{"id":"https://openalex.org/W2776004467","doi":"https://doi.org/10.1109/icsens.2017.8234393","title":"Diamond/ZnO/LiNbO<sub>3</sub> structure for packageless acoustic wave sensors","display_name":"Diamond/ZnO/LiNbO<sub>3</sub> structure for packageless acoustic wave sensors","publication_year":2017,"publication_date":"2017-10-01","ids":{"openalex":"https://openalex.org/W2776004467","doi":"https://doi.org/10.1109/icsens.2017.8234393","mag":"2776004467"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2017.8234393","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8234393","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-01628938","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003590085","display_name":"C\u00e9cile Floer","orcid":"https://orcid.org/0000-0001-9228-1142"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cecile Floer","raw_affiliation_strings":["Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028008447","display_name":"Fabien B\u00e9n\u00e9dic","orcid":"https://orcid.org/0000-0003-3350-4021"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210091279","display_name":"Universit\u00e9 Sorbonne Paris Nord","ror":"https://ror.org/0199hds37","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210091279"]},{"id":"https://openalex.org/I4210091437","display_name":"Sorbonne Paris Cit\u00e9","ror":"https://ror.org/001z21q04","country_code":"FR","type":"other","lineage":["https://openalex.org/I4210091437"]},{"id":"https://openalex.org/I4210115747","display_name":"Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux","ror":"https://ror.org/01yr0r787","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210115747"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Fabien Benedic","raw_affiliation_strings":["LSPM - CNRS, Sorbonne Paris Cite Villetaneuse, France","LSPM - Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (Institut Galil\u00e9e, Universit\u00e9 Paris 13, 99 avenue Jean-baptiste Cl\u00e9ment, F-93430 Villetaneuse - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LSPM - CNRS, Sorbonne Paris Cite Villetaneuse, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210091437","https://openalex.org/I4210115747"]},{"raw_affiliation_string":"LSPM - Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (Institut Galil\u00e9e, Universit\u00e9 Paris 13, 99 avenue Jean-baptiste Cl\u00e9ment, F-93430 Villetaneuse - France)","institution_ids":["https://openalex.org/I4210091279","https://openalex.org/I4210115747"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031666689","display_name":"Sergei Zhgoon","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171241948","display_name":"Moscow Power Engineering Institute","ror":"https://ror.org/05sa6gg87","country_code":"RU","type":"education","lineage":["https://openalex.org/I171241948"]},{"id":"https://openalex.org/I4210091437","display_name":"Sorbonne Paris Cit\u00e9","ror":"https://ror.org/001z21q04","country_code":"FR","type":"other","lineage":["https://openalex.org/I4210091437"]},{"id":"https://openalex.org/I4210115747","display_name":"Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux","ror":"https://ror.org/01yr0r787","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210115747"]}],"countries":["FR","RU"],"is_corresponding":false,"raw_author_name":"Sergei Zhgoon","raw_affiliation_strings":["LSPM - CNRS, Sorbonne Paris Cite Villetaneuse, France","National Research University, Moscow Power Engineering Institute (Russia)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LSPM - CNRS, Sorbonne Paris Cite Villetaneuse, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210091437","https://openalex.org/I4210115747"]},{"raw_affiliation_string":"National Research University, Moscow Power Engineering Institute (Russia)","institution_ids":["https://openalex.org/I171241948"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Abdelkrim Talbi","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171241948","display_name":"Moscow Power Engineering Institute","ror":"https://ror.org/05sa6gg87","country_code":"RU","type":"education","lineage":["https://openalex.org/I171241948"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I7454413","display_name":"\u00c9cole Centrale de Lille","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR","RU"],"is_corresponding":false,"raw_author_name":"Abdelkrim Talbi","raw_affiliation_strings":["National Research university \u201cMPEI\u201d, Moscow, Russia","AIMAN-FILMS - IEMN - Acoustique Impulsionnelle & Magn\u00e9to-Acoustique Non lin\u00e9aire - Fluides, Interfaces Liquides & Micro-Syst\u00e8mes - IEMN (Groupe AIMAN-FILMS (Magn\u00e9to-\u00e9lectriques, Electonique fonctionnelle, Acoustique, MEMS, Micro-fluidique) - \r\nIEMN -\r\nUniversit\u00e9 de Lille - ECLille - Cit\u00e9 scientifique - BP48 - 59651 Villeneuve d'Ascq\r\n - France)","IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Ecole Centrale Lille, Yncr\u00e9a-ISEN, UVHC] \u2013\u2013 \r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Research university \u201cMPEI\u201d, Moscow, Russia","institution_ids":["https://openalex.org/I171241948"]},{"raw_affiliation_string":"AIMAN-FILMS - IEMN - Acoustique Impulsionnelle & Magn\u00e9to-Acoustique Non lin\u00e9aire - Fluides, Interfaces Liquides & Micro-Syst\u00e8mes - IEMN (Groupe AIMAN-FILMS (Magn\u00e9to-\u00e9lectriques, Electonique fonctionnelle, Acoustique, MEMS, Micro-fluidique) - \r\nIEMN -\r\nUniversit\u00e9 de Lille - ECLille - Cit\u00e9 scientifique - BP48 - 59651 Villeneuve d'Ascq\r\n - France)","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Ecole