{"id":"https://openalex.org/W2782328816","doi":"https://doi.org/10.1109/icsens.2017.8234298","title":"Ultra-thin relative humidity sensors for hybrid system-in-foil applications","display_name":"Ultra-thin relative humidity sensors for hybrid system-in-foil applications","publication_year":2017,"publication_date":"2017-10-01","ids":{"openalex":"https://openalex.org/W2782328816","doi":"https://doi.org/10.1109/icsens.2017.8234298","mag":"2782328816"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2017.8234298","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8234298","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025636719","display_name":"Mourad Elsobky","orcid":"https://orcid.org/0000-0002-3206-4688"},"institutions":[{"id":"https://openalex.org/I4210164948","display_name":"Institut f\u00fcr Mikroelektronik Stuttgart","ror":"https://ror.org/05kw00716","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I4210164948"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Mourad Elsobky","raw_affiliation_strings":["Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210164948"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088891418","display_name":"Bj\u00f6rn Albrecht","orcid":"https://orcid.org/0000-0002-5311-6221"},"institutions":[{"id":"https://openalex.org/I4210164948","display_name":"Institut f\u00fcr Mikroelektronik Stuttgart","ror":"https://ror.org/05kw00716","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I4210164948"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Bjorn Albrecht","raw_affiliation_strings":["Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210164948"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014530657","display_name":"H. Richter","orcid":"https://orcid.org/0000-0003-0205-0784"},"institutions":[{"id":"https://openalex.org/I4210164948","display_name":"Institut f\u00fcr Mikroelektronik Stuttgart","ror":"https://ror.org/05kw00716","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I4210164948"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Harald Richter","raw_affiliation_strings":["Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210164948"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074267030","display_name":"Joachim N. Burghartz","orcid":"https://orcid.org/0000-0002-6013-6677"},"institutions":[{"id":"https://openalex.org/I4210164948","display_name":"Institut f\u00fcr Mikroelektronik Stuttgart","ror":"https://ror.org/05kw00716","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I4210164948"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Joachim N. Burghartz","raw_affiliation_strings":["Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Mikroelektronik Stuttgart - IMS CHIPS, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210164948"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057347299","display_name":"Pirmin Ganter","orcid":null},"institutions":[{"id":"https://openalex.org/I4210088365","display_name":"Max Planck Institute for Solid State Research","ror":"https://ror.org/005bk2339","country_code":"DE","type":"facility","lineage":["https://openalex.org/I149899117","https://openalex.org/I4210088365"]},{"id":"https://openalex.org/I8204097","display_name":"Ludwig-Maximilians-Universit\u00e4t M\u00fcnchen","ror":"https://ror.org/05591te55","country_code":"DE","type":"education","lineage":["https://openalex.org/I8204097"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Pirmin Ganter","raw_affiliation_strings":["Lndwig-Maximilians-Universit\u00e4t (LMU), Munich, Germany","Max Planck Institute for Solid State Research, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Lndwig-Maximilians-Universit\u00e4t (LMU), Munich, Germany","institution_ids":["https://openalex.org/I8204097"]},{"raw_affiliation_string":"Max Planck Institute for Solid State Research, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210088365"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052422201","display_name":"Katalin Szendrei","orcid":null},"institutions":[{"id":"https://openalex.org/I8204097","display_name":"Ludwig-Maximilians-Universit\u00e4t M\u00fcnchen","ror":"https://ror.org/05591te55","country_code":"DE","type":"education","lineage":["https://openalex.org/I8204097"]},{"id":"https://openalex.org/I4210088365","display_name":"Max Planck Institute for Solid State Research","ror":"https://ror.org/005bk2339","country_code":"DE","type":"facility","lineage":["https://openalex.org/I149899117","https://openalex.org/I4210088365"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Katalin Szendrei","raw_affiliation_strings":["Lndwig-Maximilians-Universit\u00e4t (LMU), Munich, Germany","Max Planck Institute for Solid State Research, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Lndwig-Maximilians-Universit\u00e4t (LMU), Munich, Germany","institution_ids":["https://openalex.org/I8204097"]},{"raw_affiliation_string":"Max Planck Institute for Solid State Research, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210088365"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046180571","display_name":"Bettina V. Lotsch","orcid":"https://orcid.org/0000-0002-3094-303X"},"institutions":[{"id":"https://openalex.org/I4210088365","display_name":"Max Planck Institute for Solid State Research","ror":"https://ror.org/005bk2339","country_code":"DE","type":"facility","lineage":["https://openalex.org/I149899117","https://openalex.org/I4210088365"]},{"id":"https://openalex.org/I8204097","display_name":"Ludwig-Maximilians-Universit\u00e4t