{"id":"https://openalex.org/W2782354351","doi":"https://doi.org/10.1109/icsens.2017.8234176","title":"A force-balanced negative feedback method for MEMS based electrochemical seismic sensor","display_name":"A force-balanced negative feedback method for MEMS based electrochemical seismic sensor","publication_year":2017,"publication_date":"2017-10-01","ids":{"openalex":"https://openalex.org/W2782354351","doi":"https://doi.org/10.1109/icsens.2017.8234176","mag":"2782354351"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2017.8234176","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8234176","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101855868","display_name":"Guanglei Li","orcid":"https://orcid.org/0000-0002-5038-5039"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guanglei Li","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China","institution_ids":["https://openalex.org/I4210107198"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China","institution_ids":["https://openalex.org/I4210107198"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China","institution_ids":["https://openalex.org/I4210107198"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101827813","display_name":"Zhenyuan Sun","orcid":"https://orcid.org/0000-0002-2611-7771"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenyuan Sun","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China","institution_ids":["https://openalex.org/I4210107198"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044713131","display_name":"Lianhong Chen","orcid":"https://orcid.org/0000-0002-5331-1895"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lianhong Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China","institution_ids":["https://openalex.org/I4210107198"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100326500","display_name":"Jian Chen","orcid":"https://orcid.org/0000-0003-4612-3279"},"institutions":[{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Science, Beijing, China","institution_ids":["https://openalex.org/I4210107198"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210107198"],"apc_list":null,"apc_paid":null,"fwci":0.5057,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.64244094,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.994700014591217,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6882474422454834},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5969070792198181},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.48814496397972107},{"id":"https://openalex.org/keywords/electromagnetic-coil","display_name":"Electromagnetic coil","score":0.4711400866508484},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4627054035663605},{"id":"https://openalex.org/keywords/frequency-domain","display_name":"Frequency domain","score":0.4481828510761261},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.43999338150024414},{"id":"https://openalex.org/keywords/time-domain","display_name":"Time domain","score":0.4196820855140686},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.3740772306919098},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34149736166000366},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3083018660545349},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2866850197315216},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.27597689628601074},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2638225555419922},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.17063480615615845},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.12875720858573914}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6882474422454834},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5969070792198181},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.48814496397972107},{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.4711400866508484},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4627054035663605},{"id":"https://openalex.org/C19118579","wikidata":"https://www.wikidata.org/wiki/Q786423","display_name":"Frequency domain","level":2,"score":0.4481828510761261},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.43999338150024414},{"id":"https://openalex.org/C103824480","wikidata":"https://www.wikidata.org/wiki/Q185889","display_name":"Time domain","level":2,"score":0.4196820855140686},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.3740772306919098},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34149736166000366},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3083018660545349},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2866850197315216},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27597689628601074},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2638225555419922},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.17063480615615845},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.12875720858573914},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2017.8234176","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8234176","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1630546599","https://openalex.org/W2003727955","https://openalex.org/W2021433054","https://openalex.org/W2089328359","https://openalex.org/W4391433760"],"related_works":["https://openalex.org/W2782295999","https://openalex.org/W2162306796","https://openalex.org/W1970292246","https://openalex.org/W2765800144","https://openalex.org/W2016162169","https://openalex.org/W4247952185","https://openalex.org/W1895367623","https://openalex.org/W1642462315","https://openalex.org/W2015118744","https://openalex.org/W2005619368"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,59],"MEMS":[4],"based":[5],"electrochemical":[6],"seismic":[7,43,52,61],"sensor":[8,44,53],"with":[9],"force-balanced":[10],"negative":[11],"feedback":[12],"where":[13],"the":[14,17,40,46,65],"bandwidth":[15],"of":[16,31,67],"proposed":[18,51],"device":[19,63],"was":[20,35],"extended":[21],"from":[22],"7-20":[23],"Hz":[24],"to":[25],"0.1-50":[26],"Hz.":[27],"The":[28,50],"quantified":[29],"sensitivity":[30],"3227":[32],"V/":[33],"(m/s)":[34],"161.4":[36],"times":[37],"greater":[38],"than":[39],"commercial":[41],"moving-coil":[42],"in":[45,64],"low":[47],"frequency":[48],"domain.":[49],"may":[54],"be":[55],"widely":[56],"used":[57],"as":[58],"promising":[60],"detecting":[62],"field":[66],"seismology.":[68]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}