":[32],"resonance":[33,59],"frequency.":[34],"In":[35],"this":[36,101],"behaviour":[40],"verified":[42],"by":[43,73],"measurements":[44],"done":[45],"using":[46],"optical":[48],"setup,":[49],"including":[50],"laser":[52],"photodiode.":[54],"The":[55,97],"results":[56,85],"are":[57],"frequency":[60],"12.6":[62],"Hz,":[63],"which":[64],"can":[65],"be":[66],"further":[67],"tuned":[68],"depending":[69],"on":[70,109],"application":[72],"varying":[74],"mass,":[76],"beam":[77],"thickness":[78],"tilt":[80],"structure.":[83],"in":[86],"sensitivity":[89],"0.16":[91],"[mm/ms":[92],"<sup":[93],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[94],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-2</sup>":[95],"].":[96],"future":[98],"goal":[99],"is":[103],"to":[104],"integrate":[105],"read-out":[107],"scheme":[108],"wafer":[110],"level,":[111],"example":[113],"electrostatically.":[114]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}