M\u00fcnchen","ror":"https://ror.org/05591te55","country_code":"DE","type":"education","lineage":["https://openalex.org/I8204097"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Bettina V. Lotsch","raw_affiliation_strings":["Lndwig-Maximilians-Universit\u00e4t (LMU), Munich, Germany","Max Planck Institute for Solid State Research, Stuttgart, Germany"],"affiliations":[{"raw_affiliation_string":"Lndwig-Maximilians-Universit\u00e4t (LMU), Munich, Germany","institution_ids":["https://openalex.org/I8204097"]},{"raw_affiliation_string":"Max Planck Institute for Solid State Research, Stuttgart, Germany","institution_ids":["https://openalex.org/I4210088365"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5025636719"],"corresponding_institution_ids":["https://openalex.org/I4210164948"],"apc_list":null,"apc_paid":null,"fwci":0.8601,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.76730012,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9918000102043152,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/foil-method","display_name":"FOIL method","score":0.7224421501159668},{"id":"https://openalex.org/keywords/relative-humidity","display_name":"Relative humidity","score":0.6706880927085876},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.4484010338783264},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4453417658805847},{"id":"https://openalex.org/keywords/environmental-science","display_name":"Environmental science","score":0.3982505798339844},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35314059257507324},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3431134521961212},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22038227319717407},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.11142498254776001},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10795482993125916},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.10446524620056152}],"concepts":[{"id":"https://openalex.org/C7363328","wikidata":"https://www.wikidata.org/wiki/Q5426847","display_name":"FOIL method","level":2,"score":0.7224421501159668},{"id":"https://openalex.org/C158960510","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Relative humidity","level":2,"score":0.6706880927085876},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.4484010338783264},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4453417658805847},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.3982505798339844},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35314059257507324},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3431134521961212},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22038227319717407},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.11142498254776001},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10795482993125916},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.10446524620056152}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2017.8234298","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8234298","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6700000166893005}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1538299322","https://openalex.org/W2043765394","https://openalex.org/W2046847260","https://openalex.org/W2065187211","https://openalex.org/W2126122290","https://openalex.org/W2133025798","https://openalex.org/W2398725161","https://openalex.org/W2971153719","https://openalex.org/W6632233664"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2086997807","https://openalex.org/W2000498910","https://openalex.org/W2013511864","https://openalex.org/W2366365583","https://openalex.org/W1586733611","https://openalex.org/W1642018725","https://openalex.org/W2181379992","https://openalex.org/W4390758803","https://openalex.org/W2380249611"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"relative":[3,65,97],"humidity":[4],"sensors":[5,13],"based":[6],"on":[7,16,68,84],"electrochemical":[8,28],"and":[9,43,124],"capacitive":[10,80,122],"principles.":[11],"The":[12,27,49,62,94],"are":[14,21],"fabricated":[15,83],"flexible":[17,70],"polymer":[18,86],"substrates,":[19],"which":[20,34],"used":[22],"for":[23],"ultra-thin":[24,121],"chip":[25],"embedding.":[26],"sensor":[29,50,64,81,96,112,123],"consists":[30],"of":[31,41,106,119],"spin-coated":[32],"nanosheets,":[33],"shown":[35],"huge":[36],"range":[37],"(about":[38],"5":[39],"orders":[40],"magnitude)":[42],"fast":[44],"response":[45,104],"(<;":[46],"2":[47],"s).":[48],"film":[51],"thickness":[52],"as":[53,55],"well":[54],"ionic":[56],"conductivity":[57],"change":[58,67],"upon":[59],"moisture":[60],"absorption.":[61],"measured":[63,95],"conductance":[66],"the":[69,85,120],"substrate":[71],"is":[72,82,99,114],"368%.":[73],"In":[74],"addition,":[75],"a":[76,90,103,111,125],"3-pm":[77],"thick":[78,127],"conventional":[79],"substrate,":[87],"together":[88],"with":[89,102],"humidity-insensitive":[91],"reference":[92],"capacitor.":[93],"sensitivity":[98],"about":[100,107],"75%":[101],"time":[105],"6":[108],"s.":[109],"Finally,":[110],"system-in-foil":[113],"demonstrated":[115],"using":[116],"discrete":[117],"components":[118],"30-pm":[126],"capacitance-to-digital":[128],"readout":[129],"chip.":[130]},"counts_by_year":[{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":4}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}