Centrale Lille, Yncr\u00e9a-ISEN, UVHC] \u2013\u2013 \r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471","https://openalex.org/I7454413"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107876369","display_name":"Olivier Bou Matar","orcid":null},"institutions":[{"id":"https://openalex.org/I102475099","display_name":"Sup\u00e9lec","ror":"https://ror.org/00n7gwn90","country_code":"FR","type":"education","lineage":["https://openalex.org/I102475099"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I4210148061","display_name":"Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes","ror":"https://ror.org/055swm364","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210107720","https://openalex.org/I4210110412","https://openalex.org/I4210139971","https://openalex.org/I4210148061","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I7454413","display_name":"\u00c9cole Centrale de Lille","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Olivier Bou Matar","raw_affiliation_strings":["LMOPS EA 4423, Centrale Supelec - Universite de Lorraine, Metz, France","IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Ecole Centrale Lille, Yncr\u00e9a-ISEN, UVHC] \u2013\u2013 \r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LMOPS EA 4423, Centrale Supelec - Universite de Lorraine, Metz, France","institution_ids":["https://openalex.org/I102475099","https://openalex.org/I4210148061","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Ecole Centrale Lille, Yncr\u00e9a-ISEN, UVHC] \u2013\u2013 \r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471","https://openalex.org/I7454413"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Florian Bartoli","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210107720","display_name":"CentraleSup\u00e9lec","ror":"https://ror.org/019tcpt25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I277688954","https://openalex.org/I4210107720"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I4210148061","display_name":"Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes","ror":"https://ror.org/055swm364","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210107720","https://openalex.org/I4210110412","https://openalex.org/I4210139971","https://openalex.org/I4210148061","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Florian Bartoli","raw_affiliation_strings":["Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","LMOPS - Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes (Universit\u00e9 de Lorraine - CentraleSup\u00e9lec, 2 rue Edouard Belin, 57070 Metz - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"LMOPS - Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes (Universit\u00e9 de Lorraine - CentraleSup\u00e9lec, 2 rue Edouard Belin, 57070 Metz - France)","institution_ids":["https://openalex.org/I4210107720","https://openalex.org/I4210148061","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107870761","display_name":"Thierry Aubert","orcid":null},"institutions":[{"id":"https://openalex.org/I4210107720","display_name":"CentraleSup\u00e9lec","ror":"https://ror.org/019tcpt25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I277688954","https://openalex.org/I4210107720"]},{"id":"https://openalex.org/I4210148061","display_name":"Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes","ror":"https://ror.org/055swm364","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210107720","https://openalex.org/I4210110412","https://openalex.org/I4210139971","https://openalex.org/I4210148061","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Thierry Aubert","raw_affiliation_strings":["Universite de Lorraine, Nancy, Lorraine, FR","LMOPS - Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes (Universit\u00e9 de Lorraine - CentraleSup\u00e9lec, 2 rue Edouard Belin, 57070 Metz - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universite de Lorraine, Nancy, Lorraine, FR","institution_ids":["https://openalex.org/I90183372"]},{"raw_affiliation_string":"LMOPS - Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes (Universit\u00e9 de Lorraine - CentraleSup\u00e9lec, 2 rue Edouard Belin, 57070 Metz - France)","institution_ids":["https://openalex.org/I4210107720","https://openalex.org/I4210148061","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105938087","display_name":"Mohammed Moutaouekkil","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Mohammed Moutaouekkil","raw_affiliation_strings":["Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Florian Bartoli","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210107720","display_name":"CentraleSup\u00e9lec","ror":"https://ror.org/019tcpt25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I277688954","https://openalex.org/I4210107720"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I4210148061","display_name":"Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes","ror":"https://ror.org/055swm364","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210107720","https://openalex.org/I4210110412","https://openalex.org/I4210139971","https://openalex.org/I4210148061","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Florian Bartoli","raw_affiliation_strings":["Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","LMOPS - Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes (Universit\u00e9 de Lorraine - CentraleSup\u00e9lec, 2 rue Edouard Belin, 57070 Metz - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"LMOPS - Laboratoire Mat\u00e9riaux Optiques, Photonique et Syst\u00e8mes (Universit\u00e9 de Lorraine - CentraleSup\u00e9lec, 2 rue Edouard Belin, 57070 Metz - France)","institution_ids":["https://openalex.org/I4210107720","https://openalex.org/I4210148061","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036623131","display_name":"Harshad Mishra","orcid":"https://orcid.org/0000-0001-5516-6874"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Harshad Mishra","raw_affiliation_strings":["Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110559739","display_name":"Stefan McMurtry","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Stefan McMurtry","raw_affiliation_strings":["Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Jean Lamour UMR 7198, Universite de Lorraine - CNRS, Nancy, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108167045","display_name":"Sami Hage\u2010Ali","orcid":"https://orcid.org/0000-0002-5139-7277"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Sami Hage-Ali","raw_affiliation_strings":["Universite de Lorraine, Nancy, Lorraine, FR","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universite de Lorraine, Nancy, Lorraine, FR","institution_ids":["https://openalex.org/I90183372"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034336089","display_name":"Omar Elmazria","orcid":"https://orcid.org/0000-0003-4917-9120"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210118628","display_name":"Joint Research Center","ror":"https://ror.org/02ef88m96","country_code":"BE","type":"government","lineage":["https://openalex.org/I1320481043","https://openalex.org/I2800387288","https://openalex.org/I4210118628","https://openalex.org/I4210161702"]},{"id":"https://openalex.org/I4210147295","display_name":"Institut Jean Lamour","ror":"https://ror.org/05k1smh27","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210128300","https://openalex.org/I4210147295","https://openalex.org/I90183372"]},{"id":"https://openalex.org/I90183372","display_name":"Universit\u00e9 de Lorraine","ror":"https://ror.org/04vfs2w97","country_code":"FR","type":"education","lineage":["https://openalex.org/I90183372"]}],"countries":["BE","FR"],"is_corresponding":false,"raw_author_name":"Omar Elmazria","raw_affiliation_strings":["Joint International Laboratory LIA LICS/LEMAC, ECLille Villeneuve d'Ascq, France","IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Joint International Laboratory LIA LICS/LEMAC, ECLille Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I4210118628"]},{"raw_affiliation_string":"IJL - Institut Jean Lamour (Institut Jean Lamour - CNRS - Universit\u00e9 de Lorraine. Campus Artem 2 all\u00e9e Andr\u00e9 Guinier BP 50840 54011 Nancy Cedex - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210147295","https://openalex.org/I90183372"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017351046","display_name":"Damia Dekkar","orcid":null},"institutions":[{"id":"https://openalex.org/I4210091279","display_name":"Universit\u00e9 Sorbonne Paris Nord","ror":"https://ror.org/0199hds37","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210091279"]},{"id":"https://openalex.org/I4210115747","display_name":"Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux","ror":"https://ror.org/01yr0r787","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210115747"]},{"id":"https://openalex.org/I4210118628","display_name":"Joint Research Center","ror":"https://ror.org/02ef88m96","country_code":"BE","type":"government","lineage":["https://openalex.org/I1320481043","https://openalex.org/I2800387288","https://openalex.org/I4210118628","https://openalex.org/I4210161702"]}],"countries":["BE","FR"],"is_corresponding":false,"raw_author_name":"Damia Dekkar","raw_affiliation_strings":["Joint International Laboratory LIA LICS/LEMAC, ECLille Villeneuve d'Ascq, France","LSPM - Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (Institut Galil\u00e9e, Universit\u00e9 Paris 13, 99 avenue Jean-baptiste Cl\u00e9ment, F-93430 Villetaneuse - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Joint International Laboratory LIA LICS/LEMAC, ECLille Villeneuve d'Ascq, France","institution_ids":["https://openalex.org/I4210118628"]},{"raw_affiliation_string":"LSPM - Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (Institut Galil\u00e9e, Universit\u00e9 Paris 13, 99 avenue Jean-baptiste Cl\u00e9ment, F-93430 Villetaneuse - France)","institution_ids":["https://openalex.org/I4210091279","https://openalex.org/I4210115747"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5069033185","display_name":"Beno\u00eet Baudrillart","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210091279","display_name":"Universit\u00e9 Sorbonne Paris Nord","ror":"https://ror.org/0199hds37","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210091279"]},{"id":"https://openalex.org/I4210091437","display_name":"Sorbonne Paris Cit\u00e9","ror":"https://ror.org/001z21q04","country_code":"FR","type":"other","lineage":["https://openalex.org/I4210091437"]},{"id":"https://openalex.org/I4210115747","display_name":"Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux","ror":"https://ror.org/01yr0r787","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210115747"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Benoit Baudrillart","raw_affiliation_strings":["LSPM - CNRS, Sorbonne Paris Cite Villetaneuse, France","LSPM - Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (Institut Galil\u00e9e, Universit\u00e9 Paris 13, 99 avenue Jean-baptiste Cl\u00e9ment, F-93430 Villetaneuse - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LSPM - CNRS, Sorbonne Paris Cite Villetaneuse, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210091437","https://openalex.org/I4210115747"]},{"raw_affiliation_string":"LSPM - Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (Institut Galil\u00e9e, Universit\u00e9 Paris 13, 99 avenue Jean-baptiste Cl\u00e9ment, F-93430 Villetaneuse - France)","institution_ids":["https://openalex.org/I4210091279","https://openalex.org/I4210115747"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":14,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.5047,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.63904316,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/diamond","display_name":"Diamond","score":0.836602509021759},{"id":"https://openalex.org/keywords/nanocrystalline-material","display_name":"Nanocrystalline material","score":0.6645721793174744},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5745017528533936},{"id":"https://openalex.org/keywords/diamond-cubic","display_name":"Diamond cubic","score":0.5662398934364319},{"id":"https://openalex.org/keywords/surface-acoustic-wave","display_name":"Surface acoustic wave","score":0.5424992442131042},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.432902067899704},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2372068166732788},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.23692339658737183},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21469607949256897},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.17799806594848633}],"concepts":[{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.836602509021759},{"id":"https://openalex.org/C140676511","wikidata":"https://www.wikidata.org/wiki/Q6964018","display_name":"Nanocrystalline material","level":2,"score":0.6645721793174744},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5745017528533936},{"id":"https://openalex.org/C153015087","wikidata":"https://www.wikidata.org/wiki/Q905169","display_name":"Diamond cubic","level":3,"score":0.5662398934364319},{"id":"https://openalex.org/C162954803","wikidata":"https://www.wikidata.org/wiki/Q424074","display_name":"Surface acoustic wave","level":2,"score":0.5424992442131042},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.432902067899704},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2372068166732788},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.23692339658737183},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21469607949256897},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17799806594848633}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/icsens.2017.8234393","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8234393","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-01628938v1","is_oa":true,"landing_page_url":"https://hal.science/hal-01628938","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Sensors, Oct 2017, Glasgow, United Kingdom. &#x27E8;10.1109/ICSENS.2017.8234393&#x27E9;","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:lilloa.univ-lille.fr:20.500.12210/45650","is_oa":true,"landing_page_url":"http://hdl.handle.net/20.500.12210/45650","pdf_url":null,"source":{"id":"https://openalex.org/S4306402203","display_name":"LillOA (Universit\u00e9 de Lille (University Of Lille))","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210123514","host_organization_name":"Centre d'Etudes en Civilisations, Langues et Litt\u00e9ratures Etrang\u00e8res","host_organization_lineage":["https://openalex.org/I4210123514"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-01628938v1","is_oa":true,"landing_page_url":"https://hal.science/hal-01628938","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Sensors, Oct 2017, Glasgow, United Kingdom. &#x27E8;10.1109/ICSENS.2017.8234393&#x27E9;","raw_type":"info:eu-repo/semantics/conferenceObject"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G3172997804","display_name":"Isite LUE","funder_award_id":"ANR-15-IDEX-0004","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"}],"funders":[{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1559370051","https://openalex.org/W2011673397","https://openalex.org/W2013337501","https://openalex.org/W2106060253","https://openalex.org/W2147058829","https://openalex.org/W2151047153","https://openalex.org/W2157063767","https://openalex.org/W2170022258","https://openalex.org/W2460244608","https://openalex.org/W2577771750","https://openalex.org/W2769747040"],"related_works":["https://openalex.org/W2059336044","https://openalex.org/W2085641161","https://openalex.org/W2767609136","https://openalex.org/W4364856139","https://openalex.org/W1965996974","https://openalex.org/W1985912658","https://openalex.org/W3141607282","https://openalex.org/W2979041126","https://openalex.org/W4309929775","https://openalex.org/W2144851247"],"abstract_inverted_index":{"This":[0],"paper":[1],"studies":[2],"the":[3,17],"Diamond/ZnO/LiNbO3structure,":[4],"numerically":[5],"and":[6],"experimentally,":[7],"as":[8],"a":[9,12],"candidate":[10],"for":[11],"packageless":[13],"sensor":[14],"based":[15],"on":[16,48],"surface":[18],"acoustic":[19],"wave":[20],"technology.":[21],"The":[22],"structure":[23],"is":[24],"compared":[25],"with":[26,37],"an":[27],"AlN/ZnO/LiNbO3structure,":[28],"in":[29],"order":[30],"to":[31,39],"highlight":[32],"better":[33],"performances":[34],"of":[35,44],"diamond":[36,46],"respect":[38],"AlN.":[40],"Early":[41],"experimental":[42],"results":[43],"nanocrystalline":[45],"growth":[47],"ZnO/Si":[49],"are":[50],"presented.":[51]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}